Table of Contents

ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 14.2 S type: White color L type: Black color 14.2 Applicable tubing diameter N ZF 14.2 Applicable tubing diameter E 14.2 17.2 ZP 17.2 19.95 ZCU 19.95 93.3 58.5 41 10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

Table of Contents

Porting specifications (A, B) EA, EB P Symbol 03 04 Symbol 3 8 02 2 stations 1 2 1 2 1 Side 2 Bottom 10 10 stations M Mixed Common Common For bottom ported: Rc 3/8 only.

V

19 1 0.15 0.08 0.13 0.08 0.15 0.1 0.08 VX2250-03 8 1.7 31 Water 0.2 0.2 0.17 0.2 0.2 0.14 0.2 VX2350-03 8 1.7 31 0.08 0.03 0.08 0.03 0.08 0.05 0.03 VX2260-03 10 2.4 43 Oil Air 0.1 0.07 0.1 0.07 0.1 0.08 0.07 VX2360-03 10 2.4 43 1 3 1/2 (15A) 0.08 0.03 0.08 0.03 0.08 0.05 0.03 10 VX2260-04 2.4 43 Steam 0.1 0.07 0.1 0.07 0.1 0.08 0.07 VX2360-04 10 2.4 43 0.5 H O W T O O R D E R S E E N E

VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

CG5-S

AS4211FG-04-10 AS3211FG-02-12 -03-12 AS4211FG-04-12 AS1311FG-M5-23 AS2311FG-01-23 AS1311FG-M5-04 AS2311FG-01-04 -02-04 AS1311FG-M5-06 AS2311FG-01-06 -02-06 AS3311FG-02-06 -03-06 AS2311FG-01-08 -02-08 AS3311FG-02-08 -03-08 3.2 4 6 R 1/4 R 3/8 R 1/8 8 R 1/4 R 3/8 R 1/8 AS2301FG-02-10 AS3301FG-02-10 -03-10 AS4301FG-04-10 AS3301FG-02-12 -03-12 AS4301FG-04-12 AS2311FG-02-10 AS3311FG-02-10 -03-

Proposals for Energy Saving

10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 14.2 S type: White color L type: Black color 14.2 Applicable tubing diameter N ZF 14.2 Applicable tubing diameter E 14.2 17.2 ZP 17.2 19.95 ZCU 19.95 93.3 58.5 41 10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

A

18 -0.5 ~ -03 3/8 30 14 12 RCS-04 11 22 42 3/8-24UNF 40 0~0.003 22 -0.5 ~ -03 1/2 50.6 40 20 16 RCD-05 44 20 28 56 1/2-20UNF 50, 63 0~0.003 22 -0.5 ~ -03 1/2 40 20 16 RCS-05 18 28 56 1/2-20UNF 50, 63 0~0.003 28 -0.5 ~ -03 3/4 64 50 27 21 RCD-08 56 23 38 71 5/8-18UNF 80 0~0.003 28 -0.5 ~ -03 3/4 50 27 21 RCS-08 21 38 71 5/8-18UNF 80 0~0.003 32 -0.5 ~ -03 7/8 72 55 31 24 RCD-10 64 24 44 79

KR

(mm) Connection thread RC Model N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 47 81 17 1 4 7.5 19.5 31.5 21.5 31 13 13.5 17 10 125 6 108 10 55 73 97 91 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 9 22.5 35.5 24 34.5 15.5 14.7 18.5 86 112 Spatter Cover 3: KRMC (Applicable: FR soft nylon) Weight (g) Applicable tubing O.D. (mm) Model N L A N-applicable tubing O.D.

reduces flow setting time

, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-03 ASG521F-03 ASG620F-04 ASG621F-04 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1000 25 15 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 1500 Effective area (mm2) Effective area (mm2) 20 10, 12 10 08 1000 15 500 10 5 500 5 0 0 0 0 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) 2 Stainless Steel Speed Controller Series ASG Construction Elbow type

Speed Controller with One-touch Fitting

, 09, 10, 11 500 06, 07, 08, 09, 10 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 400 200 01, 23 300 03, 04 200 100 01, 23 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations AS4201F-G04-m, AS4211F-G04-m AS4301F-G04-m, AS4311F-G04-m AS4201F-04-mPA, AS4211F-04-mPA AS3201F-G02/03-m, AS3211F-G02/03-m AS3301F-G02/03-m, AS3311F-G02/03-m AS3201F-03-mPA, AS3211F

VFS

Symbol 02 03 A, B P D Nil D side mounting None 01T, 10 1 4 Rc Rc Rc M Mixed 3 8 1 2 U 01C, 01F U side mounting Stations Symbol Porting specifications (A, B) 02 Passage 2 stations Symbol R1, R2 P 10 10 stations 1 Side 2 Bottom Common Common Base type 01T, 10: 2-10 stations Base type 01C, 01F: 2-8 stations Option Please indicate manifold base type, corresponding valve, and option parts.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12

SX

T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB Series CS1 SGP10A x 1 m AS420-03 AN300-03 SY SX7140-03 Tube x Length Speed controller

V100

Example: SS3YJ5-20-03 .1 set (Manifold base) SYJ512-5LZ-M5.2 sets (Valve) SYJ500-10-1A.1 set (Blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (Manifold base) SYJ514R-5G.2 sets (Valve) SYJ500-10-3A .1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A KPGR04-06 KPQR04-06 3 39.4 20.1 6 4 M A L 10.4 18 4 4 KPGR04-08 KPQR04-08 41.9 20.2 4 8 KPQR06-08 KPGR06-08 20.8 4 42.5 6 12.8 19.5 10 10 KPQR06-10 KPGR06-10 5 21.2 45 Applicable fitting size d 10 KPGR08-10 KPQR08-10 5 47 23.2 8 15.2

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2