Series VQ Metal Seal/Rubber Seal Body Ported M5 thread Coil voltage VQ0 2 position single Note) See Options" on p.1.10-67 for inch size One-touch fittings. 1 2 3 4 5 6 100V AC (50/60Hz) G: Grommet C kit single only.
How to order manifolds U side VV5Q 5 5 08 03 C 5 W n Base mounted Plug-in Kit designation 1 2 4 3 1. Stations 5.
Flow Characteristics Model 1, 5, 3 (P, EA, EB) 4, 2 (A, B) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Flow characteristics C (dm3/ (sbar) ) b Cv C (dm3/ (sbar) ) b Cv SS5Y3-41(-Q) SS5Y3-42(-Q) SS5Y5-41(-Q) C8 1 4 SS5Y5-42(-Q) C10 1 8 1 8 C6 C6 C8 1 4 0.20 0.20 0.45 0.43 0.66 1 4 SS5Y7-42(-Q) 0.23 0.20 0.16 0.12 0.12 0.81 0.82 1.9 1.9 3.0 0.18 0.18 0.44 0.46 0.75 0.19 0.20 0.23 0.20 0.25
Dimensions XLA-100/160-X152: Air operated (b) C E D E C E Fn (KF flange) Fd (K flange) (a) Heater (Option) (c) H [mm] B A Model A B C D E1 Fn Fd G H XLA-100-X152 108 300 154 3 11 134 130 102 131 XLA-160-X152 138 315 200 3 11 190 180 153 112 1 The E dimension applies when the heater option is included.
SY3 40 B Electrical entry D Manual override C B A C D Indicator light/ Surge voltage suppressor Type of actuation A Rated voltage 1 2 position single solenoid 2 2 position double solenoid 3 3 position closed center 4 3 position exhaust center 5 3 position pressure center Indicate in the station table below.
3 p. 31 C Manifold common wiring C Vacuum pump system (Valve type R) PE port female thread specification (M3) L Individual wiring: With connector assembly (Lead wire length: 300 mm) LO Individual wiring: Without connector assembly q w e r t Nil Specifications other than that listed above q Rated pressure range and function Select the ZK2-VAAKmLOA-A for a switch with energy saving function
0.7 3 position Ambient and fluid temperature (C) 10 to 50 (No freezing.
C SOL.b SOL.a 3 (R) 5 (R) 1 (P) 1-3-33 34 Series SZ3000 Specifications Specifications SI Unit Part No. 24 VDC +10%/5% Symbol Part no. Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)
R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.
metal seal VQ5 00 2.7 2.7 2.7 Cv 1 2 12 C [dm3/(sbar)] 12 12 VQD 4/2 5/3 (A/B EA/EB) 0.14 b 0.14 0.14 2.9 Cv 2.9 2.9 12 C [dm3/(sbar)] 12 12 1 4/2 (P A/B) 0.33 0.33 b 0.33 3.4 3.4 Cv 3.4 2 position rubber seal VQ5 01 1 2 16 16 C [dm3/(sbar)] 16 4/2 5/3 (A/B EA/EB) 0.33 0.33 0.33 b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate
Actuation type 1 2 3 4 5 A B C 2 position single solenoid 2 position double solenoid 3 position closed center 3 position exhaust center 3 position pressure center 4 position dual 3 port valve: N.C./N.C. 4 position dual 3 port valve: N.O./N.O. 4 position dual 3 port valve: N.C./N.O.
30 or less 2 position double 50 or less 56 or less 3 position 31 or less 1-6-13 Body Ported 14 Series SX3000/5000/7000 Flow Characteristics/Weight Model/Series SX3000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Weight (g) Valve model Type of actuation Grommet L plug connector M plug connector 62 63 70 72 1, 5, 3 (P, EA, EB) 4, 2 (A, B) C [dm3/(sbar)] b Cv C [dm3/(
(A) 4 (B) 2 C SOL.b SOL.a 3 (R) 5 (R) 1 (P) 3 Series SZ3000 How to Order Manifold Assemblies (Example) Example (SZ3000, positive common with power supply terminals) Supply/Exhaust block (U side mounting) Double solenoid (24VDC) SZ3260-5LOZ-C6 (3 sets) Single solenoid (24VDC) SZ3160-5LOZ-C6 (2 sets) 1 2 3 Stations D Side U Side Plug-in manifold with power supply terminals SS5Z3-60PD2-05U-P
Manifold Specifications Porting specifications 4(A), 2(B) port location 4(A), 2(B) Applicable stations Series Port size 1(P), 5(R1), 3(R2) Rc 1/2 C 8, 10, 12 Rc 1/4, 3/8 Side VQ4000 Max. 18 stations Rc 1/4 Bottom D-Sub Connector Kit (25 pins) Cable assembly AXT100-DS25015 030 050 D-sub connector cable assemblies can be ordered by with manifolds. Refer to How to Order Manifold.
(R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1
side D side 3 m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C8: 8 One-touch fittings Manifold base (8 stations) 10-SS5Q23-08FD2-D F kit (D-sub connector kit) 10-SS5Q23-08FD2-D 1 set (F kit 8-station manifold base) 10-SQ2131-51-C8 3 sets (2 position single) 10-SQ2231D-51-C8 3 sets (2 position double) 10-SQ2331-51-C8 1 set (3 position closed center) SSQ2000-10A-3 1
N.C. 2-position double (metal) 4-position dual 3-port valve (B) Coil voltage 4 2 A B B 24VDC 12VDC 5 6 Note) 1 5 3 P EA EB N.O. N.O. 2 2-position double (rubber) 4-position dual 3-port valve (C) 4 2 A B C C: Locking type (Manual) Function Note) 1 5 3 P EA EB N.C.
A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).
Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part
Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part