VQ5000

SOL.A 8A () (+) 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A SOL.B 8B () (+) 8 stations 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A () (+) SOL.B 9B () (+) 9 stations SOL.A 10A () (+) SOL.B 10B () (+) 10 stations (+) () COM Note) There is no polarity. It can also be used as a negative common.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Manual override (L4) L2 5 (Rail mounting hole pitch: 12.5) L1 SS5Y5-M45Stations B Pitch SY5000 Pitch SY3000 L dimension: Formulae for L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 70 15.5 26 26 15.3 17 P=16 P=12.5 16.9 Button for DIN rail release L3 12.5 M= ( + 1) Omit decimals 31.5 32 71.1 [78.1] 71.5 [78.5] 14.5 R R A A A A A A L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 B B B B B B P P A, B

SY

to L4 L3 = 12.5 x n1 + 16 x n2 + 52 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations Note) Dimensions L1 to L4 of SS5Y5-M45Stations D are the same as SS5Y5-M45Stations U.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

] C10: 10 One-touch fitting 2 x G 3/4 Electrical entry (L4) (L3) L1 + 0.5 L2 + 0.5 R EXH EXH R 100.5 B B B B B B B B 49 X P X P 24.5 9.5 1B 1A 1 4B 4A 4 3B 3A 3 2B 2A 2 16 A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

] C10: 10 One-touch fitting 2 x G 3/4 Electrical entry (L4) (L3) L1 + 0.5 L2 + 0.5 R EXH EXH R 100.5 B B B B B B B B 49 X P X P 24.5 9.5 1B 1A 1 4B 4A 4 3B 3A 3 2B 2A 2 16 A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight

0.4

entry (L4) (L3) VQ7 L1 + 0.5 L2 + 0.5 R EXH EXH R 100.5 B B B B B B B B 49 X P X P 24.5 9.5 1B 1A 1 4B 4A 4 3B 3A 3 2B 2A 2 16 A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight, Water-jet-proof 2 L n Dimensions Formula

Digital Gap Checker

Checker ISA3 Series Dimensions ISA3-mmm-mmmB-L1 (With control unit) L1 (23) 57 30 58.5 41.6 46.2 1.6 3.5 12 11 66 H 5.5 40.4 29 24 16 64.4 (Max. 67.4) 24 3.1 33 52.5 30 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 2 38 13 L2 (49) ISA3-mmm-mmmB-R1m ISA3-mmm-mmmB-R2m 29.3 L1 46.2 41.6 58.5 30 30 52.5 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1

LEC-OM07605CN

(d) ( FR-BSF01FR-BLF) () 0.5MHz5MHz [mm] 2(AWG12)) (L1L2L3) (UVW) 4 4 2 FR-BSF01(3.5 (110) 95 0.5 25 (22.5) 11.25 0.5 (65) 33 MC MCCB 1 L1 L2 L3 (65) 4.5 (4 ) 2 2(AWG10)) FR-BLF(5.5 MC MCCB 7 L1 L2 L3 31.5 130 7 85 80 35 (4 ) 160 180 2.3 11 23 11. (e) ( FR-BIF) 10MHz 200V: FR-BIF [mm] FR-BIF 4 mA 300 LECSS2-T MC MCCB 29 L1 42 4 5 L2 L3 29 7 58 44 11 24 11.

PSxx-OMT0001CN

] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMT0001CN-E 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1

PSxx-OMR0001CN

L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -21No.PS-OMR0001CN-J 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMR0001CN-J 2 ISA3--B-R ISA3--B-R ISA3--B-LN ISA3--B-RN 1ISO16030 2ISO1179

smcmaintenancepartslist

B Port plug See below PBT, HNBR 1 C Clip 136010 Stainless steel 3 One-touch Fittings for Regulator Block Port Plug VVQ0 58A VVQ1000 50A C4 Single unit regulator/ Port plug for regulator block Fitting type One-touch fittings for regulator block Nil L1 Straight Elbow Fitting size 10 Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Note) The O-ring is attached.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

In this case, please note that dimensions, L1 and L2 on pages 160 and 161 may vary slightly.) For other components, refer to the SY series of the WEB catalog.

Possible to transfer a workpiece at low-speed.

L1 L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1= L1 L1= Q1 = M Q1 K axis Q1 T axis (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 J axis Z axis (mm) 15 20 30 40 10 (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 40 30 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 3.3

Series VQ Base Mounted Metal Seal/Rubber Seal

kit Stations (1 to 8) L2 kit Stations (1 to 8) F1 F2 F3 P1 P2 P3 L0 L1 L2 Replacement Parts No.

Bag Filter

Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.) FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: N (NPN Output), Unit Specification: w/Unit Conversion Function, Stations: 3, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: L1 (w/Control Unit, Supply

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: N (NPN Output), Unit Specification: w/Unit Conversion Function, Stations: 2, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: L1 (w/Control Unit, Supply

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: N (NPN Output), Unit Specification: w/Unit Conversion Function, Stations: 2, Cable Option: N (None), Bracket Option: B (Bracket), Control Unit: L1 (w/Control Unit, Supply

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 3, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: L1 (w/Control Unit, Supply Port:

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 3, Cable Option: L (Right Angle), Bracket Option: B (Bracket), Control Unit: L1 (w/Control Unit, Supply