Cooling Method: Water-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: w/Automatic Fluid Fill Function
Cooling Method: Water-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: w/Automatic Fluid Fill Function + Applicable to Deionized Water Piping
Cooling Method: Water-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: w/Automatic Fluid Fill Function + Applicable to Deionized Water Piping + Conforming to CE/UL Standards
Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: M (Applicable to Deionized Water Piping)
Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: B (w/Earth Leakage Breaker)
Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: S (Conforming to CE/UL Standards)
Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: J (w/Automatic Fluid Fill Function)
Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: JM (w/Automatic Fluid Fill Function + Applicable to Deionized Water Piping)
Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: JMS (w/Automatic Fluid Fill Function + Applicable to Deionized Water Piping + Conforming to CE/UL Standards)
Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Applicable to Deionized Water Piping + Conforming to CE/UL Standards
Cooling Method: Water-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Applicable to Deionized Water Piping + Conforming to CE/UL Standards
Cooling Method: Air-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Applicable to Deionized Water Piping + Conforming to CE/UL Standards
Cooling Method: Air-cooled Refrigeration, Pipe Thread: G, w/Rc-G Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Applicable to Deionized Water Piping + Conforming to CE/UL Standards
Cooling Method: Water-cooled Refrigeration, Pipe Thread: G, w/Rc-G Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Applicable to Deionized Water Piping + Conforming to CE/UL Standards
Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)
Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)
Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)
Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)
Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)
Acceleration time constant 0 ~ 20 ms Set the time until the servo motor reaches to the rated speed. (3000 r/min) Deceleration time constant 0 ~ 20 ms Set the time until the servo motor stops from the rated speed. (3000 r/min When dwell is set and the set dwell has passed after the position command of the selected point table is completed, the position command of the next point table is started