1

P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33 Type

Table of Contents

First tentative bore size determination 0.1 x Wcos + Wsin D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV (For vertical operation, refer to page 10-2-79.)

Electric Actuator with Integrated Guide

Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting

Dedicated Controller

-W1 and LC1-1-W2.

Dedicated Controller

-W1 and LC1-1-W2.

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

ML2B

11 SO-010-24 MYB32-15AA5901 GMY32 RCS-10 NLP-32A MYB25-15AA5900 GMY25 RCS-8 NLP-25-19A RE A B 8.3 x 4.5 x 1.9 P-6 SO-016-9 P-9 SO-010-21 7.15 x 3.75 x 1.7 P-5 SO-015-16 P-7 SO-010-16 Nickel plated REC CX M2L040-07B82108 SO-010-24 M2L032-07B82107 SO-010-21 M2L025-07B82106 SO-010-20 CY 28 x 30 x 1 22.2 x 24 x 0.9 17.6 x 19.4 x 0.9 Since there is a possibility of improper operation, please

ML2B

11 SO-010-24 MYB32-15AA5901 GMY32 RCS-10 NLP-32A MYB25-15AA5900 GMY25 RCS-8 NLP-25-19A RE A B 8.3 x 4.5 x 1.9 P-6 SO-016-9 P-9 SO-010-21 7.15 x 3.75 x 1.7 P-5 SO-015-16 P-7 SO-010-16 Nickel plated REC CX M2L040-07B82108 SO-010-24 M2L032-07B82107 SO-010-21 M2L025-07B82106 SO-010-20 CY 28 x 30 x 1 22.2 x 24 x 0.9 17.6 x 19.4 x 0.9 Since there is a possibility of improper operation, please

LECP6_C

PLC (PLC) 15ms30ms /P.36 8.4 USB PC USB USB USB LEC-W2 COM PC COM COM COM PC COM COM LEC-W2 (LEC-W2) (LEC)== =USB =PC (LEC) OFF PC (LEC)(PLC )(PC ) 64 - 16.2 () /P.28 7. /P.11 3. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.11 3. PLC (PLC) 15ms30ms /P.36 8.4 () () (LED()) /P.12 3.2 /P.28 7. /P.28 7. /P.28 7. /P.11 3.

LECA6_C

SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 /P.11 3. PLC (PLC) 15ms30ms /P.36 8.4 USB USB PC USB USB LEC-W2 COM PC COM COM COM COM PC COM LEC-W2 (LEC)== (LEC-W2) =USB =PC (LEC) OFF PC (LEC)(PLC )(PC ) 64 - 16.2 () /P.28 7. /P.11 3. CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.11 3. PLC (PLC) 15ms30ms /P.36 8.4 () () (LED()) /P.12 3.2 /P.28 7. /P.28 7.

Transfer

ML2B32 Horizontal collision: P = 0.5 MPa Note) The speed of the impact object is measured at the time of impact with the shock absorber. Stroke adjusting unit 2000 1500 Piston speed (mm/s) 1000 Air cushion Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt Adjusting bolt 200 Lock plate holding bolt 0.5 100 10 20 30 40 50 100 200 300 400 500 W2 max. W1 max.

A

A G E A P P L I C A T I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

OMR0031

Controller Set Up (P.34) and 14. Card Motor Controller Configuration software (P. 57) for instructions on how to setup. (6) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.41) and 14.5 Monitor/Test window (P. 68) for instructions on operating instruction of test operation 14 - 3.

CEx-OMQ0011

Nm N M1 M M3 W W2 W W4 ML2B25 10.0 1.2 3.0 200.0 58.0 65.0 100.0 ML2B32 20.0 2.4 6.0 300.0 80.0 96.0 150.0 ML2B40 40.0 4.8 12.0 500.0 106.0 140.0 250.0 ML2B25 ML2B32 ML2B40 J 0.43 0.68 1.21 18 ML2B/M1 ML2B/W1 ML2B/W1 0 0 0 Nm 0 0 0 N N 0 m/s m/s m/s ML2B/M2 ML2B/W2 ML2B/W2 N m N N m/s ML2B/M3 m/s m/s 20 ML2B/W3 ML2B/W3 10 Nm 5 3 2 1 N N m/s m/s m/s ML2B/W4 500 N 00 N

39

Q J K L M N O P Q Part no.

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

ML1

6 M1L025-17B82076 C-7 P-6 M1L040-17B82078 C-9 P-8 4.7-10 Series ML1 Auto Switch Specifications Refer to p.5.3-2 for the details of auto switch.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Blanking plug LQ P 07 2 Packaging Nil 1 Clean packaging Class M3.5 Standard packaging Class M5.5 Used to block fittings which are not being used.

JXCx-OMT0034CN

(5) 230400(6) -3 Download downloadParameter protect Parameter protect1Common + Step data Download (LEC-W2) (LEC) (LEC) communication speed(LEC) communication speed(LEC) (LEC-T1)IF 115.2kbps (LEC-W2)38.6kbps (LEC-W2)115.2kbps 230.4kbps ID setting/Communication speed setting (LEC)ID setting/Communication speed setting 18 - 5. 5.1 CN4 (LEC)(OV) (DC24V) CN4 (PLC) 6.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Calculate (1) (Wmax) from the graph of max. payload (W1, W2, W3) and calculate (2) and (3) (Mmax) from the maximum allowable moment graph (M1, M2, M3).