10

65 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 70 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 70 75 80 85 95 100 D-A9l n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2

Electric Actuator/Slider Type

10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LEYG25M LEYG25M 0.1 0.1 100 1000 70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200 mm/s or less !

15

50 4.6 13 60 M3 x 12 M4 x 12 14 NY 2 x M4 x 0.7 8 70 50 4.6 13 60 M3 x 12 M4 x 12 11 NW 2 x M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 M4 x 12 9 NU 2 x M5 x 0.8 8.5 70 50 4.6 10.6 60 M3 x 12 M4 x 12 11 NT 2 x M5 x 0.8 8.5 70 50 4.6 17 60 M3 x 12 M4 x 12 12 NM2 M4 x 0.7 8 50 38.2 11.5 60 7 M3 x 12 M4 x 12 10 32 NZ 4 x M5 x 0.8 8.5 70 50 4.6 11 60 M4 x 12 M4 x 12 14 NY 4 x M4

Cylinder with Lock

(n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 55 65 70 75 D-M9mAV n 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 70 75 80 85 90 D-A9m n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 40 (

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

Integrated Controller

The load factor for each direction can be found as follows. x = 0/350 = 0 y = 50/250 = 0.2 z = 200/1000 = 0.2 5. x + y + z = 0.4 1 1000 1000 Lz 1000 800 800 800 600 600 600 L2 [mm] L3 [mm] L1 [mm] 400 400 400 Lx Ly 200 200 200 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 0 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 15 Easy to Operate Model Selection EQFSH Series

Cylinder with Lock

(n = 4, 8, 12, 16)2 100 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 55 60 65 70 75 D-M9AV n 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 70 75 80 85 95 D-A9 n 70 + 40 (n 4) 2 (n = 4

CHKD/CHKG

CHKDB50 -5 (M) CHKDB20 -5 (M) 70 CQ-M10 x 70L 55 CQ-M5 x 55L CHN -10 (M) -10 (M) 75 x 75L 60 x 60L -15 (M) -15 (M) 80 x 80L 65 x 65L CHM -20 (M) -20 (M) 85 x 85L 70 x 70L CHS -25 (M) -25 (M) 90 x 90L 75 x 75L 12.4 -30 (M) -30 (M) 95 x 95L 80 x 80L 15.8 CH2 -35 (M) -35 (M) 100 x 100L 85 x 85L -40 (M) -40 (M) 105 x 105L 90 x 90L CHA -45 (M) -45 (M) 110 x 110L 95 x 95L -50 (M) -50 (M) 115 x

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

124 30 70 17 60 70 90 90 20 22.5 Single clevis with ball joint (CS) EN E B (Max.)

JIS Standard Hydraulic Cylinder

CH2 H B B 50 100 CH D2 H B B 50 100 M9BW With Auto Switch With auto switch (built-in magnet) Port and cushion valve positions Refer to page 359.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Type N A Rubber bumper, 20 to 100 Air cushion, 40 to 63 Nil Built-in magnet Clean series 10 11 Relief type Vacuum suction type No D With auto switch (Built-in magnet) Bore size (mm) 10 C D G 1 B N 40 150 Z M9BW 21 C D G 1 B N 40 150 Z M9BW Mounting Cylinder stroke (mm) B Auto switch Number of auto switches Basic Axial foot Rod

Tie-rod Type Hydraulic Cylinder

Content 70% flat black 1 Rod cover Aluminum alloy 40 CHA40-PS 70% flat black 2 Head cover Aluminum alloy 50 CHA50-PS Hard anodized Aluminum alloy 3 Cylinder tube 63 CHA63-PS Carbon steel Nos. !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Holding Force of Pneumatic Locking Holding force [N] To ensure proper braking force, the maximum loads are as follows: For horizontal mounting: 70% of the maximum static load or less For vertical mounting: 35% of the maximum static load or less The 70% and 35% correspond to the 100% and 50% load ratios respectively, in proportion to the theoretical thrust force of 0.5 MPa.

ISO Standard Hydraulic Cylinder

(Tightening torque of M4 screw should be 1 to 1.2 Nm.) 343 ISO Standard Hydraulic Cylinder 32, 40, 50, 63, 80, 100 CHSG Series 16 MPa How to Order 100 M9BW CH D SG B 40 Magnet for auto switch Number of auto switches Series type Nil D Without Built-in Symbol G Nominal pressure Nil S n 2 pcs. 16 MPa 1 pc. Mounting type "n" pcs.

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 127 LEJ Series AC Servo Motor Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction.

Environment

100 50 70 12 70 20 1.3 85 15 0.8 LEY25 LEPY LEPS 40C 140 Lead 3: LEY25AC LER 120 LEY25 Lead 6: LEY25AB 100 Lead 12: LEY25AA 500 LEH Force [N] 80 Lead 3: LEY25C 400 60 LEY -X5 Lead 6: LEY25B 40 Force [N] Lead 12: LEY25A 300 11LEFS 20 200 20 30 40 50 60 70 80 90 100 0 11LEJS Set value of pushing force [%] 100 Max. 95% Max. 65% Ambient temperature Set value of pushing force [%] Duty ratio

Compact Hydraulic Cylinder

BQ-1 BQ-2 BQ2-012 Weight (g) 1.5 1.5 5 259 CHQB/CHQWB Series How to Mount and Move the Auto Switch Solid state D-M9N(V), D-M9P(V), D-M9B(V) D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Reed D-A90(V), A93(V), A96(V) 20 1.

Rotary Actuator

Symbol Shaft Pattern Sequencing1 -XA1 to -XA24 Applicable shaft type: S, W, Y How to Order C RA1 Z X D B S 50 90 M9BW A1 A2 C8 C59 Number of auto switches Magnet Nil 2 pcs. S 1 pc.

Compact

Indicator light CE marking, RoHS Standard Oilproof Flexible Heavy-duty Lead Wire Specifications Auto switch model D-M9NW(V) D-M9PW(V) D-M9BW(V) Precautions Caution Sheath Outside diameter [mm] 2.6 3 cores (Brown/Blue/Black) 2 cores (Brown/Blue) Number of cores Insulator Fix the auto switch with the existing screw installed on the auto switch body.