42

40 0.6 Outlet pressure [MPa] B EB 37 19 37 0.5 Note 1) Set the pressure within the operating pressure range of the valve.

SI Unit for Vacuum Manifold

0 (4) (Device) (Application) Firmware error Occur 0xF4 11b(3)(appears) 0x1805 Release 0xB4 10b(2)(disappears) Occur 0xE4 11b(3)(appears) Voltage drop of power supply for logic/input 0x5111 Release 0xA4 10b(2)(disappears) Occur 0xE4 11b(3)(appears) 0x1850 Release 0xA4 10b(2)(disappears) Supply valve type parameter mismatch 10b (2) Occur 0xE4 11b(3)(appears) 0x1851 Release 0xA4 10b(2)(disappears

AC Servo Motor Driver (Network card type ）

It is over 40 Lower the ambient temperature of the servo motor has temperature. exceeded 40. servo motor 1 It is less than 40 Check (2). (2) Servo motor is Check the effective load ratio. The effective load ratio is high. Reduce the load or review the operation overloaded. pattern. The effective load ratio is small.

5 Port Solenoid Valve

SOL.A 8A 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 8B Station 8 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.B SOL.A 9A 9B Station 9 SOL.B SOL.A 10A 10B Station 10 SOL.B COM COM. 668 Base Mounted Plug-in Unit VQC5000 Series T VQC5000 Kit (Terminal block box kit) IP67 compliant VV5QC51 SV L2 SYJ L1 10 88.7 (7.1) 59.5 P = 41 SZ Indicator light

VQ4000

Refer to pages 2-5-40 to 2-5-43 for control unit.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 2-5-40 to 2-5-43 for control unit.

VQ5000

SOL.B 7B ( ) ( + ) 7 stations SOL.A 8A ( ) ( + ) SOL.B 8B ( ) ( + ) 8 stations 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A ( ) ( + ) SOL.B 9B ( ) ( + ) 9 stations SOL.A 10A ( ) ( + ) SOL.B 10B ( ) ( + ) 10 stations ( + ) ( ) COM Note) There is no polarity.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

SOL.B 7B ( ) ( + ) 7 stations SOL.A 8A ( ) ( + ) SOL.B 8B ( ) ( + ) 8 stations 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A ( ) ( + ) SOL.B 9B ( ) ( + ) 9 stations SOL.A 10A ( ) ( + ) SOL.B 10B ( ) ( + ) 10 stations ( + ) ( ) COM Note) There is no polarity.

VQ5000

SOL.A 8A () (+) 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A SOL.B 8B () (+) 8 stations 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A () (+) SOL.B 9B () (+) 9 stations SOL.A 10A () (+) SOL.B 10B () (+) 10 stations (+) () COM Note) There is no polarity. It can also be used as a negative common.

Plug-in/Plug Lead: Single Unit

SOL.A 8A () (+) 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A SOL.B 8B () (+) 8 stations 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A () (+) SOL.B 9B () (+) 9 stations SOL.A 10A () (+) SOL.B 10B () (+) 10 stations (+) () COM Note) There is no polarity. It can also be used as a negative common.

VS 8-2/VS 8-4

or less 36 or less 40 or less 36 or less 40 or less 40 or less 45 or less 50 or less 15 or less 20 or less 70 or less 80 or less 70 or less 80 or less 70 or less 80 or less 80 or less Single 2-position 5 (R1) 3 (R2) Double 1 (P) N.C.

Pulse Valve

Specifications Series JSXFAE/F 06 10 14 Orifice diameter [mm] 32 40 50 Port size 3/4 1 1 1/2 Fluid Air Pilot valve Exhaust Pilot piping Orifice diameter: 5 mm or larger Min. operating pressure differential [MPa] 0.1 JSXFA Pilot port Max. operating pressure differential [MPa] 0.9 Max. system pressure [MPa] 0.9 Fluid temperature [C] 40*1 to 60 Ambient temperature [C] 40 to 60 Weight [g] Compression

2

-A, AFD30-A/40-A).

Air Slide Table Series MXP

) 40 8 8 8 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.03 0.04 MXP8-10 MXP8-20 MXP8-10 MXP8-20 0.06 MXP8-10 MXP8-20 MXP8-10 MXP8-20 0.05 MXP8-10 MXP8-20 MXP8-10 MXP8-20 0.03 0.02 0.04 0.02 0.03 0.02 0.01 0.01 0.01 0 0 0 20 40 60 Load (N) 20 40 60 Load (N) 20 40 60 Load (N) 10 10 10 L = 100 mm L = 100 mm L

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40

Compact Hydraulic Cylinder

2 (n 4) 2 (n 4) 2 (n 4) 2 D-M9m/M9mW 20 + 40 85 + 40 95 + 40 100 + 40 105 + 40 115 + 40 "n" pcs.

Hydraulic

50 63 80 100 40 50 63 80 100 +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 F J E B-series dH10 +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6

JIS Standard Hydraulic Cylinder

Related Products 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 +0.07 0 +0.07 0 +0.084 0 +0.1 0 +0.1 0 +0.1 0 +0.07 0 +0.084 0 +0.1 0 +0.1 0 +0.1 0 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 L1 DM5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M20 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M24

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0 + 0.1 0 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M20 x 1.5 16 l M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M24 x 1.5 20 C B series rod M6 x 1.0 M8 x 1.25 145 115 75 60 E 40 30 20 24 M30 x 1.5 31.5 dH10 L L

C85

fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5