IIIIIII P T , 0 079 in. (2mm) O T 0.059 in (1 Smm) T.T, 0 138 in. (3 5mm) -75 PSIG (5 Kgf/cm2) '75 PS|G (5 A B c D E F G 2.24 (571 1.26 (32) 0.94 (241 0.63 {16) 0.31 {8) 0.57 14.51 0.24 {6} A B c D E F G 2.48 (63) 1.50 {38) 0.94 (241 0.63 (16) 0 . 1 6 (4) 0.57 '14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM120-N01-07 130-N01-08 Panel Mounting F O F 5 0 7 l b s ( 2 3 k s
P T , 0 079 in. (2mm) O T 0.059 in (1 Smm) T.T, 0 138 in. (3 5mm) -75 PSIG (5 Kgf/cm2) '75 PS|G (5 A B c D E F G 2.24 (571 1.26 (32) 0.94 (241 0.63 {16) 0.31 {8) 0.57 14.51 0.24 {6} A B c D E F G 2.48 (63) 1.50 {38) 0.94 (241 0.63 (16) 0 . 1 6 (4) 0.57 '14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM120-N01-07 130-N01-08 Panel Mounting F O F 5 0 7 l b s ( 2 3 k s
VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .
Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.
3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 6 P. 12 Straight Union KQG2H Extended Male Elbow KQG2W Union Y KQG2U Metric Inch P. 3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 7 P. 12 Male Elbow KQG2L Different Diameter Tee KQG2T Metric Inch P. 4 P. 10 Metric Inch P. 5 P. 11 Female Connector KQG2F Metric Inch P. 7 P. 13 Male Branch Tee KQG2T Plug-in Reducer KQG2R Metric Inch P. 4 P. 10 Metric
-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T
ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.
A) 2 (A) 54 46 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-14 9 Hand Valve Series VH Precautions Be sure to read before handling.
(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D
3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material PBT ADC Material Note No. q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !
A Rectified value Rectified value P-1 P-1 (Differential) Pressure (P-3) H-1 H-1 (H-2) P-2 Min. B Nonadsorption ON Switch output 1(2) OFF Work 1 Work 2 Work n Atmosphere ZSE ISE Switch output response time when autoshift is input.
I L O T O P E R AT E D P R E S S U R E R E G U L AT O R ACCESSORIES P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R Mounting Bracket B24 NAR425 B25 NAR625 S Y M B O L S Bracket Dimensions Bracket No.
-I With bracket Bracket A 01/N01 type W1/WF1 type -66No.PS-OMM0007-I Bracket B W1/WF1 type -67No.PS-OMM0007-I Bracket D 01/N01 type W1/WF1 type -68No.PS-OMM0007-I Panel mount adapter 01/N01 type W1/WF1/M5/C4/C6 type -69No.PS-OMM0007-I Panel mount adapter + Front protective cover 01/N01 type W1/WF1/M5/C4/C6 type -70No.PS-OMM0007-I Panel cut-out dimensions -71No.PS-OMM0007-I 01/N01 type (products
Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1lA VBA2lA VBA4lA 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N P P P P P P P P P P P P S P P P P P P P P P P GN P P P P P P P P P P P P GS P P P P P P P P P P LN P P P P LS P P GLN P P P
A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min. B P_1 or P_2 H_1 or H_2 Released P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 Work 1 Work 2 Work n Atmosphere H_1 (H_2) = (A-B)/2 C Display calibration function (F 6) D Peak and bottom display function Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value.
Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications
3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.
Metal bowl VY1 Optional specifications B B B B B N.C.: Gray N.O.: Black B G B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 PPA Bracket mounting size Accessory specifications (mm) AL Standard specifications With pressure gauge With auto-drain Port size Model B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104
(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.
Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.