Table of Contents

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

Free Mount Cylinder

2) Although the wire length should not affect switch function, use a wire that is 100 m or shorter. 4. Take precautions for the internal voltage drop of the switch.

Possible to transfer a workpiece at low-speed.

The rotation angle can be adjusted between 0 and 100. The rotation angle can be adjusted between 0 and 100.

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

1

30 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 30 st or less Over 300 st Over 25 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 25 st or less Over 300 st Over 30 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 30 st or less 28 52 300 100 75 77 128 200 128 178 24 52 174 198 42 54 92 80 14.5 25.5 74 28 156 180 140 17.5 M12 x 1.75 32 40 50 63 117 117 12 16

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment:

ZR

SMC PRESSURE SWITCH RESET SET Attachment D Digital pressure switch 71.3 (73.3 for D2, D3 types) 61 SMC PV PD Filter block D 3 100 Dimensions not indicated are identical to C1 type. 13-3-27 27 Series ZR Ejector System/Manifold Specifications Specifications 6 stations Max. number of units Port Port size Function Air supply for ejector Air supply for pilot valve Air supply for release Common

Hydraulic

Refer to page 100.

Compact Cylinder with Air Cushion

73 55 30 to 100 M FV 80 11 11 99 116 134 20 53.5 77 83.5 63.5 40 to 100 100 11 11 117 136 154 22 53.5 94 98 76 40 to 100 4-FD FT L FX FZ B + Stroke A + Stroke Rod end male threads Rod end nut L1 Rear flange type/RQG, RDQG Rear flange type mm Bore size (mm) Stroke range (mm) L1 L A FV M 33.5 8 63 72 30 to 100 43.5 10 80 84.5 40 to 100 B + Stroke 4-FD 43.5 12 100 99 40 to 100 L FT FX FZ A +

RQ

End Male Thread Bore size (mm) X C1 H1 L1 63 80 100 26 28.5 M18 x 1.5 33.5 32.5 35.5 M22 x 1.5 43.5 32.5 35.5 M26 x 1.5 43.5 Basic Style Stroke range (mm) Bore size (mm) 63 80 100 A B C D E F H I J K L M N OB P 63 55 15 20 77 31 M10 x 1.5 103 7 17 8 60 9 14 Rc 1/4 30 to 100 73.5 63.5 21 25 98 35.5 M16 x 2.0 132 6 22 10 77 11 17.5 Rc 3/8 40 to 100 88 76 27 30 117 40 M20 x 2.5 156 6.5 27 12

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

1 Smooth Cylinder CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 RE A B Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure REC CX 0.04 Minimum operating pressure MPa CY 12 16 0.03 MQQ M 20 25 32 40 0.02 RHC 50 63 80 100 0.01 MK(2) 0 0 10 20 30 40 60 50 70 80 90 100 RS Q G Bore size mm RS H A (Measurement based on JIS B8377

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

0x02 0X06 0002 0064: Force 100 Mbps/Full duplex Ex.

CQS

Standard stroke Long stroke L1 14 15.5 18.5 22.5 Bore size (mm) 12 16 20 25 H1 C1 X L1 24 25.5 28.5 32.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 9 10 12 15 10.5 12 14 17.5 Basic Style Long stroke range (mm) 35 to 100 35 to 100 75 to 200 75 to 300 Standard stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 Long stroke Standard stroke Without auto switch With auto switch A 20.5 20.5 24 27.5 Bore

Modular Design with Uniform Body Style

50 200 Flow rate [L/min (ANR)] 0 50 100 Flow rate [L/min (ANR)] AFM30-D AFD30-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa 0.01 0.01 P1 = 0.7 MPa P1 = 0.7 MPa 0 0 0 100 200 500 400 300 600 0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

12 15 25.5 10.5 12 14 17.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 45.5 13.5 20.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 5.4 5.4 7 10 25.5 34 45.5 13.5 20.5 24 29.5 55.5 59 14.5 15 19.5 37.5 32.5 27.5 22.5 Inch Long stroke L1 21.5 21.5 22.5 24.5 Standard H OA Bore (mm) Bore (mm) OB Q RA RB T I K M N D E X C1 H1 Inch inch L1 11.5 11.5 12.5 14.5 Metric M3 x 0.5

Electric Actuator/Slider Type

Nil Without connector H With connector Compatible drivers Power supply voltage (V) Size 25 32 40 Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 Applicable stroke table Standard C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 Model Stroke (mm) 100 200 300 400 500 600 700 800 900 1000 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to

Table of Contents

to 100 kPa) Positive pressure (0 to 500 kPa) Option (Connector) Z I SE3 Nil C1 C2 Connector for PSE200 multiple channel pressure controller 1 pc.

7.4

Applicable tube 2 KJH02-C1 Applicable tube 4 KJH04-C1 Applicable tube 1/8" KJH01-C1 Applicable tube 5/32" KJH03-C1 Fitting assembly * Part number is for one fitting assembly. Please order it in units of 10 pieces. 762 S0700 Series Specific Product Precautions 3 Be sure to read this before handling the products.

CQS

Thus, it can be used in a Class 100 clean room.