5-Port Solenoid Valve

Station 3 1 13 47.04 Station 4 Station 5 Connector JBZ-25S-3 made by Station 6 J.S.T. Mfg. Co.,Ltd. 1425 Socket side Station 7 Station 8 22 Terminal no.

MRHQ

MRHQ10 P407090-1 MRHQ10D P407090-3D Switch holder B MRHQ16 MRHQ10S P407090-3S MRHQ20 P407060-1 MRHQ10C P407090-3C Switch case MRHQ25 MRHQ16D P407060-3D MRHQ16S P407060-3S MRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D Each unit includes two of each of the parts indicated left. Switches are not included with a unit.

Rotary Gripper Series MRHQ

MRHQ10D MRHQ10 P407090-3D P407090-1 MRHQ Switch holder B MRHQ10S MRHQ16 P407090-3S MRHQ10C MRHQ20 P407090-3C P407060-1 MA Switch case MRHQ16D MRHQ25 P407060-3D MRHQ16S P407060-3S DMRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D MRHQ25S Each unit includes two of each of the parts indicated left.

V100

Take proper measures to prevent dust or foreign matter from accumulating in this area. (6) (3e) VQZ (3d) (3d) (3c) VZ (3) (9) (3a) VS (3e) (8) Electrical Connection VFN (9) For wiring to DIN terminal, connect the positive (+) polar side with connector terminal no. 1 and the negative () side with connector terminal no. 2 when the rated voltage is DC type. (3e) Magnifying figure (2a) Self-up

Refrigerated Air dryer Series IDU/IDF

, 4D, 6D, 8D Small How to Order Voltage Model Options (No options for standard specification models) 3D 4D 6D 8D C E H 1 IDU 2 4 6 L M R S T Voltage 1 100VAC (50Hz) 100 to 110VAC (60Hz) 200VAC (50Hz) 200 to 220VAC (60Hz) 2 Single phase 240VAC (50Hz) 220 to 240VAC (50Hz) 4 6 220VAC (50Hz) Model Air compressor Refrigerant 2.2kW 3.7kW 5.5kW 7.5kW 1 3D 4D 6D 8D R134a Model and voltage combinations

AC Servo Motor Driver (Pulse input type/Positioning type ）

.1 Parameter combination error for driver communication on slave DB Parameter setting 3D error for driver 3D.2 Parameter combination error for communication driver communication on master DB 3E Operation mode 3E.1 Operation mode error DB error 3E.6 Operation mode switch error DB 1 0 0 0 42.1 Servo control error by position deviation EDB (Note 4) 42.2 Servo control error by speed deviation

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Series SV

Pressure gauge or pressure transducer Temparature Differential pressure gauge or differential pressure transducer gauge g d1 Pressure control d33d1 equipment Flow control 3 valve d2 Air Filter Shut-off Flow meter 10d3 10d1 0d2 3d 3d 3 1 3d 3d 3 2 supply valve Thermometric pipe Test equipment Upstream pressure Downstream pressure measuring tube measuring tube Figure 2 Test circuit of ISO6358

MRHQ

Model Model MRHQ10 MRHQ10D P407090-3D P407090-1 Switch holder B MRHQ MRHQ16 MRHQ10S P407090-3S MRHQ20 MRHQ10C P407090-3C P407060-1 MA Switch case MRHQ25 MRHQ16D P407060-3D MRHQ16S P407060-3S DMRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D MRHQ25S P408080-3S Each unit includes two of each of the parts indicated left.

AC Servo Motor Driver (Network card type ）

Detail name power reset (Note 2, 3) 39.1 Program error DB Alarm 39.2 Instruction argument external error DB 39 Program error 39.3 Register No. error DB 39.4 Non-correspondence instruction error DB 3A Inrush current suppression circuit error 3A.1 Inrush current suppression circuit error EDB 3D.1 Parameter combination error for driver communication on slave DB 3D Parameter setting error for

Rotary Gripper Series MRHQ

P407090-1 P406090-3D MRHQ10D Switch holder B P406090-3S MRHQ10S P407060-1 P406090-3C MRHQ10C Switch case P406060-3D MRHQ16D P406060-3S MRHQ16S P406060-3C MRHQ16C P407080-3D MRHQ20D P407080-3S MRHQ20S Switch holder A P407080-3C MRHQ20C P408080-3D MRHQ25D Two of each part indicated at the left are included in a unit. Switches are not included with a unit.

FGG-E

Clamping position check pin Clamping nut Latch (2) (1) Part no.AL-25S(NBR) Part no.AL-22S(FKM) 2 Removal of element Remove the wing nut and the washer. Caution Please remove two wing nuts at the same time. The element retainer might not be able to incline from one side when it is outside and to remove well. Remove the element retainer.

FGX-OM-L011

2/8 FGX-OM-L011 FGG Series/ (P) 0.02MPa V V () O O 1 (O ) ) 3/8 FGX-OM-L011 FGG Series/ IN/OUT 0.1MPa M12 , INLETOUTLET 67 O V O 40 4/8 FGX-OM-L011 1 1/8 Rc2 Rp1/4 Rp1/4 INLET DRAIN Rp3/4 OUTLET Rc2 1 AG-10S SUS304 JIS B2401-1A-P11 NBR O JIS B2401-4D-P11 FKM M101.5 11 SUS304 M10 SUS304 SUS304 AN-3S SUS316WPA L-27S SUS316 U-8SU-9SU-10S SUS304 SUS304 J-4S SUS316 AL-25S

air-filter-e

.: AL-25S) FKM (Part no.: AL-22S) FGGL 1 O-ring Refer to pages 256 and 257 for the replacement element type. AL-25S AL-22S Case fastening parts V-band coupling (Part no.: CY-27S) CY-27S Note) The quantity used for 1 filter is 1 each of the above O-ring etc.

smcmaintenancepartslist

.: AL-25S) FKM (Part no.: AL-22S) FGGL 1 O-ring Refer to pages 256 and 257 for the replacement element type. Case fastening parts V-band coupling (Part no.: CY-27S) Note) The quantity used for 1 filter is 1 each of the above O-ring etc.

A

R A L L E L T Y P E S I N G L E A C T I N G T Y P E: N O R M A L LY O P E N MHQ2-6D 6 Outside holding force: 3.4 Inside holding force: 6.2 4 MHQ2-10D 10 11 4 Double acting type MHQ2-16D 16 35 6 MHQ2-20D 20 43 10 MHQ2-25D 25 64 14 MHQ2-6S 6 Outside holding force: 1.9 Inside holding force: 1.1 4 Single acting type Normally open type MHQ2-10S 10 8 4 MHQ2-16S 16 27 6 MHQ2-20S 20 34 10 MHQ2-25S

CATALOG

R A L L E L T Y P E S I N G L E A C T I N G T Y P E: N O R M A L LY O P E N MHQ2-6D 6 Outside holding force: 3.4 Inside holding force: 6.2 4 MHQ2-10D 10 11 4 Double acting type MHQ2-16D 16 35 6 MHQ2-20D 20 43 10 MHQ2-25D 25 64 14 MHQ2-6S 6 Outside holding force: 1.9 Inside holding force: 1.1 4 Single acting type Normally open type MHQ2-10S 10 8 4 MHQ2-16S 16 27 6 MHQ2-20S 20 34 10 MHQ2-25S

Air Preparation Equipment

.: AL-25S) FKM (Part no.: AL-22S) FGGL 1 O-ring Refer to pages 256 and 257 for the replacement element type. AL-25S AL-22S Case fastening parts V-band coupling (Part no.: CY-27S) CY-27S Note) The quantity used for 1 filter is 1 each of the above O-ring etc.

MHK2

164 Closing direction spring assist MHKL2-20D 20 18 16 34 312 MHW Opening direction spring assist With grease needle MHKL2-25D 25 22 19 41 562 -X Switch groove (Both-side type) 90 12 9 11 9 20 105 MHKL2-12S Normally open Normally closed Without magnet MRHQ 16 17 14 14.6 28.6 165 MHKL2-16S EPDM seal/Fluorine grease 20 32 18 16 34 314 MHKL2-20S Fluorine grease MA 25 53 22 19 41 565 MHKL2-25S

Compact 5-Port Solenoid Valve

Molded cover L Seal (Length) 2 x M2.6 x 0.45 16 44 8 (2.4) 015 Connector JBZ-25S-3 made by J.S.T. Mfg. Co., Ltd. Connector hood L Terminal no.