1

2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) CQ2 CQS Luberetainer D-M9lV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) JA D-M9l D-A9l 10 (5) Note 5) 10 15 + 15 (n 2) (n = 4, 6) Note 4) MXH D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) MXQ D-M9lW 15 (10) Note 5) 15 20 + 15 (n 2) (n = 4, 6) Note 4) MGP D-M9lA 15 (10) Note

Compact 5-Port Solenoid Valve

335.5 348 373 385.5 L4 150 162.5 187.5 200 212.5 225 250 262.5 275 300 312.5 325 337.5 362.5 375 L5 15 13 17 16 14 12 17 15 13 18 16 14 12 17 15 96 JSY1000/3000/5000 Series Common Dimensions Type 10/Side Ported Dimensions: JSY1000 Series External Pilot, Built-in Silencer JJ5SY1-10m (D) (S, R) U D B C2 C4 C6 Stations P, E port entry: D External pilot (Made to Order) U side D side (21.6) L

Table of Contents

C1 = C (mm) D1 = Q2 L2 max Y Size (mm) 10 D1 L1 max X Size 3 Y 1 2 to 8 C1 10 15 Y = 3 X 3 4 to 14 Y 1.5 3 to 9 3 to 4 C2 L1= L2 = 15 20 X 4 5 to 18 3 to 4 Y 1.5 3 to 10 3 to 5 X= 20 D2 = 30 X 4.5 6 to 20 3 to 5 Y 2 3 to 13 3 to 6 C2 = C 30 40 X 5 6 to 22 3 to 6 Y 4.5 6 to 15 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

C1 = C (mm) D1 = Q2 L2 max Y Size (mm) 10 D1 L1 max X Size 3 Y 1 2 to 8 C1 10 15 Y = 3 X 3 4 to 14 Y 1.5 3 to 9 3 to 4 C2 L1= L2 = 15 20 X 4 5 to 18 3 to 4 Y 1.5 3 to 10 3 to 5 X= 20 D2 = 30 X 4.5 6 to 20 3 to 5 Y 2 3 to 13 3 to 6 C2 = C 30 40 X 5 6 to 22 3 to 6 Y 4.5 6 to 15 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

C1 = C (mm) D1 = Q2 L2 max Y Size (mm) 10 D1 L1 max X Size 3 Y 1 2 to 8 C1 10 15 Y = 3 X 3 4 to 14 Y 1.5 3 to 9 3 to 4 C2 L1= L2 = 15 20 X 4 5 to 18 3 to 4 Y 1.5 3 to 10 3 to 5 X= 20 D2 = 30 X 4.5 6 to 20 3 to 5 Y 2 3 to 13 3 to 6 C2 = C 30 40 X 5 6 to 22 3 to 6 Y 4.5 6 to 15 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round

CRB2/CRBU2/CRB1

X 15 Y1.5 3 to 9 3 to 4 C1 C2 Y = L2 = L1= 10 3 X1 2 to 14 20 Y1.5 3 to 10 3 to 5 15 X1.5 3 to 18 3 to 4 D2 = 30 Y2 3 to 13 3 to 6 C2 = C X = 20 X1.5 3 to 20 3 to 5 40 Y4.5 6 to 15 3 to 8 30 X2 3 to 22 3 to 6 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round shaft with male threads.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

SMC Pneumatic Clean Series

88 64 62 62 42.5 34.5 30 24 47.3 37 37 30 21.5 15 15 15 46.5 37.5 33.5 28 7 5.5 5.5 5 1/8 143 113 111 107 154 122 120 116 M26 x 1.5 M26 x 1.5 M20 x 1.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 21 19.5 19.5 15.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033 0 32-0.039 0 82 36 10 8 M32 x 2 With air cushion Cushion valve (Width across flats 1.5) WB C2 2-FD Relief port M5 x 0.8

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

C1 = C D1 = (mm) L2 max Y D2 Size (mm) 10 D1 X L1 max Y 1 3 Size 2 to 8 C1 L1 = 10 15 3 Y 1.5 2 to 14 X 1 3 to 4 3 to 9 Y = C2 L2 = 15 20 3 to 4 Y 1.5 3 to 18 X 1.5 3 to 5 3 to 10 X = D2 = 20 30 3 to 5 Y 2 3 to 20 X 1.5 3 to 6 3 to 13 C2 = C 30 40 3 to 6 Y 4.5 3 to 22 X 2 3 to 8 6 to 15 Symbol: A7 The long shaft can be further shortened by machining it into a stepped round shaft with male

7ND9071en

L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

Micro Mechanical Valve Series VM1000

mounting hole (SUP CYL port) (EXH port) VH Toggle lever VFM350-02-08 VHS 2 x M18 x 1 Panel mounting hole Hexagon nut thick 5.5, across flats 24 VHS Max. 7.5 M5 x 0.8 (Pilot exhaust port) Symbol (C1) 2 (C2) 4 12 14 3 (E1) 1 (S) 5 (E2) 3 x 1 4 0.5 MPa supply 2 x 1 8 (SUP CYL port) 2 x 4.2 mounting hole T.T. 15 N F.O.F.

Series SV

Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Terminal plug EX500-AC000-S Attach a terminal plug when an input unit is not connected. 6 6 EX500 Decentralized Serial Wiring Series SV Valve Manifold Common Specifications Manifold Specification Sheets Valve Manifold Specifications

SV

L Dimension n: Stations L n 2 135.5 125 102.6 16.5 63 3 148 137.5 113.1 17.5 73.5 4 148 137.5 123.6 12 84 5 160.5 150 134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17

Possible to transfer a workpiece at low-speed.

Applicable shaft type: W L1 (3 x P) Q1 = M C2 = C Y = DC1 = C C2 Y = L2 = L2 (3 x P) C2 = C L2 = Q2 = M L1 = X = D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 L2 max Y Y D2 L1 max X 2 X 2 L2 max Y Y Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 Y 6 to 9 7.5 to 10 X 8 to 18 9.5 to 20 Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 319 CRQ2X Series (Size: 10, 15, 20, 30, 40) Simple Specials: -

CRQ2

Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

15 15 42.5 34.5 30 24 171 137 135 131 1/8 88 64 62 62 10 8 8 8 M26 x 1.5 M26 x 1.5 M20 x 1.5 40 32 25 20 1/4 1/8 1/8 M32 x 2 718 Cylinder with End Lock CBM2 2122CBM2/ 1011Rod Flange (F): CBM2F, CBM2F 10112122DL Standard port Relief port M5 x 0.8 2 x P (Rc, NPT, G) 24 C2 H2 Width across flats B2 H1 NN Width across flats B1 HC I Eh8 D B AL MM G G FX 2 x FD Width across flats NA A K Relief

7.4

) 22.8 10.5 7.4 58.5 39.7 41.8 9.2 22 28.5 22.9 20.4 10.5 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 8.7 With plug connector/light, built-in silencer S0716S-mM(O)-m 16.7 2-Position Double/4-Position Dual 3-Port Grommet: S07 6-mG-m 2 A B C 8 2 x 3.2 5.3 2 x C2, C4, N1, N3 <4(A), 2

air-filter-e

Number is the same as the Replacement Seal List of the Best Pneumatics No.7 Series FGD. 259 A Industrial Filter Series FGE 1 Replacement Procedure is P.461, 463 Replacement Parts and Seal List How to Order FGES/FGEL type (V-band type) FGE S A 10 B N A 002 Material Symbol Option Pressure gauge type None (with plug) G46-10-02M (Brass at wetted parts) Symbol Gasket/O-ring NBR FKM Body Nil G1