CQ2

Rc(PT)3/8 66 6 21 22 25 20 98 77 43 250, 300 100 M20 X 2.5 132.5 M12 X 1.75 23 67.5 26 22 97.5 156 Rc(PT)3/8 75.5 6.5 27 27 30 22 117 94 59 Note 1) All the 125 to 200mm stroke types are in 25mm increments.

TABLE OF CONTENTS

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

Air Cylinder

22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1 For dimensions other than listed above, refer to the dimensions with rubber bumper

10

45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 100 114 73 64 45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 MB-B12 125 136 90 78 60 15 110 32 136 13 13.5 24 14 75 267 25+0.084 0 Rotating Angle Model without air cushion is designed to include rubber bumpers.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

13 31 100 214.5 22 53.5 75, 100 125.5 192.5 214.5 125.5 192.5 RR CW L B + Stroke CZ -0.1 -0.3 CL + Stroke Bore size (mm) Standard stroke CW CX CZ N RR A + Stroke 32 20 18 36 M6 x 1.0 10 Rod end male thread 40 22 18 36 M6 x 1.0 10 10, 15, 20, 25 50, 75, 100 50 28 22 44 M8 x 1.25 14 63 30 22 44 M10 x 1.5 14 80 38 28 56 M12 x 1.75 18 25, 50, 75, 100 100 45 32 64 M12 x 1.75 22 Rod end nut L1

Air Slide Table

40 ST 150 ST 150 0.400 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.020 ST 50, 75 0.350 0.015 ST 100 ST 125 ST 125 0.300 ST 10 to 100 0.015 ST 40, 50, 75 0.250 ST 125 ST 100 0.010 0.200 ST 100 0.010 0.150 ST 10 to 50 ST 125, 150 ST 10 to 30 0.005 ST 75 ST 150 0.100 0.005 0.050 0.000 0.000 0.000 0 50 100 0 50 100 0 50 100 Load [N] Load [N] Load [N] ST = Stroke

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

LS + Stroke ZZ + Stroke CJ1 82.5 45 5 22 13 82 106 101 55 5 28.5 14 100 125 121 65 7 30 16 120 150 CJP Other dimensions are the same as basic style.

CM2

10 120 26 13 8 45 25 34.5 37.5 M10 X 1.25 1 to 300 19.5 17 32 6 8 15 5.5 M26 X 1.5 64 22 12 122 26 13 8 45 32 21 M14 X 1.5 21.5 42.5 46.5 1 to 300 22 41 8 10 7 M32 X 2 88 24 14 154 32 16 11 50 40 With rod boot (mm) Symbol Bore h ZZ l Stroke e f 1 to 50 51 to 100 1 to 50 101to150 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 151 to 200 201 to 300 101 to 150 151 to 200 201 to

C85

6 6 19.7 12 16 16 6 M5 x 0.8 M16 x 1.5 6.2 M6 x 1 18.3 10 9 10.5 5.5 8 24 14 5 17 12 13 38 22 6 6 19.7 16 22 20 8 G 1/8 M22 x 1.5 8.2 M8 x 1.25 24 13 12 15 15 11 32 17 6 20 16 11 44 24 8 28 20 8 22 22 10 G 1/8 M22 x 1.5 10.2 M10 x 1.25 30 17 12 15 15 11 32 20 8 22 16 11 50 28 8 33.5 25 (mm) S XC ZZ Z Bore 1 to 50 1 to 50 1 to 50 1 to 50 101 to 150 101 to 150 101 to 150 101 to 150 51 to 100

Table of Contents

Air inlet Air outlet Port size Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3 1 Water Cooled Aftercooler Series HAW Model/Standard Specifications Series HAW can cool

1

, 200 129 135 29 80 118 6.6 11 depth 8 M10 x 1.5 depth 18 40 73 27 5.5 6 8 4 25 16 19 19 120 40 45 M8 x 1.25 depth 16 75, 100, 125 149 170 29 100 150 9 50 93 14 depth 10 M12 x 1.75 depth 21 34 6.5 9 10 7 32 16 19 19 120 40 45 M8 x 1.25 depth 16 150, 200, 250 149 170 29 100 150 9 50 93 14 depth 10 M12 x 1.75 depth 21 34 6.5 9 10 7 40 19 21 22 150 45 50 M10 x 1.5 depth 20 300 182 194 37 120

MB

+0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30 +0.30 +0.10 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 40 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22

CV/MVGQ

22 26 0 0.033 -X Up to 300 16 50 7 88 154 16 29.8 8 10 84.5 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 22 41 14 24 32 0 0.039 With Rod Boot 20l h B3 e f Bore size (mm) 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Data 20 25 32 40 12.5 68 30 36 17 81 93 106 131 156 25 37.5 50 75 100 185 12.5 125

CV/MVGQ

13 63.5 17 32 6 8 19.5 M26 x 1.5 34.5 15 M10 x 1.25 12.2 45 37.5 22 13 68 17 32 6 8 21 M32 x 2 42.5 21.5 M14 x 1.5 14.2 50 46.5 24 16 76 22 41 8 10 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Symbol QY Q Bore (mm) S ZZ S ZZ ZZ S ZZ S ZZ S 20 25 32 40 20 25 32 40 14 19.8 65.3 191 137 166 112 141 87 14 22

CL

) CLM2F40SCLM240, #4 (#1+4+#12) CAD 3.1-22 Fine Lock Cylinder/Double Acting Single Rod Series CLM2 Single Clevis (C) CLM2C Bore size Stroke CL MLGC CNA CB CV/MVG (mm) BN 80 90 90 Bore A 18 22 22 24 AL 15.5 19.5 19.5 21 B1 13 17 17 22 BC 38 45 45 52 BP 1/8 1/8 1/8 1/8 BQ BZ 57.5 69 69 76 CD 9 9 9 10 CX 10 10 10 15 D 8 10 12 14 F 13 13 13 16 GA 73.5 83.5 83.5 90.5 GC 8 9 9 8 GD 55 64.5 64.5

Electric Actuators

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

MGP

Before tightening the plug, wrap pipe tape around it. 140 214 50 66 116 170 M12 x 1.75 M16 x 2 32 47 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 10 12 14 18 22 22 27 27 33 39 8 10 12 15 18 18 22 22 28 33 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 50 80 12 16 20 25 32 40 50 63 80 100 Correct tightening torque Nm 7 to

Compact 5-Port Solenoid Valve

142.4 151.4 160.4 169.4 178.4 187.4 196.4 205.4 214.4 223.4 232.4 241.4 250.4 259.4 L3 135.5 148 160.5 160.5 173 185.5 185.5 198 210.5 223 223 235.5 248 248 260.5 273 285.5 285.5 298 310.5 310.5 323 335.5 L4 125 137.5 150 150 162.5 175 175 187.5 200 212.5 212.5 225 237.5 237.5 250 262.5 275 275 287.5 300 300 312.5 325 L5 20.5 22 24 19.5 21 23 18.5 20 22 23.5 19 21 22.5 18 20 21.5 23.5 19

Table of Contents

Manifold Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit VVX21/22/23 17-3-25 N.C./N.O. Manifold 17-2-74 VDW200/300 C.O. 3 port Single unit Pilot operated Diaphragm operation VXD21/22/23 17-3-33 N.C./N.O. Single unit Pilot operated Disk operation VXP21/22/23 17-3-43 N.C./N.O. Single unit 2 port Pilot operated (Water hammer relief type) VXR21/22/23 17-3-53 N.C./N.O.