Table of Contents

) 258-9200-www.stevenengineering.com MHS3-100D MHS3-100D MHS 1,000 1,000 Pressure 0.6 MPa Pressure 0.6 MPa MHC 800 Gripping force (N) 800 Gripping force (N) 0.5 MPa 0.5 MPa MHT 0.4 MPa 0.4 MPa 600 600 0.3 MPa MHY 0.3 MPa 400 0.2 MPa 0.2 MPa 400 0.1 MPa 0.1 MPa MHW 200 200 MRHQ 0 0 20 20 40 40 60 60 80 80 100 100 Gripping point L (mm) Gripping point L (mm) Misc.

Made to Order

50 1000 Mounting Brackets/Part No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1000 Bore size (mm) 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 1000 Axial foot Note 1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Flange MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

MY1

D-A90(V) AC DC AC DC 100V or less 20mA AC DC 24V or less 50mA Maximum load current Contact protection box OUT () Brown [Red] Reed switch Reed switch Reed switch Contact protection circuit Internal voltage drop CD-P11 OUT ( ) Blue [Black] CD-P12 D-A93, A93V, D-A96, A96V (with indicator light) D-A93(V) D-A93 In-line D-A93V Perpendicular D-A96 In-line D-A96V Perpendicular Relay, PLC IC circuit

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

CATALOG

20~600 32 35 70 52 20 40 10 17 17 M8x1.25 18 M18x.5 30 3/8 90 0 63 ~600 20~600 3 35 85 64 20 40 10 17 17 M10x1.25 18 M18x1.5 31 3/8 98 0 Bore size No gaiter With gaiter (mm) H ZZ e f h l ZZ 40 51 146 43 11.2 59 1/4 stroke 154 50 58 459 52 11.2 66 1/4 stroke 167 63 58 179 52 11.2 66 1/4 stroke 178 Courtesy of Steven Engineering, Inc. !

A

20~600 32 35 70 52 20 40 10 17 17 M8x1.25 18 M18x.5 30 3/8 90 0 63 ~600 20~600 3 35 85 64 20 40 10 17 17 M10x1.25 18 M18x1.5 31 3/8 98 0 Bore size No gaiter With gaiter (mm) H ZZ e f h l ZZ 40 51 146 43 11.2 59 1/4 stroke 154 50 58 459 52 11.2 66 1/4 stroke 167 63 58 179 52 11.2 66 1/4 stroke 178 Courtesy of Steven Engineering, Inc. !

REA/REB

Speed 600 mm/s Material No.

MY1

Horizontal mounting Cylinder MY1HT50-600 Average operating speed a 700 mm/s Mounting orientation Vertical mounting CusionShock absorber ( = 1/100) 2. Wall mounting z y P. 8-11-36 P. 8-11-6 MY1HT50-600 x y x z Wd: Workpiece (500 g) x 3. Ceiling mounting 4.

5

1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 Unit: MPa Bore size (mm) 32 40 50 63 80 100 Min. operating pressure 0.02 0.01 Note 1) Intermediate strokes not listed above are

10

Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 CS1 -XC88

CXS

Nil (Example) A93 3m . L A93L 5m .

REA/REB

, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

REA/REB

increased (Maximum speed: 600 mm/s) RE A B Series REB introduced with a maximum speed of 600 mm/s.

e-Rodless Actuator

Auto Switch Internal Circuit D-A90 (V) Contact protection box OUT () Brown Reed switch Unit: g Weight Table CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93 (V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93/D-A96

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Cylinder with Lock

[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160

CXS

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CXS

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

Compact Type

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CY1

1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.