Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

X 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 0

15

on page 800 for details about motor mounting and included parts.

Auto Switch Guide

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Other Warning 1.

Integrated Controller

[kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600

MHZ

Weight (g) End boss type (Symbol) Model H E M K MHZA2-6 28 28 28 28 MHZAJ2-6 29 29 29 29 12-2-24 24 Parallel Style Air Gripper Standard Type Series MHZ2 Size: 6, 10, 16, 20, 25, 32, 40 How to Order MHZ 6 MHZ2 D 6 M9B MHF MHL Number of auto switches Number of fingers 2 2 fingers Nil S 2 pcs. 1 pc.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com High precision type MSQ B 10 A M9B Basic type Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Table of Contents

Bore size (mm) 6 18 10 20 16 33 20 40 25 46 32 56 7 9 Free Mount Cylinder Double Acting, Double Rod Series CUW 6, 10, 16, 20, 25, 32 How to Order 6 30 30 CUW D Without auto switch 6 30 M9B 30 CDUW D With auto switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Other Warning 1.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Other Warning 1.

CQS

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 15 Note) 25 Note) 10 10 5 2 10 Note) 25 Note) RQ 5 1 15 Note) Note) Please consult with SMC for shorter stroke length than indicated in the table.

MY1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data Simple guide type allows a workpiece to be mounted directly.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Material: Chromium molybdenum steel (Nickel plated) Bore size (mm) RQ T1 M F E D B T2 Part no.

Compact Cylinder

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series C55 Series C55 ISO Standards [ISO/21287] Compact Cylinder 20, 25, 32, 40, 50, 63 Series C55 How to Order Without auto switch B 20 10 C55 B 20 10 M9B S CD55 With auto switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1/4 1/4 1/4 3/8 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 37 44 50 56 66 8-25-11 11 Series MGZ With Mounting Bracket Transaxial foot style: (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ LD Y X LH LT LX LY LZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50

Made to Order

MB-F05 MB-F06 MB-F08 MB-F10 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Single clevis MB-C03 MB-C04 MB-C05 MB-C06 MB-C08 MB-C10 100 1000 Double clevis MB-D03 MB-D04 MB-D05 MB-D06 MB-D08 MB-D10 Note 1) Order two axial foot brackets per cylinder.

ISO Standard Hydraulic Cylinder

Standard Stroke DBore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25 to 800 25 to 800 25 to 800 25 to 800 25 to 800 25 to 1000 Theoretical Output OUT IN Unit: N Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 16 10 7 3.5 12864 8040 5628 2814 OUT 804 32 18 8784 5490 3843 1922 IN 549 20096 12560 8792 4396 OUT 1256 40 22 14016 8760 6132 3066

Auto Switch Guide

C76 Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL C85 C95 CP95 Auto Switch Mounting Bracket Part No.

Compact

800 800 800 m 11LEJS L3 [mm] L3 [mm] L3 [mm] L3 [mm] 600 600 600 600 L3 Z 25A400 400 400 400 200 200 200 200 LEC 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 0 5 10 15 20 0 2 4 6 8 10 LEC S Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 500 1000 1000 LEC SS-T 800 400 800 800 L4 LEC Y L4 [mm] L4 [mm] L4 [mm] L4 [mm] 600 300 600 600 X 400 200 400 400 m Motorless 200 100 200 200 0 0

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

800 1500 1500 LEL L1 L1 [mm] L1 [mm] L1 [mm] L1 [mm] 600 600 1000 1000 X m Me LEM 400 400 500 500 200 200 LEY 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH