Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Mechanical Valves Series NVM, NVFM, NVZNI

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

IIIIIII

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

3-Position Rotary Table

Figure 2 Meter-out Meter-out C port Meter-in P A port Meter-in C port A port P B port D port Meter-in D port B port Meter-in P Meter-out Meter-out The table return position under the power-off state changes depending on the solenoid valve type. Please refer to page 299 for details. 3) Figure 3 shows the rotation range and Table 1 shows the active speed controller.

Table of Contents

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

A

www.stevenengineering.com I 5.16 AIR PREPARATION MODULAR TYPE ACCESSORIES END BLOCK ADAPTOR Port Sizes: M5 ~ 1Rc Allows for easy installation and maintenance H O W T O O R D E R P I P I N G A D A P T O R E10-M5 1000 S E R I E S E20-N01 2000 S E R I E S E20-N02 2000 S E R I E S E20-N03 2000 S E R I E S E30-N02 3000 S E R I E S E30-N03 3000 S E R I E S E30-N04 3000 S E R I E S E40-N03 4000

VH Series, 4 Way Hand Valve

(kg) Port size NPT Number of position Porting direction Series (A) 2 (B) 4 Body mounting Panel mounting VH200-N02 VH210-N02 3 (Closed center) 1 (P) 3 (R) 0.92 (0.42) 1/4" 7.5(0.4) 4 VH201-N02 VH211-N02 3 (Exhaust center) VH2 1/4" Closed center 2 VH202-N02 VH212-N02 2 (Position) (A) 2 (B) 4 3 1 VH300-N02, N03 VH310-N02, N03 3 (Closed center) 1 (P) 3 (R) 4 3 VH301-N02, N03 VH311-N02, N03 3

AS-FG/ASD-FG

P-77.5 (YG)

44

Swivel Elbow KFG2V Metric Inch P. 324 P. 329 Metric Inch P. 325 P. 331 KDM KB KR KA KQG2 Straight Union KFG2H Female Connector KFG2F KG Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 KFG2 KFG2 MS KKA KP LQ Union Tee KFG2T Union Nut KFG2N MQR Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 T IDK 321 Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection Thread

Series AS-FM/AS-M/ASD-FM

Max. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 12.7 9.6 22.1 12.3 17.3 8 7 30.1 25.1 28.8 33.8 10-32UNF 16.5 13.5 26.1

Compact and Lightweight

-N02 17.46 17.46 90.8 51 29.5 36.3 NPT1/4 NPT1/4 ZH15DA-N02-N03-N03 17.46 22.23 22.23 108.2 63.3 34.3 37.1 NPT1/4 NPT3/8 NPT3/8 ZH18DA-N03-N03-N03 22.23 131 73.6 41.1 39 NPT3/8 ZH20DA-N03-N04-N04 23.81 23.81 142.6 74.9 44.1 NPT1/2 NPT1/2 Inch Dimensions when the standard bracket is mounted 229 A ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L L-bracket (Bracket on a single side) K J H

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

ISE70/75/75H

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Pressure Switch: For Air ISE70/71 Series How to Order p. 6 Options/Part Nos. p. 6 Specifications p. 7 Set Pressure Range and Rated Pressure Range p. 10 Internal Circuits and Wiring Examples p. 10 Dimensions p. 11 Function Details p. 12 Safety Instructions Back cover 5 RoHS 3-Screen Display High-Precision Digital Pressure Switch: For Air ISE70/71 Series How to Order ISE70 02 M L2 Pressure

High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

Aluminum High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

VQ5000

S. T. Manufacturing Co., Ltd.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Basic Style with Bottom Mounting: CG1KRN 2-Rc P Width across flats B1 S + Stroke ZZ + Stroke Stroke range (mm) Up to 150 Up to 200 Up to 200 Up to 300 Up to 300 Up to 300 Bore size (mm) 20 25 32 40 50 63 H1 ZZ H Y GB X B1 GA L MM S AL E KA LX P A D I LD LH N 104 111 117 135 155 161 27 32 32 39 45 45 11 12 13 16 17 19 10 10 10 10 12 12 38 44 45 55 62 64 20 22 26 30 33 39 75 77 83 94 108 114