Fluoropolymer Piping Equipment

29 20 29 14 28 26 17 26 54 44 54 39 23 39 5.8 LQ1T5A-R5 1/2" 3/4" 3/4" 29 26 54 39 9 LQ1T5A-R6 3/8" 3/4" 3/4" 20 17 44 23 5.8 LQ1T5A-R7 1/2" 1/2" 3/4" 24 24 39.5 21 21 36 42 52.5 57.5 28 28 49 9 LQ1T5A-R8 3/8" 3/8" 3/4" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 5.8 Note) Products marked are produced upon receipt of order.

1

96 104 130 130 63 72 92 110 4 4 5 5 6 6 8 8 16 16 20 20 21 22 24 24 98 4.5 4.5 3 3 4 4 78 86 110 124 42 50 66 80 110 118 146 158 44 44 60 70 M12 x 1.75 10.6 25 202 38 25, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 25 19 15.5 14.5 80 M12 x 1.75 54 25 M12 56.5 91.5 212.5 22 45.5 46 190 22 30 96.5 7.5 18 M8 x 1.25 M20 x 1.5 RB2015 RB1412 106 130 142 M10 x 1.5 6 6 M27 x 1.5 100 M14 x

Table of Contents

Closed EC Open EO D9 L 20J M5 x 0.8 (Finger closing port) G I 2 (mm) I RB 25 28 SA 4.5 5.5 Q 11 12 RA 38 44 Model MHS2-32D MHS2-40D G 30.5 32 FZ 5 6 FY 20.5 23.5 FX 23 26.5 CB 16 17 CA 8 9 EC 16 20 EO 24 28 DC 56 62 DO 64 70 B 56 62 L 2H9 3H9 AB 41 44 J 20 21 AA 44 47 NA 14 16 +0.025 0 +0.025 0 6 7 SB 8 9.5 UA M5 x 0.8 M6 x 1 UB 10 12 VA VB 3 4 WA XA XB 3 4 Model MHS2-32D MHS2-40D +0.025

Smooth Cylinder/Low Speed Cylinder

10 10 17.5 17.5 20 20 M 3 3.5 3.5 4 5 5 5 7 LZ 44 49 58 71 86 106 125 150 LX 32 36 44 54 66 82 100 120 LT 3 3 3 3 4.5 4.5 4.5 6 LS 53 53 53 60 67 67 74 74 LH 20 22 25 30 40 45 55 65 LD 6 6 7 7 10 12 11 14 LC 4 4 4 4 5 5 6 6 Bore size (mm) B 34 38.5 45 54.5 70.5 82.5 101 121 Z 47 52 53 63.5 75.5 75.5 95 95 ZZ 118 123.5 125.5 144 169.5 169.5 202.5 206 20 25 32 40 50 63 80 100 Other dimensions

Table of Contents

Qty. 1 1 2 2 2 2 4 2 !4 !

5

-X 175 CG1Y Series Mounting Bracket Axial foot: CG1YL B LH 15 LT ZZ + Stroke LS + Stroke Z X W 2 x LC (Knock pin position) Y X Y M W 4 x LD LZ LX (mm) Axial Foot Bore size (mm) B LC LD LH LS LT LX LZ M W X Y Z ZZ 20 34 4 6 20 53 3 32 44 3 10 15 7 47 118 25 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 123.5 32 45 4 7 25 53 3 44 58 3.5 10 16 8 53 125.5 40 54.5 4 7 30 60 3 54 71 4 10 16.5 8.5 63.5

Air Slide Table

2 72.5 87 MXQ16A-20Z 38 20 12 39 58 15 39 108.5 4 2 76.5 91 MXQ16A-30Z 48 21 30 48 50 16 48 118.5 4 2 86.5 101 MXQ16A-40Z 58 28 17 58 80 23 58 135.5 4 2 103.5 118 MXQ16A-50Z 40 27 80 28 63 145.5 6 3 113.5 128 MXQ16A-75Z 46 23 58 52 80 34 88 176.5 6 3 144.5 159 MXQ16A-100Z 44 39 102 44 80 53 113 220.5 8 4 188.5 203 MXQ16A-125Z 44 20 127 44 80 53 138 245.5 10 5 213.5 228 35 Air Slide Table

Table of Contents

3.5 x 7, 4 x 10 Thin section series (10 to 16) 4 Nylon tube 4 Urethane tube 4 tube 6 tube Applicable tube dia.

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) A B C D EH EV F G H J K L M O1 25 15 to 100 130.5 116 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 105 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 105 to 500 178.5 160 63 Up to 200 192.6 155.2 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 205 to 500 227.6 190.2 505 to 800 262.6 225.2 Size Stroke range (mm)

MGP

200 Over 200st to 300st Over 300st Over 100st to 200st 121 122 124 124 25st or less 25st or less 96 104 130 130 44 44 60 70 110 118 146 158 78 86 110 124 98 106 130 142 42 50 66 80 M8 x 1.25 16 16 20 20 63 72 92 110 45 46 48 50 4 4 5 5 21 22 24 24 24 24 24 28 4.5 4.5 6 6 48 48 48 52 3 3 4 4 6 6 8 8 32 40 50 63 124 124 124 128 300 300 300 300 171 172 174 174 M8 x 1.25 M10 x 1.5 M10 x 1.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

With Mounting Bracket Axial foot style: CG1LN Axial Foot Style Stroke range (mm) 20 25 32 40 Bore size (mm) Z Y X W LZ LX LT LH LD LC M B Up to 125 47 52 53 63.5 7 7 8 8.5 15 15 16 16.5 10 10 10 10 44 49 58 71 32 36 44 54 3 3 3 3 20 22 25 30 6 6 7 7 4 4 4 4 3 3.5 3.5 4 34 38.5 45 54.5 Up to 200 Up to 200 Up to 200 LS 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) 20 25

Micro Mechanical Valve Series VM1000

N F.O.F. 2 x 1 8 3 x 1 4 P.T.

CL

BP E F FV FD FT FX FY FZ GA GB GC GD GL W/o rod boot W/ rod boot 40 50 63 80 100 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 35 35 40 40 to 500 to 600 to 600 to 750 to 750 27 32 32 37 37 22 27 27 32 41 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 44 52 64 78 92 60 70 86 102 116 71 81 101 119 133 16 20 20 25 30 96 108 115 129 140 32 40 40 52 52 10 10 10 14 14 60 70 86 102 116 9 9 11.5

Electric Actuators

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Air Fittings & Tubing

(Hex.) 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 18.5 41 44 46 41 44 46 48 51 52 37 38 40 37 38 40 44 45 KQ2ZD04-01S 34 40 53 38 43 57 76 72 81 102 14 10.4 13.4 21 16 13.4 10.4 4 21.5 KQ2ZD04-02S 17 23.5 KQ2ZD04-03S 18.5 KQ2ZD06-01S 14 6 21.5 KQ2ZD06-02S 12.8 13.4 22 17 13.4 12.8 17 23.5 21 24 25 KQ2ZD06-03S KQ2ZD08-01S 19 KQ2ZD08-02S 8 18.5 15.2 17.6 26 15.9 15.2 45.5

KJ

44 !5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

MG

to 300 st Over 300 st 25 st or less 25 st or less 32 40 50 63 42 M8 x 1.25 16 96 45 4 21 44 4.5 110 3 78 6 98 63 24 48 124 300 171 34 50 M8 x 1.25 16 104 46 4 22 44 4.5 118 3 86 6 106 72 24 48 124 200 300 84 122 172 36 66 M10 x 1.5 20 130 48 5 24 60 6 146 4 110 8 130 92 24 48 124 200 300 86 124 174 38 80 M10 x 1.5 20 130 50 5 24 70 6 158 4 124 8 142 110 28 52 128 200 300 88 124 174 MGPM (

Table of Contents

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

CNA

B With rod boot on both sides S + Stroke H + Stroke H ZZ + 2 l + 2 strokes ZZ + 2 strokes Bore size (mm) Stroke range (mm) 40 50 63 80 100 AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA A 30 35 35 40 40 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20