Model Type: Standard, Piping: H (Immersion Type), Tank Size: 6 (6 Inch), IN/OUT Port Size: 10 [1 (25A)], Thread: N (NPT), Outlet Pipe Dimensions: 2 (Pipe Projection: Long; Thread Type: None), Rated Voltage: None, Electrical Entry: None, Fluid and Ambient Temperature: B (-40 to 60°C), Silencer: without Silencer, Pilot Port Size: 1 (1/8), Orifice Diameter: A (Pilot Orifice Diameter for ø3mm

Model Type: Standard, Piping: H (Immersion Type), Tank Size: 6 (6 Inch), IN/OUT Port Size: 10 [1 (25A)], Thread: N (NPT), Outlet Pipe Dimensions: 3 (Pipe Projection: Short; Thread Type: G), Rated Voltage: None, Electrical Entry: None, Fluid and Ambient Temperature: B (-40 to 60°C), Silencer: without Silencer, Pilot Port Size: 1 (1/8), Orifice Diameter: A (Pilot Orifice Diameter for ø3mm

Model Type: Standard, Piping: H (Immersion Type), Tank Size: 6 (6 Inch), IN/OUT Port Size: 10 [1 (25A)], Thread: N (NPT), Outlet Pipe Dimensions: 4 (Pipe Projection: Long; Thread Type: G), Rated Voltage: None, Electrical Entry: None, Fluid and Ambient Temperature: B (-40 to 60°C), Silencer: without Silencer, Pilot Port Size: 1 (1/8), Orifice Diameter: A (Pilot Orifice Diameter for ø3mm to

Model Type: Standard, Piping: H (Immersion Type), Tank Size: 6 (6 Inch), IN/OUT Port Size: 10 [1 (25A)], Thread: R (Rc), Outlet Pipe Dimensions: 1 (Pipe Projection: Short; Thread Type: None), Rated Voltage: None, Electrical Entry: None, Fluid and Ambient Temperature: B (-40 to 60°C), Silencer: without Silencer, Pilot Port Size: 1 (1/8), Orifice Diameter: A (Pilot Orifice Diameter for ø3mm

Model Type: Standard, Piping: H (Immersion Type), Tank Size: 6 (6 Inch), IN/OUT Port Size: 10 [1 (25A)], Thread: R (Rc), Outlet Pipe Dimensions: 2 (Pipe Projection: Long; Thread Type: None), Rated Voltage: None, Electrical Entry: None, Fluid and Ambient Temperature: B (-40 to 60°C), Silencer: without Silencer, Pilot Port Size: 1 (1/8), Orifice Diameter: A (Pilot Orifice Diameter for ø3mm

Model Type: Standard, Piping: H (Immersion Type), Tank Size: 6 (6 Inch), IN/OUT Port Size: 10 [1 (25A)], Thread: R (Rc), Outlet Pipe Dimensions: 4 (Pipe Projection: Long; Thread Type: G), Rated Voltage: None, Electrical Entry: None, Fluid and Ambient Temperature: B (-40 to 60°C), Silencer: without Silencer, Pilot Port Size: 1 (1/8), Orifice Diameter: A (Pilot Orifice Diameter for ø3mm to

PULSE VALVE, IMMERSION TYPE, DUST COLLECTOR VALVE, O18, 1.7 lb

PULSE VALVE, IMMERSION TYPE, DUST COLLECTOR VALVE, O18, 1.7 lb

PULSE VALVE, IMMERSION TYPE, DUST COLLECTOR VALVE, O18, 1.7 lb

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 4-One-touch fitting 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting One-touch fitting [4 (A), 2 (B) port] Applicable tube

1

q: SY3000-23-24A w: SY5000-221-1A e: SY7000-221-1A A Valve q: SY3000-222-1A w: SY5000-222-1A e: SY7000-221-1A SUP stop valve spacer assembly with residual pressure release valve A B B SY30M-56-2A (2 pcs.) SY50M-56-2A (2 pcs.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

If valves other than non-polar type are used, this may cause malfunction. 8 0 1 9 B B B B B 10 2 11 3 12 4 D side U side 13 5 A A A A A 14 6 BOX CONNECTOR VZ3000-106-1A 15 7 + + + + + SoL. A SoL.

Compact 5-Port Solenoid Valve

Use the KQ2P series. eClip, Port Plate JSY1000 JSY3000 JSY5000 Note For A, B port C2/C4 fittings For A, B port C6 fittings Series Piping port A, B port (Clip) SJ1000-CL-1 JSY11M-19P-1A JSY31M-19P-1A JSY51M-19P-1A The part number is for 10 pieces.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note DXT144-8-1A For VF1220 DXT144-8-3A For VF1120 AN120-M5 M5 x 0.8 DXT154-34-1A With element Description Bracket VF1120 (L plug connector) VF1220 (L plug connector) Silencer Throttle valve Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Note) Type of actuation Port size Weight (kg) C [dm3/(sbar)] b JIS Symbol Single VF1120 Valve model Cv b Cv C [dm3

V100

PVT317-53-1A 1 pc.

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

2

For AC10-A For AC20-B For AC25-B For AC30-B For AC40-B For AC40-06-B For AC50-B For AC55-B For AC60-B For AC10A-A For AC20A-B For AC30A-B For AC40A-B For AC40A-06-B For AC50A-B For AC60A-B For AC10B-A For AC20B-B For AC25B-B For AC30B-B For AC40B-B For AC40B-06-B For AC50B-B For AC55B-B For AC60B-B For AC20C-B For AC25C-B For AC30C-B For AC40C-B For AC40C-06-B For AC20D-B For AC30D-B

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...