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510 510 824 824 824 1019 1019 440 650 650 650 1080 1080 1080 1300 1300 1268 1258 1978 2278 1550 2160 2770 2558 3288 1000 945 1340 1340 1100 1550 1650 1700 1700 550 645 740 740 750 750 750 850 850 6 9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24

Air Tank Series AT 1

510 510 824 824 824 1019 1019 440 650 650 650 1080 1080 1080 1300 1300 1268 1258 1978 2278 1550 2160 2770 2558 3288 1000 945 1340 1340 1100 1550 1650 1700 1700 550 645 740 740 750 750 750 850 850 6 9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24

Industrial Filters

915 1250 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 750 20 130 50 400 267.4 230 510 1175 1510 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 1000 20 150 64 400 267.4 230 510 1440 1775 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750

Refrigerated Air Dryer

Series Air flow capacity (m3/h [ANR]) Outlet air pressure dew point Rated inlet condition Page Model Refrigerant Port size 3C 7C 10C IDFA3E 12 15 17 Rc 3/8 IDFA4E 24 31 34 Rc 1/2 IDFA6E 36 46 50 P. 92 to 94 R134a (HFC) IDFA8E 65 83 91 Rc 3/4 IDFA11E 80 101 112 35C 0.7 MPa IDFA15E1 120 152 168 Rc 1 IDFA22E 182 231 254 R 1 IDFA37E R 11/2 273 347 382 P. 95 to 97 R407C (HFC) IDFA55E 390 432 510

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): null～0.7, Power Supply: DC24V, Accessories/options: ordered separately: With power supply cable (3 m) / without bracket, I/O specifications: PNP output, Bar length(mm): 780, Emitter cartridge type: High-speed ionization

Potential Measurement: 1 (±0.4kV)

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D-Z73/D-Z76/D-Z80 Direct Mounting Style. 488 489 490 492 492 492 492 493 494 494 494 494 495 496 497 499 500 500 501 501 501 501 502 503 506 506 506 506 507 507 509 509 509 509 510 510 511 511 511 511 512 513 514 515 517 520 520 520 521 522 523 523 524 525 526 527 528 529 530 531 532 533 534 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office:

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5H7 depth 6 +0.012 0 2-RB0805-X552 Shock absorber (mm) ZZ Z SS S Q P L F Model CXWL16-25 CXWL16-50 CXWL16-75 CXWL16-100 CXWL16-125 CXWL16-150 CXWL16-175 CXWL16-200 184 148 121 27 160 52 39 34.5 234 198 146 52 210 52 64 47 284 248 171 77 260 65 89 53 334 298 196 102 310 90 114 53 384 348 221 127 360 90 139 65.5 434 398 246 152 410 90 164 78 484 448 271 177 460 90 189 90.5 534 498 296 202 510

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E

Refrigerated Air Dryers

Unit weight [kg] Reference weight (including air dryer and transformer) [kg] IDF-TR500-1 51.5 IDF-TR500-2 208 56 IDF-TR500-3 284 65 IDF-TR500-4 72 171 IDU8E-10 934 IDU-TB407 370 340 45 475 605 6 IDF-TR1000-1 199 57 IDF-TR1000-2 220 63 IDF-TR1000-3 284 68 IDF-TR1000-4 75 IDU11E-10 984 IDF-TR1000-1 85 IDF-TR1000-2 220 91 IDF-TR1000-3 284 96 IDF-TR1000-4 103 199 IDU-TB408 IDU15E1-10 1035 540 510

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-53H Petroleum, Water-glycol, Emulsion FH342 CB-53H-V Phosphoric ester FH54 0 1 CB-65H Petroleum, Water-glycol, Emulsion to CB-65H-V Phosphoric ester FH64 0 1 AG-9H Petroleum FH34 0 1 to AG-9H-W Water-glycol, Emulsion FH64 0 1 Blanking cap (for differential pressure indication part) AG-9H-V Phosphoric ester AG-12H Petroleum FH342 AG-12H-W Water-glycol, Emulsion AG-12H-V Phosphoric ester 510

Support Guide/11-LEFG Series

Note 4) When the suction flow rate is 0 L/min, the particle concentration is measured during operation without suction. 510 A Particle Generation Characteristics 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) 11-LEFS16 Speed 500 mm/s 11-LEFS25 Speed 500 mm/s 10 10 LEF

LEKF-OMZ0035

Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310 1410 940 470 Stroke 701 to 800 550 330 160 750 500 250 1140 760 380 Speed [mm/s] Note2) range 801 to 900 610 410 200 930 620 310 Actuator specification 90 to 1000 510

LEH_C

50% 100% 3150 70% 100% 20L , 25L 520 40% 100% 2130 50% 100% [mm/sec] () 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 540 40% 100% 3150 80% 100% 1130 60% 100% 510 40% 100% 22 - 150% LEHZJ 1) (SVON ) 2)CN1 EMG() a)SVRE SETONON SVRE OFF SETON ON b) SVREON SVREON c) SVREON 3)CN1 M24V() a) b) (M24V) c) 1) 2) : CW () : CW 3) () 4) 23 - ()0.5m () (

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

(PAT.PEND) MHF MHL Over length L (mm) Gripping moment Weight (g) Bore size (mm) Model MHR (Nm) L MHK Over length L(mm) MHY2-10D 10 0.16 70 Gripping moment 71 Weight (g) Bore size (mm) Model (Nm) MHY2-16D 16 150 0.54 84 MHS L MHY2-20D 20 320 1.10 106 MHW2-20D 68 300 20 0.30 MHY2-25D 25 560 2.28 131 MHC MHW2-25D 510 25 0.73 78 At the pressure of 0.5 MPa 905 MHW2-32D 32 93.5 1.61 MHT Auto

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.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHY2-10D 10 0.16 70 Gripping moment 71 Weight (g) Bore size (mm) Model (Nm) MHY2-16D 16 150 0.54 84 MHS L MHY2-20D 20 320 1.10 106 MHW2-20D 300 68 20 0.30 MHY2-25D 25 560 2.28 131 MHC MHW2-25D 510 25 0.73 78 At the pressure of 0.5 MPa 905 MHW2-32D 32

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHY2-10D 10 0.16 70 Gripping moment 71 Weight (g) Bore size (mm) Model (Nm) MHY2-16D 16 150 0.54 84 MHS L MHY2-20D 20 320 1.10 106 MHW2-20D 300 68 20 0.30 MHY2-25D 25 560 2.28 131 MHC MHW2-25D 510 25 0.73 78 At the pressure of 0.5 MPa 905 MHW2-32D 32

IDU/IDF

IDF-FL1C IDF-FL2C IDF-FL3C IDF-FL4C IDF-FL6C IDF-FL8C IDF-FL11C IDF-FL15C IDF-FL22C IDF-FL37C IDF-FL55C IDF-FL75C A 180 180 225 225 345 345 365 385 430 555 600 640 360 440 360 440 250 750 440 600 B 145 145 180 180 270 270 270 310 310 380 410 510 420 420 420 420 480 480 670 670 Dryer IDF-FL1C, 2C, 3C, 4C, IDU-FL3C, 4C IDF1D IDF2D IDF3D IDF4D IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C

MHY2/MHW2

(PAT.PEND) Over length Lmm Holding mement Weight g Bore size mm Model Nm L 300 20 0.30 MHW2-20D 68 510 25 MHW2-25D 0.73 78 905 32 MHW2-32D 1.61 93.5 2135 40 MHW2-40D 3.70 117.5 5100 50 MHW2-50D 8.27 154 At the pressure of 0.5MPa Auto switch mounting at 4 locations MHZ2 MHZJ2 Two finger styles available.

Air Slide Table

Weight [g] Model Standard stroke [mm] Reduction of the shorter Additional weight of adjuster option Extra for option 10 20 30 40 50 75 100 125 150 Extension stroke end Retraction stroke end Buffer End lock Axial piping MXQ6A 130 130 170 190 210 6 10 8 30 40 total length type MXQ8A 140 160 180 210 270 290 6 10 8 30 60 MXQ12A 270 290 310 370 400 540 610 12 20 16 70 80 MXQ16A 480 510 550 630