Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

2

Auto Drain The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Circulating water Caution Unit [S/cm] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] Item pH (at 25C ) Electrical conductivity (25C ) Chloride ion (Cl) Sulfuric acid ion (SO42) Standard value

Modular F.R.L. Units

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Battery-less

R)EB 25 15 Work load: W [kg] Work load: W [kg] 20 Lead 12: LEFS25(L/R)EA 10 15 Lead 12: LEFS25(L/R)EA 10 Lead 20: LEFS25(L/R)EH 5 Lead 20: LEFS25(L/R)EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32(L/R)/Ball Screw Drive Horizontal Vertical 30 50 Lead 8: LEFS32(L/R)EB Lead 8: LEFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead

15

Table Displacement (Reference Value) L W 0.02 LEJS40 (L = 52.5 mm) LEJS63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Electric Actuator/Slider Type

Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Environment

Table Displacement (Reference Value) L W 0.02 LEJ40 (L = 52.5 mm) LEJ63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

1

0 w o u q!1 !4 JA MXH MXQ CDJ2RA10/16-SZ-B MGP CY CX CJ2RA-TZ CK1 !3 r e !2 yit!0 w o u q !5 !1 !4 C(L)K C(L)KU CKQ CDJ2RA10/16-TZ-B CKZ2N WRF Component Parts No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Table Displacement (Reference Value) L W 0.02 LEJ40 (L = 52.5 mm) LEJ63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

LEC-OM02904

MR-PWS1CBLM-A2-L MR-PWS1CBLM-A1-H MR-PWS1CBLM-A2-H CNP3 AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) AWG 19(/) (b) 10m 10m 2m 11.5 2m 2m MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H LE-CSM50m 50m MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L CNP3 AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) AWG 19(/)

Title not found

. 1 2 3 Circuit Cable color U V W Red White Black Connector A2 terminal no.

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

LEC-OM02704CN

MR-PWS1CBLM-A2-L MR-PWS1CBLM-A1-H MR-PWS1CBLM-A2-H LE-CSMCNP3 AWG19 AWG19 AWG19 AWG19 / AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) (B) 10m 10m 2m 13.4 2m MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H LE-CSM50m MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L CNP3 AWG19 AWG19 AWG19 AWG19 / AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) () () .

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A1 L3 A3 Mp Mr Static moment Dynamic moment My W W W L2 A2 L3 A3 L1 A1 Mp Mr My W W W W Mey Mep We We L3 A3 L2 A2 W Note) It is not necessary to consider load factor when using this device vertically perpendicular.