Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 35, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.7, Support bracket: Through-hole

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ZS-22-B Response frequency 200Hz 200Hz 200Hz 200Hz 200Hz 200Hz (5ms) (5ms) (5ms) (Sms) (Sms) (5ms) (With two M4 mounting thread) Noj. l) Hysteresis Adjustable AdjlJSlable A~uslable Adjustable A~US1ab' A~lJstabte mode m;1 Cf rm: (}i jl t(rml t~,~I~IIm] Cldj.t;,' II"mI l~j~Cf nn'e:, 1: &ij. orm::fe,1 Hysl21 esls Wmdow Fixed Fi xed Fixed Fixed Fixed Fixed co6:rearator m e (3digit) (3digit)

LEC-OM02704CN

(RD)((2)) (RY(n1)ARY(n3)A) (2) (RYn0) ON(RYn0) (22.5s) OFF ON ON(RYn0) (RY(n 1)A RY(n3)A) RD OFF ON 10ms 10ms 95ms (RYn0) OFF ON 95ms (RY(n1)A RY(n3)A) ON OFF 10ms 5ms 10ms 5ms 5ms 10ms OFF ON (RD) 4 8 4 (3) EMGEMG (E6) (EMG) (RYn1)(RYn2) RYn1RYn2 DC24V DICOM () DOCOM EMG .4.8.3 4 9 4 4.3.3 CNP1CNP2CNP3 13.913.1 CNP1CNP2CNP3 (1) LECSC(A) () CNP1 CNP1 54928-0670(Molex) 54928

CEx-OMI0064

4 ) ,20 20 (31 ) 5 ,,31 ( ,No.) ,(),S.STOP , (RS-232C BCD ) ,,RS-232CBCD (,,, ,) (/) RS-232C RS-232C ,PLC(RS-232C )CEU5 BCD (CEU5*B-*) BCD PLC , 6 - 4 CEU5 CEU5-D CEU5P CEU5P-D CEU5B CEU5B-D CEU5PB CEU5PB-D (DIN ) ,, LCD() 6 (),(/) 2ROM(80 ,:E2FUL)} {} {E ,() 90/UPDOWN (*1) 100kHz (*2) GND (COM DC12/24V ) DC12/24V (COM GND ) DC 12V10 %,60mA , , BCD //(100ms) 5 / 5ms

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

max. 5ms max. 6.5ms max.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

: Light up when ON), Red LED (OUT2: Lights up when ON) Hysteresis mode Window comparator mode Hysteresis Note 4) Response time Output short circuit protection Display Display accuracy Indication light Analog output Auto shift input Note 2) Output voltage: 1 to 5V 5% F.S. or less Output voltage: 1 to 5V 2.5% F.S. or less Note 3) No-voltage input (solid state switch or reed switch), input 5ms

PSxx-OMU0005CN

ASin ooo1 C_5 5ms ASino.r1 ( ) C_5(44 ) C_5 -105.0105.0 kPa -210210.0 kPa -0.1051.050 MPa -1.1551.155 MPa 10.0-105.0 kPa -115.0115.0 kPa -41No.PS-OMU0005CN-C [F 6] 5R.D. <> [F 6] [F 6] -42No.PS-OMU0005CN-C [F10] <> [F10] 2 OUT1 OFF OUT2 [dUAL]2 () () [dUAL]2 45 () () () 45 () [F10] -43No.PS-OMU0005CN-C <> (OFF) OUT1 n_1 OUT1 OFF OUT2 OUT2 OFF n_2 [F10 ] (

F/ISE

: Light up when ON), Red LED (OUT2: Lights up when ON) Hysteresis mode Window comparator mode Hysteresis Note 4) Response time Output short circuit protection Display Display accuracy Indication light Analog output Auto shift input Note 2) Output voltage: 1 to 5V 5% F.S. or less Output voltage: 1 to 5V 2.5% F.S. or less Note 3) No-voltage input (solid state switch or reed switch), input 5ms

I

) 200Hz (5ms) 200Hz (5ms) (not analog output model) (not analog output model) (not analog output model) Differential (NOTE 1) min 3 units of display min 3 units of display min 3 units of display (not analog output model) (not analog output model) (not analog output model) Fluid Air, inert gas Air, inert gas Air, inert gas Temperature Characteristics +-3% F.S +-3% F.S +-3% F.S Repeatable Accuracy

VQ

or less 6.5 or less 5ms or less 5ms or less Response time (2) 1W (42mA) 0.7W (29mA) (3) 1W (42mA) 24V DC 1W (83mA) 0.7W (29mA) (3) 1W (83mA) 12V DC Clean Series Power consumption (Current) 0.6VA (6mA) 0.5VA (5mA) 100V AC Clean series is available for both standard and option specifications. 0.55VA (5mA) 0.65VA (5.9mA) 110V AC 1.0VA (5mA) 1.2VA (6mA) 200V AC How to Order Valve 10-VQ110l-l

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire) DIGITAL FLOW SWITCH. Flow Sensor for Air. 10.00000 lb. F29.

Dedicated Controller

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire), FLOW SWITCH, INSTRUMENTATION, IFW/PFW FLOW SWITCH, 2X, IFW/PFW NO SIZE ALL OTHER, .22312 lb

Table of Contents

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Dedicated Controller

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Electric Actuators

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Response time with respect to controller input signals Timing for alarm reset ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Electric Actuator with Integrated Guide

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Dedicated Controller Series LC1 Uniaxial Type

Timing for stop by ALARM-RESET during operation Timing for home position return ON OFF SET -UP ALARM -RESET ON OFF max 5ms max 25ms ON OFF BUSY V O Speed max 20ms max 15ms V O Speed Home position return speed Creeping speed BUSY ON OFF ON OFF SET -ON BUSY-OFF timing is controlled by actuator deceleration.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

OUT2 setting/(CH1 only) MPa or kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE Normally Open Normally Closed SET SET 8 Series PSE Operation : Initial Setting 4 Response time setting MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE 5ms 20ms 160ms 640ms SET Press SET button.

Large Type Vacuum Unit Series ZR

Function plate (order made) Without vacuum switch Double solenoid Air operated Valve unit Vacuum pump specification full set One pilot Digital Vacuum Switch Specifications/Series ZSE4 ZSE426 65 25 Model NPN open collector 30V, 80mA Analog output 1 to 5V (5%FS) load impedance 1k PNP open collector 80mA Output specifications Indicator light Response frequency Lights up when ON, Green 200Hz (5ms