2

(C) Correction factor 1.21 1.10 1 0.87 0.76 0.74 0.72 0.70 IDG 5 to 30 35 40 45 50 55 60 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 5 to 45 50 55 60 65 70 75 80 Data B: Ambient Temperature Note) Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E IDU55E, 75E IDF100F to 150F IDF190D to 240D Ambient temp.

Battery-less

LECSN-T1 LECSS-T1 Compliance No.

Electric Actuator/Slider Type

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

ZP

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

CATALOG

-25 NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ZSE401 T1-26 Vacuum Analog output 1~5V (+ 5%F.S.), load impedance : 1k ZSE401 T1-65 PNP output PNP open collector 80mA ISE4L01 T1-25 Positive Pressure NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ISE4L01 T1-26 100kPa Analog output 1~5V (+ 5%F.S.), load impedance: 1k ISE4L01 T1-65 (14.5PSI) Type

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L Calculation example) T1 to T4 can be calculated as follows. Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], Time [s] T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1 T2 T3 T4 T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

ZP

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

15

L Speed: V [mm/s] Calculation example) T1 to T4 can be calculated as follows. a1 a2 Time [s] T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] T1 T2 T3 T4 L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration T2 = L : Stroke [mm] time can be obtained by the following equation. 200 0.5 300 (0.1 + 0.1) 300 (Operating condition) V : Speed

Table of Contents

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

1

The minimum bending radius of the cable is 55 mm. 15 23 29 28 7 22 16 27 10 9 8 Sheath O.D. Approx. 8.8 Printed mark (Both sides) Lead wire color Lead wire no.

Electric Actuators

-02 Performance/Specifications General specifications LC5-1-T1-02 Part no.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Fluoropolymer Piping Equipment

Symbol Symbol Applicable tubing size (inch) 2 3 4 5 6 Fitting type Symbol T1 T2 T3 T4 Class No.

ZP

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

Table of Contents

Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

Table of Contents

Housing 23.5 24.6 105 118 29 24.6 B Thread size M3 x 0.5 6 4 45 M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D. 55 55 A A Motor mounting area 1 For the motor mounting area dimensions of the models below, refer to the long stroke type dimensions. B Section BB Section BB Long stroke type1 Coupling Motor P.C.D.

Table of Contents

bar absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000-55-1B SY5000-55-1B SY7000-55-1B Applicable series 10-SY3000 10-SY5000 10-SY7000 10-SY3000 10-SY5000 10-SY7000 One-touch fitting (Inch size) One-touch fitting (Inch size) Port size One-touch fitting for 5 / 16" One-touch fitting for 3 / 8" One-touch fitting for 3 / 8" Assembly part No.

Proposals for Energy Saving

Solenoid specifications Apparent power VA Inrush Energized Power consumption W (energized) Temperature increase C (rated voltage) 8 6.5 8 11 9.5 11.5 Symbol Frequency Hz 50 66 (60) 20 60 57 (51) 15 50 93 25 60 79 20 Model Power supply 55 45 50 60 50 55 OUT AC VXZ22 DC AC IN VXZ23 DC Note 1) Reset voltage is 20% or more of rated voltage for AC, and 5% or more of rated voltage for DC.