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INDEX 270 Series EX600 SI Unit Specifications All Units Common Specifications 10 to 50C 20 to 60C 35 to 85% RH (No dew condensation) 500 VAC for 1 minute between external terminals and FE 500 VDC, 10 M or more between external terminals and FE Operating temperature range Storage temperature range Operating humidity range Withstand voltage Note) Insulation resistance Note) Environmental resistance

CE

Between case and signal ground: 500 VAC for 1 min.

CE

Between case and signal ground: 500 VAC for 1 min.

MXQ

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-5-8 9 Air Slide Table Series MXQ Specifications 6 8 12 16 20 25 Bore size (mm) Rc 1/8 M5 x 0.8 Piping port size Air Fluid Double acting Action 0.15 to 0.7 MPa Operating pressure 1.05 MPa Proof pressure MX 10 to 60C Ambient and fluid temperature MTS 50 to 500 mm/s (Adjuster option/Metal stopper: 50 to 200 mm/

Compact Cylinder

Lateral load Operating pressure: 1 MPa 1000 200 300 500 Stroke Eccentric distance 100 100 Load weight (kg) 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 63 Allowable lateral load (N) 50 40 63 1 32 25 20 50 40 10 32 0.1 25 10 100 200 300 500 1000 Maximum piston

MXW

Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Since there are other applicable auto switches than listed, refer to page 8-7-22 for details.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

280 560 Data 10 4 8 7 6 5 MXY12 3 2.0 Shock absorber Rubber stopper screw 2 4 Load weight W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 20 RHC 10 MK(2) RS Q G 80 70 30 40 50 60 30 60 70 50 40 20 Point of application L (mm) Point of application L (mm) RS H A RZQ MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 MI W S 200 320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

entry 0.5 (Nil) 3 (L) 5 (Z) AC DC Perpendicular In-line 3-wire (NPN) M9NV M9N 5 V 12 V IC circuit Standard 3-wire (PNP) Solid state switch M9P M9PV M9B M9BV 2-wire 12V Relay, PLC Yes Grommet 24 V 3-wire (NPN) F9NW F9NWV 5 V 12 V Diagnosis (2-color indication) IC circuit 3-wire (PNP) F9PW F9PWV F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MPa 30 0.6 MPa RE A B 0.6 MPa 0.5 MPa 60 REC 0.4 MPa 0.5 MPa 0.3 MPa 0.4 MPa Lateral load F (N) Lateral load F (N) 50 CX 0.2 MPa 20 Point of application L 0.3 MPa 40 CY 0.2 MPa 30 Lateral load F MQQ M 10 20 RHC 10 MK(2) RS Q G 80 70 30 40 50 60 30 60 70 50 40 20 Point of application L (mm) Point of application L (mm) RS H A RZQ MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 MI W S 200 320 0.7 MPa 500

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1.2 6 600 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 500 MHS 1.0 4 400 0.8 MHC 3 300 0.6 MHT 2 200 0.4 1 100 0.2 MHY 0 0 0 0.1 0.2 0.4 0.5 0.3 0.1 0.2 0.3 0.2 0.4 0.6 0.8 1.0 1.2 MHW Operating time

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 63, Stroke(mm): 500, Max.

Piping: Standard, Bore Size: 63mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 500mm

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

Piping: Standard, Bore Size: 63mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 500mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: Standard, Bore Size: 63mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 500mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m)