Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: N+W+Z

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: D+N+W+Y+Z

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N+Y+Z

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+D+N+W+Y+Z

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: DI Control Kit

Series AK1000

Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21 SiH2Cl2 CHCl2F Silane Chlorine SiH4 Cl2 Trichlorosilane Chlorine Trifluoride SiHCl3 ClF3 Sulfur Dioxide Carbon Monoxide SO2 CO Diethyltelluride Germane Te(C2H5)2 GeH4 Tungsten Hexafluoride Hydrogen Sulfide WF6 H2S

Process Gas Diaphragm Valve

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Boron11 Trifluoride Chlorine 11BF3 Cl2 Argon Chlorine Trifluoride Ar ClF3 Arsine Carbon Monoxide AsH3 CO Boron Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21 SiH2Cl2 CHCl2F Silane Chlorine SiH4 Cl2 Trichlorosilane Chlorine Trifluoride SiHCl3 ClF3 Sulfur Dioxide Carbon Monoxide SO2 CO Diethyltelluride Germane Te(C2H5)2 GeH4 Tungsten Hexafluoride Hydrogen Sulfide WF6 H2S

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

This is a legacy product, and replaced byAR20-N02B-NYZ-B, REGULATOR, MODULAR, AIRLINE EQUIPMENT, AR MASS PRO, DC, AR MASS PRO 1/4 MODULAR (PT), .84524 lb, Regulator Series ARPages 346 through to 355ModelPort sizeOptionsRegulator Series ARPages 346 through to 355AR201/8, 1/4BracketSquare embedded type pressure gauge (except the AR10)Round type pressure gauge Digital pressure switch

Body Size: 25, Thread: N (NPT), Port Size: 03 (3/8), Option: BG (B + G), Semi-Standard: NYZ (N + Y + Z)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: B (Assembly of a Bracket & Set Nuts), Semi-Standard: NYZ (N + Y + Z)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: BG (B + G), Semi-Standard: NYZ (N + Y + Z)

Body Size: 25, Thread: N (NPT), Port Size: 02 (1/4), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: NYZ (N + Y + Z)

Body Size: 25, Thread: N (NPT), Port Size: 02 (1/4), Option: B (Assembly of a Bracket & Set Nuts), Semi-Standard: NYZ (N + Y + Z)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: B (Assembly of a Bracket & Set Nuts), Semi-Standard: NYZ (N + Y + Z)

Body Size: 40, Thread: N (NPT), Port Size: 02 (1/4), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: NYZ (N + Y + Z)

Body Size: 25, Thread: N (NPT), Port Size: 02 (1/4), Option: GH (G + H), Semi-Standard: NYZ (N + Y + Z)

Body Size: 25, Thread: N (NPT), Port Size: 02 (1/4), Option: H (Set Nut for Panel Fitting), Semi-Standard: NYZ (N + Y + Z)