Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Unit Specification: M (Fixed SI Unit), Stations: 1
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Unit Specification: w/Unit Conversion Function, Stations: 1
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: N (None)
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: Straight, Bracket Option: B (Bracket)
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Unit Specification: w/Unit Conversion Function, Stations: 2, Cable Option: L (Right Angle), Bracket Option: B (Bracket)
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: L (Right Angle), Bracket Option: B (Bracket)
Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: None, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -
Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Unit Specification: Fixed SI Unit, Stations: 2, Cable Option: -, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -
Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Unit Specification: w/Unit Conversion Function, Stations: 3, Cable Option: None, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -
Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Unit Specification: Fixed SI Unit, Stations: 1, Cable Option: -, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -
Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: -, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -
Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: None, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -
Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: Straight, Bracket Option: Bracket, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -
Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Unit Specification: w/Unit Conversion Function, Stations: 2, Cable Option: Right Angle, Bracket Option: Bracket, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -
Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: Right Angle, Bracket Option: Bracket, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -
Process Gas Molecular Formula Process Gas Molecular Formula Hydrogen Bromide Boron 11 Trifluoride HBr 11BF3 Hydrogen Chloride Arsine HCl AsH3 Hydrogen Fluoride Boron Trichloride HF BCl3 Nitrogen Oxide Boron Trifluoride N2O BF3 Nitrogen Trifluoride Ethylene NF3 C2H4 Ammonia Dimethylsilane NH3 C2SiH8 Nitric Oxide Perfluoro-butadiene NO C4F6 Phosphorous Pentafluoride Octafluorocyclopentene PF5
Process Gas Molecular Formula Process Gas Molecular Formula Hydrogen Bromide Boron 11 Trifluoride HBr 11BF3 Hydrogen Chloride Arsine HCl AsH3 Hydrogen Fluoride Boron Trichloride HF BCl3 Nitrogen Oxide Boron Trifluoride N2O BF3 Nitrogen Trifluoride Ethylene NF3 C2H4 Ammonia Dimethylsilane NH3 C2SiH8 Nitric Oxide Perfluoro-butadiene NO C4F6 Phosphorous Pentafluoride Octafluorocyclopentene PF5
Gas Molecular Formula Boron11 Trifluoride Chlorine 11BF3 Cl2 Argon Chlorine Trifluoride Ar ClF3 Arsine Carbon Monoxide AsH3 CO Boron Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen Bromide HBr C2H2 Halocarbon134A Hydrogen Chloride HCl
Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 3, Cable Option: T (Centralized Lead Wired, w/Bracket), Bracket Option: B (Bracket)
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 3, Cable Option: T (Centralized Lead Wired, w/Bracket), Bracket Option: B (Bracket)