Table of Contents

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 DIntermediate strokes and short strokes other than the above are produced upon receipt of order.

Integrated Controller

Product Precautions Model EQFS16H EQFS25H EQFS32H EQFS40H Stroke [mm]1 50 to 500 50 to 800 50 to 1000 150 to 1200 Work load [kg]2 Horizontal 10 15 18 15 26 40 40 39.5 50 68 68 26 60 75 80 Vertical 3 6 12 2 6 12.5 15 4 10 16 20 4.5 4.5 25 40 Up to 400 10 to 800 5 to 400 3 to 195 20 to 1200 12 to 850 6 to 450 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5

CLS

(Up to 1200) 180 Up to 1500 (Up to 2000) Up to 1200 (Up to 1200) 200 Up to 998 (Up to 2000) Up to 998 (Up to 1200) Holding Force of Spring Locking (Maximum static load) 250 (Up to 2400) (Up to 1200) Auto switches are not available with steel tube.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 901 to 1000 390 190 600 300 1001 to 1100 320 160 500 250 1101 to 1200 270 130 420 210 1201 to 1300 360 180 1301 to 1400 310 150 1401

Compact

(1100), (1200), (1300), (1400), (1500) Page 170 2000 20 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 25 10 LEMHT Linear guide double axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000), (1100), (1200), (1300), (1400), (1500) Page 170 32 2000 20 Strokes shown in ( ) are produced upon

Made to Order

1200 Specifications XC6 Standard model no.

Smooth Cylinder/Low Speed Cylinder

or less 1200 or less 1600 or less Made of stainless steel (With hard chrome plated piston rod) -XC68 RZQ Accessory -XC86 With rod end bracket Basic Foot Rod flange Head flange Single clevis Double clevis Center trunnion For the specifications of cylinders with auto switch, please refer to pages 1238 to 1240.

MY1

Support brackets are not for mounting; use them solely for providing support. m 90 MY1C63 MY1C63 MY1C63 MY1C63 80 (1600) (1600) (1600) (1600) (1600) (1600) 70 MY1C50 MY1C50 MY1C50 MY1C50 MY1C50 MY1C50 l l 60 (1400) (1400) (1400) (1400) (1400) (1400) MY1C40 MY1C40 MY1C40 MY1C40 50 MY1C32 MY1C32 MY1C32 MY1C32 MY1C32 MY1C32 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1C25 MY1C25 MY1C25 MY1C25

Environment

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

2

400 1600 0.00 0 1000 600 800 400 200 1200 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA IDG50LA P1 = 0.3 MPa 0.08 P1 = 0.3 MPa 0.03 Pressure drop (MPa) Pressure drop (MPa) 0.06 P1 = 0.5 MPa P1 = 0.5 MPa 0.02 0.04 P1 = 0.7 MPa 0.01 P1 = 0.7 MPa 0.02 0 200 400 600 800 0 100 200 300 400 500 Inlet air flow rate

Air Cylinder

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load Applicable bore size Indicator light Type Special function Electrical entry Wiring (Output) DC AC 20 to 63 80, 100 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line In-line M9NV M9N IC circuit 3-wire (NPN) G59 5 V, 12 V 3-wire (PNP) M9PV M9P G5P Grommet 2-wire 12 V M9BV M9B K59 Connector H7C

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

RY RT [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 50 Up to 1200 20 to 1200 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 63 Up to 1200 20 to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 80 Up to 1400 20 to 1400 40 37 102 32

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

5

or less 1200 or less 1600 or less -XC68 Made of stainless steel (with hard chrome plated piston rod) -XC86 With rod end bracket Accessories/For details, refer to page 221.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

In-line In-line Perpendicular Perpendicular 3-wire (NPN equivalent) IC circuit 5V A76H A96 A96V Grommet A72H A73H 200 V A72 A73 A73C A93 A93V Reed switch Solid state switch Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Diagnostic indication (2-color indication) A79W Grommet F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F79W F7PW J79W F7BA M9N M9P M9B

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

101 45 88 75 63 IN 16 25 216 202 187 141 173 158 101 144 129 60 115 100 86 OUT 32 471 318 297 277 165 256 235 118 214 193 71 173 152 131 IN 576 20 40 597 413 390 367 220 344 321 157 298 275 94 252 229 206 OUT 717 50 951 659 622 586 264 550 514 189 477 441 113 405 369 IN 1139 25 63 1213 865 824 783 344 742 702 245 661 620 147 579 538 OUT 1424 80 2111 1539 1471 1404 422 1336 1268 302 1200

•

or less 1200 or less 1600 or less -XC27: Double clev!