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C Port W W B port C Port D port A port D port 30 20 172 87 35 48 9 21 30 25 177 87 40 48 9 21 30 32 183 91 40 50 9 23 20 40 208 99 50 57 8 24 20 50 241 117 58 64 12 28 20 63 241 117 58 64 12 28 H SA + Stroke SB + Stroke Please contact SMC for long stroke (301 mm or more) since SA-dimensions and ZZ-dimensions are different from those in the above table.

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COM. () 20 COM.

Table of Contents

VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

CG5-S

(G) T0403 Color symbol -20 T1075 Color symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Color symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Color symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Color symbol -20 White (W) Blue (BU) Blue

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

Compact Electric Actuator Series LG1

mm Lead 150 Slide screw 20 mm Lead 500 10 mm Lead Ball screw Horizontal specification Maximum speed 1000 600 500 930 740 20 mm Lead 100W mm/s 500 Slide screw 20 mm Lead 180 10 mm Lead Ball screw 100W Nm Rated thrust 90 20 mm Lead 50 Slide screw 20 mm Lead Rolled 0.05 Repeatable positioning accuracy Ball screw Ground 0.02 mm 0.1 Rolled Slide screw Motor output Horizontal specification

Pulse Valve

JSXFAH6-10m1-Bm JSXFAH6-10m2-Bm JSXFAH6-10m3-Bm JSXFAH6-10m4-Bm Outlet pipe dimensions A 68 108 68 108 B 173 5 213 5 173 5 213 5 Thread type G1" x 50 G1" x 90 Pipe thread (Pipe for the OUT port) 68 68 50 108 108 90 1" (ANSI) G1" G1" 1" (ANSI) 9 Pulse Valve Valve for Dust Collector JSXFA Series Dimensions: JSXFAH/Immersion Type Dimensions on the tank side A A 69 +1 0 0.3 A 0.4 ANSI 6" 168.3

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Note 2) Use standard power supply cables for 3 m and 10 m lengths. 19 20 19 m 20 m End bracket/IZS40-BE Intermediate bracket/IZS40-BM End bracket Intermediate bracket Note) The number of intermediate brackets required, as listed below, depends on the bar length. Two end brackets are always required regardless of the bar length.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

5.5 4.6 5.5 JSXD41-C Sm04 720 50 Brass/Stainless steel 3/4 20 38 0.30 9.5 8.2 9.5 JSXD51-C Sm06 880 60 Brass/Stainless steel 1 25 225 11.0 13.0 JSXD61-C Sm10 1460 70 Bronze 1 1/4, 32A 35 415 19.6 23.0 0.03 1.0 JSXD71-Bm(12, 32) 5500/3000 80 Bronze 1 1/2, 40A 40 560 26.4 31.0 JSXD81-Bm(14, 40) 6900/4100 90 Bronze 2, 50A 50 880 42.8 49.0 JSXD91-Bm(20, 50) 8500/5500 *1 The flow rate characteristics

MGG

Dimensions 20 to 50 Front mounting flange BM R MH Y + Stroke ZZ + Stroke Front mounting flange 63 BM R MH Y + Stroke ZZ + Stroke (mm) Adjustment 0 to 25mm Adjustment 0 to 50mm Bore size (mm) Y BM R MH ZZ MH ZZ 20 25 32 40 50 63 48 164 73 189 12 86 M6 x 1 48 171 73 196 12 86 M6 x 1 50 175 75 200 12 88 M8 x 1.25 65 208 90 233 13 99 M12 x 1.75 58 227 83 252 14 M12 x 1.75 114 65 236 90 261 14

CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

Please contact us for the latest version.sales@ocaire.com, MAIN PC BOARD / HRS018-A-20, OTHERS, HRS THERMO-CHILLERS, 21, HRS - NO SIZE RATING, .00000 lb

Ionizer

Balance adjustment trimmer 4 x M4 x 0.7 depth 5 14 19 20 (For mounting, opposite side: Same) 13 17 7 Connection cable IZS31-CF-X210 14.9 16 20 20 52 (Cable length: Refer to the above table.) 65 8P modular jack (Plug for sensor cable) Maintenance detection level selection switch 15 100 4 x M4 x 0.7 depth 5 20 900 Connection cable length L (For mounting, opposite side: Same) 7 16 26 58 80x2

smcmaintenancepartslist

CBG1A Air cushion type Locking at both ends 20 25 32 40 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W Above no. @5, @6, @7, @8. And a grease pack. CBG1N Rubber bumper type Locking at both ends 20 25 32 40 CBG1A20-PS-W CBG1A25-PS-W CBG1A32-PS-W CBG1A40-PS-W Above no. @5, @6, @7, @8, $0, $1. And a grease pack.

Please contact us for the latest version.sales@ocaire.com, PC BOARD / HRS018-W-10, OTHERS, HRS THERMO-CHILLERS, 21, HRS - NO SIZE RATING, .00000 lb

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + M