PFxx-OMJ0005CN

[L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I

Digital Flow Switch (Integrated display type)

CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min

PFxx-OMO0004CN

ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 ripple -15No.PF-OMO0004CN-E AB.

Digital Flow Switch (Remote type sensor unit)

to 25 L/min 2 to 50 L/min Accuracy 3%F.S. max.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

(Piping specifications A2(L) and B2(L) are excluded.) ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.

ISE20C(H)-L is CE and RoHS compliant, with an IP65 enclosure rating.

ISE20C(H)-L is CE and RoHS compliant, with an IP65 enclosure rating.

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

VS7-6

Unit/Specifications Air filter (w/auto-drain, w/manual drain) 5m Filtration Regulator 0.05 to 0.85MPa Set press.

90

Current model 1 L Released into atmosphere No fixed throttle 4 to 11 L Fixed throttle * Poor quality of air may cause operation failure. Select a model that is suitable for the desired air cleanliness by referring to Air Preparation Equipment Model Selection Guide (pages 2 and 3) for air quality. OUT IN (SUP.) OUT IN (SUP.)

“

IR1210-A Flow rate: Up to approx. twice 0.4 (Compared to the current SMC product) [L/min (ANR)] IR Current model Series 0.3 Set pressure [MPa] Current model IR1010 720 320 IR1200-A Approx. twice 0.2 1900 940 IR2200-A 5000 4000 IR3200-A 0.1 Supply pressure: 0.7 MPa 0 720 320 Flow rate [L/min (ANR)] Supply pressure: 0.7 MPa 772 Regulator IR1200-A/2200-A/3200-A Series Weight Reduced by up to

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS VFS VS4 VQ7 EVS Large capacity EVS7-6 (Size 1) 1200 l/min (ANR) EVS7-8 (Size 2) 3000 l/min (ANR) EVS7-10 (Size 3) 5500 l/min (ANR) VFN Cylinder driving size Flow rate 100 160 200 Rubber seal, single type Lightweight Size 1 (3 position): 0.55 kg Size

ZISE20C.eng

Bracket C MPa ISE20C(H) ISE20C: 0.050 MPa/ZSE20C: 5.1 kPa/ ZSE20CF: 5.0 kPa/ISE20CH: 0.100 MPa "Nil" or M Hysteresis Self tapping screws: Nominal size 3 x 8L kPa ZSE20C(F) Self tapping screws: Nominal size 3 x 10L Safety Instructions Bracket A ISE20C(H) Delay time 1.5 ms or less psi P ZSE20C(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended

Digital Pressure Switch

Units selection function W Wetted part (or part exposed to fluid) The part of the Pressure switch which is in contact with the detected fluid, such as a pressure sensor, seal, or fitting. Window comparator mode An output type which holds the output when the pressure is within a certain range. (Refer to "List of output modes" on page 26).

Secondary battery capability is achieved by providing removing the bracket munting inserts found on the ISE20C(H).  25A-ISE20C(H) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

Secondary battery capability is achieved by providing removing the bracket munting inserts found on the ISE20C(H).  25A-ISE20C(H) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ISE20C(H) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ISE20C(H) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.