Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 200, Max.

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: A90--Reed, AC Volt, Horizontal

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-3 Pin Connector, Number: -

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Standard, Bore Size: 6mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

1

Note 3) Refer to page 200 for dimensions of A or B port top-ported type.

Table of Contents

100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

ISO Cylinder

200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

Table of Contents

220 320 85 121 171 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore size (mm) Over 200 st Over 50 st to 200 st Over 50 st to 200 st Over 200 st Over 25 st to 50 st Over 25 st to 50 st Over 200 st Over 50 st to 200 st Over 50 st to 200 st 50 st or less 50 st or less Over 200 st 25 st or less 25 st or less 80 100 115

Table of Contents

Caution 5 150 100 200 300 1.

Air Cylinder

32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250, 300 MB1 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Air Cylinder

156 180 181 205 206 230 231 255 40 Up to 200 63.5 14 49 22 18 10 6.6 40 4.5 (58.4) 56 30 30 71.4 175 200 200 228 225 253 250 278 For dimensions of pivot bracket, refer to page 309.