Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 300mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

1

Note 3) Refer to page 200 for dimensions of A or B port top-ported type.

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m)

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 200, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 200, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 200, Max.

Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 3 pcs.

Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

Piping: Centralized Piping, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Table of Contents

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Table of Contents

Caution 5 150 100 200 300 1.

Table of Contents

220 320 85 121 171 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore size (mm) Over 200 st Over 50 st to 200 st Over 50 st to 200 st Over 200 st Over 25 st to 50 st Over 25 st to 50 st Over 200 st Over 50 st to 200 st Over 50 st to 200 st 50 st or less 50 st or less Over 200 st 25 st or less 25 st or less 80 100 115