Electric Actuator/Slider Type

800 800 800 800 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 600 600 600 600 Me X 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Me L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 600 600 600 600 L5 Wall Y 400 400 400 400 200 200 200 200 0 0 0 0 0 10 20 30 50

Auto Switch Guide

RS Q G RS H A Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) RZQ D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model MI W S 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 CEP1 OUT Black 68 68 63 5 CE1 Dimensions DC () Blue D-M9V D-M9 CE2 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light

Auto Switch Guide

CLS CLQ Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) MLGP D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model RLQ 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 MLU OUT Black 68 68 63 5 ML1C Dimensions DC () Blue D-M9V D-M9 DM2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV M2.5 x 4l Slotted set screw

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

X 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 0

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

15

on page 800 for details about motor mounting and included parts.

Auto Switch Guide

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Integrated Controller

[kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

MSQ MRQ Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) DDC (+) Brown D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model 208 8 7 0.5 Main circuit of switch Main circuit of switch Main circuit of switch Lead wire length (m) OUT Black 41 41 38 3 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 D-M9P, D-M9PV M2.5 x 4l slotted set screw 500 (3000) (5000) Indicator light M2.5 x 4l Slotted set screw

MHZ

8 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC Double acting/With fingers closed MHT MHY MHW MRHQ Misc. Component Parts DNo. Description Material Note No.

Compact Cylinder

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Built in magnet Nil S n 2 pcs. 1 pc. n pcs.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

CQS

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 15 Note) 25 Note) 10 10 5 2 10 Note) 25 Note) RQ 5 1 15 Note) Note) Please consult with SMC for shorter stroke length than indicated in the table.

MY1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data Simple guide type allows a workpiece to be mounted directly.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Material: Chromium molybdenum steel (Nickel plated) Bore size (mm) RQ T1 M F E D B T2 Part no.

Table of Contents

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-A9V D-M9V D-F9WV 5 (7) ( ): Denotes the values of D-M9V, D-F9WV.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1/4 1/4 1/4 3/8 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 37 44 50 56 66 8-25-11 11 Series MGZ With Mounting Bracket Transaxial foot style: (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ LD Y X LH LT LX LY LZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50