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P3, L10 X3 S/S . P3, L10 X4 S/S . P3, L10 RX3-2-3-2 S/S. P4, L12 RX3-1-1-1 S/S. P4, L12 M8-6x6-8 S/S . P20, L78 Y8 S/S . P4, L14 3/8BK-6 S/S . P18, L69 C1 S/S. P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S .

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New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Booster Regulator Series VBA1110 to 4200 1

P3 [MPa]: Max. booster press. (Smaller one between inlet press. x Intensified press. ratio and Max. operating pressure.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size Enclosure C4 C6 C8 C0 F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 T1 T3 M1 M2 M3 Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) With 4 One-touch fitting With 6 One-touch fitting With 8 One-touch fitting Without One-touch fitting (With clip) Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/J

0.4

VQ7 Enclosure C4 C6 C8 C0 F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 T1 T3 M1 M2 M3 With 4 One-touch fitting With 6 One-touch fitting With 8 One-touch fitting Without One-touch fitting (With clip) Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/S kits

CE2

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

Table of Contents

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size Enclosure C4 C6 C8 C0 F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 T1 T3 M1 M2 M3 Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) With 4 One-touch fitting With 6 One-touch fitting With 8 One-touch fitting Without One-touch fitting (With clip) Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/J

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Measuring mode kPa OUT1 Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value

PSE530/200

kPa OUT1 Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 ZSE ISE CH1 CH2 CH3 CH4 SET OFF P2 P1 P4 P3 PSE High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type SET Z I SE3 Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON PS MPa Switch output 1 & 2 kPa OFF Z I SE1 2 OUT1 Courtesy of

PSE200

Measuring mode kPa OUT1 Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value

The LATCA controller is the second controller available for the LAT3 magnetically driven slide table, also known as the card motor.  The LATCA controller adds pulse input and serial input options for control signals, as well as the familiar step data.  Pulse input includes 3 control modes, while serial input permits up to 16 controllers to connect via RS-485 for step data operation.

The LATCA controller is the second controller available for the LAT3 magnetically driven slide table, also known as the card motor.  The LATCA controller adds pulse input and serial input options for control signals, as well as the familiar step data.  Pulse input includes 3 control modes, while serial input permits up to 16 controllers to connect via RS-485 for step data operation.

Electric Actuator/Slider Type

LECSS2-T Front view example Main Circuit Power Supply Connector: CNP1 Accessory L1 Terminal name Function Details L2 L3 N() Control Circuit Power Supply Connector: CNP2 Accessory P3 Terminal name Function Details P(+) Regeneration option Connect between P(+) and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.