Table of Contents

PA IN PAX Solenoid coil PB Coil: Class B, Class H Rated voltage Model AC Standard Option 100 V, 200 V 48 V, 110 V, 220 V, 240 V Orifice size (mm) Model Port size 10 VXD2130 Rc 1 4, 3 8, 1 2 Rc 3 8, 1 2 Rc 3 4 DC 24 V 12 V 15 20 VXD214 VXD215 VXD226 VXD227 VXD238 VXD239 2 0 Standard Option 2 0 2 0 Rc 1 25 Material 2 0 32A 35 40A 40 2 0 Body Seal Brass/BC6, Stainless steel NBR, EPDM, FKM

Free Mount Cylinder

F9BWV Relay, PLC 2-wire IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

Cylinder with Lock

) Grommet Grommet 3-wire (NPN) 5 V, 12 V M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 v v V v v Water-resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96V A96 V V

Rotary Actuator

V V V V V V Single shaft with four chamfers X V V V V V V V V V Double shaft with key Y V V V V V V V V V Shaft type Standard Double shaft with four chamfers Z V V V V V V V V V Single round shaft T V V V V V V V V V Double shaft (round shaft, with four chamfers) J V V V V V V V V V Double round shaft K V V V V V V V V V Cushion None V V V V V V V V V Air cushion V V V V V With auto switch

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

32 to 100 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 7-6-22 23 Compact Cylinder with Auto Switch: Standard Type Double Acting, Single Rod Series CDQ2 Operating Range 180 200 Bore size (mm) Auto switch model 12 125 140 160 63 80 100 16 50 20 25 32 40 D-A7(H)(C) D-A80(H)(C) D-A9(V) D-Z7 D-Z80 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V)L D-F7NTL D-F79F D-F9(V) D-F9W(V) D-F9BA(V)L D-Y59 D-Y69 D-Y7P

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

wire 24 V Connector Diagnostic indication (2-color indication) 20B59W Grommet H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 G59W G5PW K59W 3-wire (NPN) 3-wire (PNP) IC circuit Data 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V 24 V 12 V Grommet 2-wire Water resistant (2-color indication)

Secondary Batteries

Applicable cylinder series: 90-/91-CDLQ, 90-RSDQ Applicable auto switches : D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-A90L-900 Applicable bore size (mm) Cylinder series 20 25 32 40 50 Auto switch mounting brackets are not required.

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

MG

Standard equipped with shock absorber -X 75 100 125 150 200 250 300 20 25 32 40 50 63 80 100 20 25 32 40 50 20Series MGC P . 8-21-6 Data Series MGG V V V V V V V V V V V V V V Guide Cylinder Guide Table Cylinder with Turntable Series MGC Long stroke Bore size (mm) Standard stroke (mm) Compact type of series MGG Lightweight, space-saving 250 300 350 400 450 500 600 700 800 900 1000 1100 1200

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

conduit 3-wire (NPN) Solid state auto switch G39C G39 2-wire K39C K39 12 V M9NW V V V v v G59W V V v v 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes 3-wire (PNP) M9PW V V V v v G5PW V V v v 2-wire 12 V M9BW V V V v v 24 V K59W V V v v Grommet 3-wire (NPN) 5 V, 12 V M9NA** v v V v v 3-wire (PNP) M9PA** v v V v v Water resistant (2

Modular F.R.L. Units

Nq Body size 20 30 40 50 60 Symbol Description Nw Pipe thread type Nil Rc V V V V V N*1 NPT V V V V V F*2 G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V V 10 1 V V + Ne Port size a Mounting Nil Without mounting option V V V V V B*3 With bracket V V V V V + Option Nr Nil Without auto drain V V V V V C*4 N.C.

Rotary Actuator/Vane Type

V V V 100 V 93A Oilproof heavy-duty cord V V V M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V S79 V V v v IC circuit 3-wire (PNP) S7P V V v v Solid state auto switch Grommet Yes For 20, 30, 40 Oilproof heavy-duty cord Relay, PLC 2-wire 12 V T79 V V v v Connector T79C V V V

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

MY1

Yes Yes Yes Yes Grommet Relay, PLC 12 V 100 V 24 V IC circuit 5 V, 12 V Solid state switch Relay PLC 12 V Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V For 25, 32, 40, 50, 63, 80, 100 Lead wire length (m) Load voltage Electrical entry Auto switch model Pre-wire connector Applicable load Perpendicular In-line Indicator light Type Special function Wiring

ZP

25 40 40 Stroke [mm] Pad diameter [mm] 10 16 25 40 10 V V V V 20 V V V V 30 V V V V 40 V V V 50 V V V V e Material N NBR S Silicone rubber1 U Urethane rubber F FKM GN Conductive NBR GS Conductive silicone rubber r Buffer specification J Rotating K Non-rotating 1 Compliant with the FDA (USA Food and Drug Administration) regulation 21CFR177.2600 for Rubber articles intended for repeated

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

-wire (PNP) M9B 2-wire 12 V Relay, PLC Yes Grommet 24 V F9NW 3-wire (NPN) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V F9PW 3-wire (PNP) F9BW 2-wire 12 V For 25, 32, 40 Lead wire length (m) Wiring (Output) Load voltage Auto switch model Special function Type Electrical entry AC DC 0.5 (Nil) 3 (L) 5 (Z) Applicable load 3-wire (NPN equiv.)

Integrated Controller

3000 mm/s2 6 Work load: W [kg] Work load: W [kg] 5 3000 mm/s2 5000 mm/s2 4 3 10 mm/s2 2 1 0 50 100 150 200 250 300 350 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQY16HC Horizontal/Lead 2.5 Vertical/Lead 2.5 45 40 35 30 25 20 15 10 5 0 50 25 75 100 125 150 175 200 11 10 9 8 7 6 5 4 3 2 1 0 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 10 mm/s2 5000 mm/s2 0 0 Speed: V [mm/s] 50 100

smcmaintenancepartslist

12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161 Sine Rodless Cylinder/Direct Mount Type Series REAR 10, 15 Replacement Procedure is P.316 Construction @2 @3 @6 @7 !