Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: JM (J + M)

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: JT (J + T)

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: B (Earth Leakage Breaker)

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: J (Automatic Water Supply Function)

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: MT (M + T)

Type: -, Cooling Method: -, Cooling Capacity: 2,600/3,200 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: Compatible with deionized water (pure water) piping

Cooling Capacity: Cooling Capacity: 2600/3200W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + J + M

Cooling Capacity: Cooling Capacity: 2600/3200W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + M + T

Cooling Capacity: Cooling Capacity: 2600/3200W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: J + M

Cooling Capacity: Cooling Capacity: 2600/3200W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: J + T

Cooling Capacity: Cooling Capacity: 2600/3200W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Earth Leakage Breaker

Cooling Capacity: Cooling Capacity: 2600/3200W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 2600/3200W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M + T

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

HRX-OM-W002

(High pump head Rated current of leak voltage x size [Optional]) current (A) [mA] HRR012-A/W-101-phase AC100V (50/60Hz) 15 30 1-phase HRR018-A/W-10AC115V (60Hz) HRR012-A/W-2010 30 HRR018-A/W-203 cores x 14AWG HRR024-A/W-20(3 cores x HRR030-A/W-20HRR012-A/W-20-T 2.0mm2) 1-phase HRR018-A/W-20-T HRR024-A/W-20-T HRR030-A/W-20-T (including 200-230V AC ground) (50/60Hz) 15 30 HRR012-A/W-20-T1 HRR018

15

The bore size is 25, so the allowable load by thrust will be 20 kg. Work load is 5.5 kg < 20 kg. OK The load is restricted to 20 kg when the stroke is 600 mm and Z = 100 mm taken from Graph (5) z (Refer to page 1495). (2) Allowable load by stroke Work load is 5.5 kg < 20 kg.

HRS030, CHILLER, 729, 0.6 lb

1

) w Type t SUP/EXH block assembly 20 20 stations 10 11 Side ported Bottom ported Note 1) Double wiring: 2-position single, double, 3-position and 4-position valves can be used on all manifold stations.

HRX-OM-X084

Model number: HRR010-AN/WN-10/20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRR010-AF/WF-10/20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.