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Tl o,r to,ctrftnsrot7t ibe ggilfi to,,ctn'i"sltqtube lf thre are morc than 10 stations, supply air and exhaust fro.n both sides of manifold, NVZ50OO Proper Vahte, Ge-sket, Manifold / Suhplate Combinatiotts of Sol.enoid Manifold Mounting of |{VZ5OO And N\Z$OOO Adaptor plate ass'y DXT20t-3-tA Adaptor plate ass'y DXT2o|-3-24 . subptate DXTl99-7l TP (llNf'tD . subprerB DXT199-7-2TP (r4 NPTR .

MA2

AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC Tool adapter <10/15> MA 210 A M3

Rated Distance Range: F (0.01 to 0.03mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Unit Specification: M (Fixed SI Unit), Stations: 1, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R4 (w/Control Unit, Supply Port: Right Side, With regulator, Square type pressure gauge, 0.2 MPa), 2 Port Solenoid Valve Rated Voltage: 2 (110 VAC)

Positioning Method: 1 (Ball Coupling), Operation: 0 (Single Acting), Electrical Entry: B (Connector), Robot Adapter: R4 (Applicable Shaft Diameter Ø15)

Positioning Method: 2 (Curvic Coupling), Operation: 1 (Double Acting), Electrical Entry: C (3m Cable), Robot Adapter: R4 (Applicable Shaft Diameter Ø15)

Fitting Type: T (Union Tee), Size Combination: 6A-R4 (A: 1" x 7/8", B: 1/4" x 5/32", C: 1" x 7/8")

Part Number Description: REG W/GAUGE (0-160PSI) (R4)   Product Line: V   Product Line Description: VALVE   Family Code: 273   Family Description: VS4 (CLASS 1) SOL 4/5 PORT   Class Code: 22   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

IR10-OM00007

No. o S o1 T P2 U Q3 V R4 W Z12 -6- (1) Nm 1/8 (2) (3) (4) -7- (1) (2) (3) (4) (1) (2) (3) (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 (6) 0.6Nm -8- (1) (2) (3) 12.5Nm (4) ()ON-OFF (5) 79Nm (6) (7) (1) AF AM AFM (2) (1) ( (2) 1.52 (1) -9- 6 (1) 1 1.5 (2) , (3) (4) [][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 2 ON-OFF 1 1 7 2

IR20-OM00008

M AX.SUP.PRESS. 1.0 M Pa OUTPUT PRESS. 0.0050.2 M Pa M ADE I N J APAN G So No. o S o1 T P2 U Q3 V R4 W Z12 -6- 5 (1) 1/4 1214 (2) (3) (4) -7-7- (1) (2) (3) (4) 1 2 3 (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 -8- (1) (2) (3) 21Nm (4) (ONOFF (5) 79Nm (6) (7) (1) (AF ) AMAFM (2) 1( 2 1.5 (1) -9- 6. (1) 1 1.5 (2) , (3) a. b. c.

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Tl o,r to,ctrftnsrot7t ibe ggilfi to,,ctn'i"sltqtube lf thre are morc than 10 stations, supply air and exhaust fro.n both sides of manifold, NVZ50OO Proper Vahte, Ge-sket, Manifold / Suhplate Combinatiotts of Sol.enoid Manifold Mounting of |{VZ5OO And N\Z$OOO Adaptor plate ass'y DXT20t-3-tA Adaptor plate ass'y DXT2o|-3-24 . subptate DXTl99-7l TP (llNf'tD . subprerB DXT199-7-2TP (r4 NPTR

Stainless Steel Regulator Series NSR

Fluoro resin t'a'iao.hs N 46226 LSA F3x lji 3s9 Jro2 T..i 27 2.r4 l'rillimeter in Parentheses

Shock Absorbers and Rate Controls

0 3.41 N/A N/A 1.25 ,oJ Pfl22otf -1, -2, .3 8.14 8.34 rya(rr)r r4-l? utllF .38 l,13 l.?0 i.03 L I /A r{/ALl2 .tti, Pm225tI t, -2, -3 8 . 1 4 8.34N/A llF) lYo-12 UNt .38 l.t 3 t.?0 5.03 21 t{/a N/A 1,25 .0J P[152flt -1, .2, -3 5.68 0.J/ 1.73(rFl r%.r? ul{ .501.481.753.63 /A l.v 1.19[/a !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

M -01T 51.5 300 (Lead wire length) 60.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 55.5 Indicator light Cover diameter 1.5 Cross sectional area 0.23mm2 45 27 Series VQZ Base Mounted Type Dimensions: VQZ200 Dimenisons: VQZ200 (mm) Valve Scale: 45% Grpmmet (G): VQZ2 5(R)G 01T 02T 2 4.5 Mounting holes 4 32 19.2 Manual override Cover diameter 1.4 R4

Robot Adaptor: R4 (Applicable Shaft Diameter Ø15)

Model: H (Female Connector Union), Body Size: Body Size 4, Port Size Applicable Tube: R4 (R(PT) 1/2, Rc(PT) 1/2), Sealant: S (Sealant)

Model: L (Female Connector Elbow Union), Body Size: Body Size 4, Port Size Applicable Tube: R4 (R(PT) 1/2, Rc(PT) 1/2), Sealant: S (Sealant)

Model: L (Female Connector Elbow Union), Body Size: Body Size 3, Port Size Applicable Tube: R4 (R(PT) 1/2, Rc(PT) 1/2), Sealant: S (Sealant)

Model: H (Female Connector Union), Body Size: Body Size 3, Port Size Applicable Tube: R4 (R(PT) 1/2, Rc(PT) 1/2), Sealant: S (Sealant)

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H : X I . tJ4(iii E 14.5 5 1.8 F G F G Y 1I4( t:: I . , 145 5 1.8 ,ZPY4OD 40 43 29 39 57 251 83 15 173 17 M ... 41 20 ~ 25 ~r4 42 83 88 7 U6\S) 1 6.5 7 2.5 U6t~) 16.5 7 2.5 16 16 116 26 28 Series ZPY/Without Buffer Connection Connection Port:Bard Fitting Pad Type Bellows -Vacuum Entry Horizontal Type Mounting Male Thread 1"6,1"8 20,25,32 H T Bellows type Bellows type p H '60 ."