CATALOG VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .
I O N S S I D E S U P P O R T U N I T C O U N T E R B O R E D (S I D E S U P P O R T A) D I M E N S I O N S S T R O K E A D J U S T I N G U N I T Stroke adjustment unit Absorber stroke Shock Absorber D I M E N S I O N S S I D E S U P P O R T U N I T TA P P E D (S I D E S U P P O R T B) Cushion screw Model h EA EB EC ED EY FA FB FC FF FH TA TT ML2B25 3.5 10 20 6.5 60 53.5 46.7 33 13 6 12 7
(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6
S CEP1 CE1 R CE2 JB20 to 160 Center of sphere ML2B C J G5-S CV MVGQ CC RB R J (mm) DMaximum operating tension and compression force (N) Applicable bore size (mm) M A Maximum thread depth P Model Center of sphere R Allowable eccentricity U Weight (kg) B C D E F G H Nominal size Pitch -X Compression Tension JB12-3-050 JB16-4-070 JB20-5-080 JB25-6-100 JB40-8-125 JB63-10-150 JB80-16-200 JB100
A R JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4-070 JS16-5-080 0.5 0.5 0.5 0.5 0.75 1 4.7 5.8 7.3 8.5 11.6 14.3 M4 x 0.7 M5 x 0.8 26 34.5 8.5 12 15.5 17.5 18.5 23 9.5 13.5 12 16 21 24 31 41 1.5 2 4.5 5 5 7 4 6 7 8 11 14 4
ML2B KB JB JA KA LB LA ME MD LC MA MB MC N P PA 19 29 19 29 39 20.5 30.5 40.5 47 67 47 67 PB PC HE HD HC Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 2 20 30 28 38 48 32 42 52 55 75 64 84 C J G5-S 14 3 5 3 4 14 7.5 9.5 13 7.5 8 4.5 1.6 M2 x 0.4 6.2 M3 x 0.5 M3 x 0.5 CV 3.5 17.5 4 11.6 2.2 M2.6 x 0.45 M4 x 0.7 M5 x 0.8 11 13
ML2B KB JB JA KA LB LA ME MD LC MA MB MC N P PA 19 29 19 29 39 20.5 30.5 40.5 47 67 47 67 PB PC HE HD HC Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 2 20 30 28 38 48 32 42 52 55 75 64 84 C J G5-S 14 3 5 3 4 14 9.5 7.5 13 7.5 8 4.5 1.6 M2 x 0.4 6.2 M3 x 0.5 M3 x 0.5 CV 3.5 17.5 4 11.6 M2.6 x 0.45 M4 x 0.7 M5 x 0.8 2.2 13 11
DA00243 DA00189 JS80-22-150(S)-X530 JS100-26-150(S)-X530 DDimensions (mm) Model M A B D1 D2 E F G H1 J Center of sphere R Maximum thread depth P Allowable eccentricity U Maximum operating tensile and compressive force (N) Weight (kg) -X H2 JS80-22-150(S)-X530 JS100-26-150(S)-X530 M22 x 1.5 89.5 28 46 50 99 19 14 32 34.7 57.2 56.5 16.8 1.25 5000 0.58 Technical Data M26 x 1.5 110 34 55.5 59.5
D F9NV S MIW Double finger type 20 30 1 A S D F9BV S Single finger type MIS Scraper Cylinder bore Nil S No Yes Number of auto switches 12mm 20mm 12 2 pcs. 1 pc.
6.5 29 32.5 3H9 3 15.5 3H9 3 7 912 Rotary Table MSQ 1122Dimensions: Size 10, 20, 30, 50 Basic type: MSQBA 1122XB effective depth XC WB effective depth WC 2 XA 8 x WD depth WE (Circumference: 8 equivalents) 4 x JJ depth 8 WA 2 2 x J through JA counterbore depth JB 45 22.5 BE WF WF BD 2 x M5 x 0.8 Port (Plugged) Effective depth FB DD M5 x 0.8 depth 5 (Vacuum suction port) D BB DE 2 x P Port
D F9NV S MIW Double finger type 20 30 1 A S D F9BV S Single finger type MIS Scraper Cylinder bore Nil S No Yes Number of auto switches 12 2 pcs. 1 pc. 12mm 20mm Nil S Stroke adjuster 20 Type of auto switch Nil A No Yes Stroke Without auto switch (built-in magnet) Nil 10 20 30 10mm 20mm 30mm Refer to the table below for auto switch part numbers.
5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x 0.8 M12 x 1.5 3.5 M5 x 0.8 Standard stroke (mm) HA Slide FA B C DA FB G GA GB H J K L MM ML OA GC JA JB MC NN MA A RB1007 M5 x 0.8 M14 x 1.5 3 12 72 44 3 17 3.5 4.5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8
(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,
P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35 P.36 P.37 Reed Auto Switch Direct Mounting Style Auto Switch Mounting Bracket Part No. 1 Single Valve/Sub-plate Type IP67 Compliant How to Order 90-SV Series 90 SV W1 00 1
CNS CLS CLQ MLGP RLQ MLU Selection Conditions/Table (1) ML1C DVertical Upward facing Downward facing Horizontal -X l1 = Eccentric distance 20l2 = Distance between the plate and load center of gravity m Data Mounting orientation m m l1 = Eccentric distance Maximum load speed V 201 to 400 mm/s 50 to 200 mm/s 50 to 200 mm/s 201 to 400 mm/s 50 to 200 mm/s 201 to 400 mm/s Graph (Slide bearing
CNS CLS CLQ MLGP RLQ MLU Selection Conditions/Table (1) ML1C DVertical Upward facing Downward facing Horizontal -X l1 = Eccentric distance 20l2 = Distance between the plate and load center of gravity m Data Mounting orientation m m l1 = Eccentric distance Maximum load speed V 201 to 400 mm/s 50 to 200 mm/s 50 to 200 mm/s 201 to 400 mm/s 50 to 200 mm/s 201 to 400 mm/s Graph (Slide bearing
H H1 JA JB KA MM NA Bore size A1 H MM 20 14.5 12 13 15.5 8 14 0 0.1 2 21 5 M4 x 0.7 depth 7 M4 x 0.7 depth 5.5 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across
Figure 2 Meter-out Meter-out C port Meter-in P A port Meter-in C port A port P B port D port Meter-in D port B port Meter-in P Meter-out Meter-out The table return position under the power-off state changes depending on the solenoid valve type. Please refer to page 299 for details. 3) Figure 3 shows the rotation range and Table 1 shows the active speed controller.