Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): -, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): null～0.7, Power Supply: DC24V, Accessories/options: ordered separately: Power supply cable included (3 m) / with bracket, I/O specifications: PNP output, Bar length

Type: Fan Type, Indicator: Error, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): 0.66, Ion Balance: -, Ion Balance Adjusting Function: Manual, Operating Pressure Range(MPa): -, Power Supply: DC24V, Accessories/options: ordered separately: e-con connector / With bracket, I/O specifications: PNP output, Bar length(mm): -, Emitter cartridge type: -,

Type: Fan Type, Indicator: Error, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): 0.66, Ion Balance: -, Ion Balance Adjusting Function: Manual, Operating Pressure Range(MPa): -, Power Supply: DC24V, Accessories/options: ordered separately: None, I/O specifications: PNP output, Bar length(mm): -, Emitter cartridge type: -, Emitter material: -, Sensor

Type: Fan Type, Indicator: Error, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): 0.66, Ion Balance: -, Ion Balance Adjusting Function: Manual, Operating Pressure Range(MPa): -, Power Supply: DC24V, Accessories/options: ordered separately: With bracket, I/O specifications: PNP output, Bar length(mm): -, Emitter cartridge type: -, Emitter material:

Type: Fan Type, Indicator: Error, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): 0.66, Ion Balance: -, Ion Balance Adjusting Function: Manual, Operating Pressure Range(MPa): -, Power Supply: DC24V, Accessories/options: ordered separately: With AC adapter (without AC cord) / With bracket, I/O specifications: PNP output, Bar length(mm): -, Emitter

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): -, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): null～0.7, Power Supply: DC24V, Accessories/options: ordered separately: Power supply cable included (10 m) / with bracket, I/O specifications: PNP output, Bar length

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: P (PNP Output), Power Supply Cable, AC Adapter: Z (Power Supply Cable , 10m)

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: P (PNP Output), Power Supply Cable, AC Adapter: Z (Power Supply Cable , 10m), Bracket: B (Bracket)

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: P (PNP Output), Power Supply Cable, AC Adapter: R (AC Adapter + Connector)

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: P (PNP Output), Power Supply Cable, AC Adapter: R (AC Adapter + Connector), Bracket: B (Bracket)

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: PNP Output, Power Supply Cable, AC Adapter: Power Supply Cable , 10m, Bracket: -

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: PNP Output, Power Supply Cable, AC Adapter: AC Adapter + Connector, Bracket: -

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: P (PNP Output), Power Supply Cable, AC Adapter: N (w/o Cable)

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: P (PNP Output), Power Supply Cable, AC Adapter: Power Supply Cable, 3m, Bracket: B (Bracket)

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: P (PNP Output), Power Supply Cable, AC Adapter: N (w/o Cable), Bracket: B (Bracket)

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: P (PNP Output), Power Supply Cable, AC Adapter: H (e-con Connector, Power Supply Cable to be Provided & Prepared by Customer), Bracket: B (Bracket)

2

B C R V Q C B IN OUT IN OUT 2 x P (Port size) 2 x P (Port size) Clearance for maintenance G AC-A A Clearance for maintenance G AC-B Bracket (Option) AL30-A to AL40-06-A AL50-A AL60-A N T J M U J N T U M S S D R R C B V Q B C V Q IN OUT IN OUT Bracket (Option) 2 x P (Port size) A E Clearance for maintenance G 2 x P (Port size) Clearance for maintenance G A Applicable model AL10-A/AL20-A AL30

1

e w r e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Flow Characteristics Model 1, 5, 3 (P, EA, EB) 4, 2 (A, B) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Flow characteristics C (dm3/ (sbar) ) b Cv C (dm3/ (sbar) ) b Cv SS5Y3-41(-Q) SS5Y3-42(-Q) SS5Y5-41(-Q) C8 1 4 SS5Y5-42(-Q) C10 1 8 1 8 C6 C6 C8 1 4 0.20 0.20 0.45 0.43 0.66 1 4 SS5Y7-42(-Q) 0.23 0.20 0.16 0.12 0.12 0.81 0.82 1.9 1.9 3.0 0.18 0.18 0.44 0.46 0.75 0.19 0.20 0.23 0.20 0.25

ZP

Model A B C D E F 2 G H J K L M N P Q Vacuum inlet direction q Pad dia.