Table of Contents

YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

ZSE30/ISE30

Pressure Switch Specifications ZSE30 (Vacuum/Low pressure) 100.0 to 100.0 kPa 101.0 to 101.0 kPa 500 kPa 0.2 kPa ISE30 (Positive pressure) 0.000 to 1.000 MPa 0.100 to 1.000 MPa 1.5 MPa 0.001 MPa Rated pressure range Regulating pressure range Proof pressure Min. regulating unit Fluid Power supply voltage Current consumption Switch output Air, Inert gas, Non-flammable gas 12 to 24 VDC, Ripple (p-p

VQ7-6/7-8

VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement

VQ7-6/7-8

50 38 B A R2 R1 P 2-1/8 13 13 Mounting hole 2-6.5 Indicator light 34 34 (P , A, B) 3-1/4, 3/8 42.5 42.5 G1/2 (Cable 8 to 10) Bottom ported drawing 137.5 SMC 125.5 93 14 (A, B port) 25 (X port) 12 Y 5 3 37 25 22 14 1 25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)]

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13 (2 port) B A B A 50 62 50 62 38 14 38 12 14 12 Manual override Manual override P R1 R2 P R1 R2 Indicator light 2-6.5 mounting hole 42.5 42.5

VS7-6

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

ZISE20B.eng

MPa ISE20B ISE20B: 0.050 MPa/ZSE20B: 5.1 kPa/ ZSE20BF: 5.0 kPa "Nil" or M Hysteresis kPa ZSE20B(F) Safety Instructions Bracket A ISE20B Delay time 1.5 ms or less Bracket B psi P ZSE20B(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ZISE20B-L.eng

Units specification Pressure range Default setting ISE20B: 0.050 MPa/ZSE20B: 5.0 kPa/ ZSE20BF: 5.0 kPa Hysteresis ISE20B MPa "Nil" or M ZSE20B(F) kPa Delay time 0.00 sec.

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Piping Specification: 01 (R 1/8), Connector Type: S (M12 connector type), Bracket: A5 (Bracket E for M12 Connector Type)

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type), Bracket: A5 (Bracket E for M12 Connector Type)

This is a legacy product, and replaced byISE20B-Y-P-C6L-WA2, SWITCH, INSTRUMENTATION, ISE40/50/60 PRESSURE SWITCH, 1X, ISE40/50/60 OTHER SZ (OTHER), .33733 lb, ModelRated pressure rangeDisplay/Set pressure rangeWithstand pressureDisplay/Minimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--Repeat accuracyHysteresisAnalog outputAuto-shift inputDisplayDisplay

This is a legacy product, and replaced byZSE20F-P-C6L-L, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, 1E, ZSE30 OTHER SIZE RATING, .29394 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator lightEnviron- ment

® 2-Color Display High-Precision Digital Pressure Switch ZSE30A ( F ) /ISE30A Series

For vacuum/ compound pressure ISA2 ZSE30A 01 N M Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type)

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: C6L (One-touch Fitting ø6mm, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)