1

F2 button ( ) 6 o Functions in accordance with on-screen display or instructions. 7 F1 button ( ) t i On the selection screen, goes back to the previous screen.

Vacuum System Peripherals:

Hysteresis 1 Output deviation (% F.S.) 0.5 Out Out How to Order 0 Return Return ITV 209 0 0 1 2 5 S 0.5 Pressure display unit Pressure range 5 kPa 9 1.3 to 80 kPa 1 0 25 50 75 100 Cable connector type Input signal (% F.S.)

Fieldbus System

Pressure sensor Outlet pressure side Pressure controller (Series ITV) Inlet pressure side Sensor connector box Self Diagnosis Function In combination with the Handheld Terminal, the following two functions are available.

LX Series Compact Electric Actuators

# ns Repeatabi I itv to t_!,'!

Compact

# ns Repeatabi I itv to t_!,'!

70pvpump

TI/ TIL PA Maintenance Parts List PAX PA3000/Automatically Operated Type PA5000/Automatically Operated Type PAX1000 PB KT-PA3-31 Diaphragm kit (PTFE) KT-PA5-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA3-32 Diaphragm kit (NBR) KT-PA5-32 KT-PAX1-36 Diaphragm kit (NBR) Check valve kit KT-PA3-36 Check valve kit KT-PA5-36 KT-PAX1-37 Check valve kit Switching valve parts kit KT-PA3

Process Pump Series PA3000/5000/PAX1000 Series PB1000

KT-PA5-37 KT-PA5-38 KT-PA3-37 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PAX1-39 KT-PA5-38 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve

Process Pump Series PA3000/5000/PAX1000 Series PB1000

KT-PA5-37 KT-PA3-37 KT-PA5-38 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PA5-38 KT-PAX1-39 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve

PA3000/5000/PAX1000

KT-PA5-37 KT-PA3-37 KT-PA5-38 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PA5-38 KT-PAX1-39 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve

air-filter-e

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Contents Applicable model FGDC FGDE FGDT FGDF Refer to pages 256 and 257 for the replacement element type. KT-FGDC KT-FGDE KT-FGDT KT-FGDF Replacement parts A 1 kit for each of each one of seals q to t and gasket.

Air Preparation Equipment

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Contents Applicable model FGDC FGDE FGDT FGDF Refer to pages 256 and 257 for the replacement element type. KT-FGDC KT-FGDE KT-FGDT KT-FGDF Replacement parts A 1 kit for each of each one of seals q to t and gasket.

smcmaintenancepartslist

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Contents Applicable model FGDC FGDE FGDT FGDF Refer to pages 256 and 257 for the replacement element type. Replacement parts A 1 kit for each of each one of seals q to t and gasket.

Series AP500

leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT

Process Pump

Switching valve kit KT-PAF3-37 Note) KT-PAF5-37 Note) Pilot valve kit KT-PAF3-38 KT-PAF5-38 Foot kit KT-PAF3-40 KT-PAF5-40 Leakage sensor KT-PAF3-47 KT-PAF5-47 606 Process Pump Automatically Operated Type/Air Operated Type PAF Series Piping and Operation: Automatically Operated Type (PAF3410, 5410) Piping diagram Reset button Air operated reset port PA Pilot air supply port AIR SUP Discharge

Pulse Valve

JSXFA(E, F, H)-10-BJSXF-10B-KT JSXFA(E, F, H)-10-B-A JSXF-10B-A-KT JSXFA(E, F)-14-BJSXF-14B-KT JSXF-14B-KT2 AN30-03 (14R, 14F), AN30-N03 (14N) Disassembly/Assembly Procedure Caution Port size: 06, 10 Port size: 14 1.

Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

25

Description PB1000A series PB1011A KT-PB1A-9 PB1013A KT-PB1A-2 Diaphragm kit Check valve kit Port set Packing kit Foot kit Solenoid valve kit KT-PB1A-1 KT-PB1A-7 Note) Air supply port Suction port KT-PB1A-4 Air exhaust port KT-PB1-3 SYJ314M-5H-Q KT-PB1A-4 Note) One of Nil, F or N is entered as a thread symbol.

IR1000/2000/3000

Note 3) KT-IR1010 KT-IR3120 Service parts kit no.

Title not found

, C o D sub connector Kt l25P) w lh 1 5m cable 1 to 12 \24) The marmLm nlrbef olslalons drrrers dependng on the eeclrcal Nole) Leave tlre box b ank for llre Sl !

Series AP3100

Elgiloy PCTFE (Option: Vespel) PCTFE 114 Series AP3600 Diaphragm Valve for Ultra High Purity Manually operated type AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Dimensions inch (mm) AP3600 AP3625 2.12 (53.8) 2.05 (52.1) 0.94 (23.9) 1.48 (37.6) 2.94 (74.7) 3.0 (76.2) 0.44 (11.2) 0.44