When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 16MM LE ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.73993 lb, Stroke Model30050060070080090010001200150018002000LEFB16???????????

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 16MM LE ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 4.73993 lb

2

150 Nil C D Nil H L S 300 300 75 Auto-drains listed on page 95 are attached.

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Battery-less

16 30, 50, 100, 150, 200, 250, 300 Motor 30 to 400 25 30, 50, 100, 150, 200, 250, 300, 350, 400 30 to 500 32/40 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 i Mounting*5 o Actuator cable type/length Robotic cable [m] Nil None R8 8*10 R1 1.5 RA 10*10 R3 3 RB 15*10 R5 5 RC 20*10 Symbol Type Motor mounting position Parallel In-line Nil Ends tapped/ Body bottom tapped*6 V V L Foot V

2-Color Display Digital Flow Switch Series PFM

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping.

Table of Contents

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight IDF-TR7000-8 IDF100F 7 kVA Three360 540 400 260 300 11 30 94 kg IDF-TR9000-8 IDF125F, 150F 9 kVA 400 650 450 300 350 13 40 109 kg IDF-TR14000-8 IDF190D, 240D 14 kVA 400 650 450 300 350 13 40 152 kg IDF-TR18000-8 IDF370D 18 kVA 400 650 450 300 350 13 40 179 kg 220, 240, 380, 400, 415, 440 V (50/60 Hz) phase

VQZ1000/2000/3000

83 (Metal seal) 300 (Lead wire length) 55 81 (Rubber seal) Indicator light Indicator light 61 47.5 <52.5> R1 R2 R1 R2 P P 82 Cover diameter 1.5 76 Cross section 0.23 mm2 < >: AC < >: AC 2-7-39 Base Mounted 40 40 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1250 1(R)-G-01 23.4 mounting hole 300 (Lead wire length) 95 47.5 18 7.2 7.2 3 R3 4 2 22 10 SMC SMC

Table of Contents

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.

Refrigerated Air Dryers Series IDF/IDU

IDF125F-W/150F-W: Water-cooled type T A B 4 x Eyebolt I.D. 25 G S Facility water outlet R3/4 (When symbol-W4 is specified.) Terminal block for power supply Ball valve Facility water outlet R3/4 (When symbol-W5 is specified.) Terminal block for signal F C Q R Y-shaped strainer 3/4 (Accessory) Drain tube Facility water inlet Facility water inlet L R3/4 (When symbol-W4 is specified.)

KJ

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3 0

K35-OMW0030

300 mm 350 350 mm 450 450 mm 530 530 mm 15 (6) Rod boot Part number Bore size Stroke (mm) (mm) Silicone rubber material Nylon tarpaulin 125 200 C96A2G-1461V-R C96A2G-0294Y-R 160 200 C95A6G-471AQ-R CS1-J16-300 300 200 200 C95B0G-472AQ-R C95B0G-0304Y-R 300 250 350 C95B5G-533AQ-R C95B5G-574EQ-R 450 200 C1SC2G-1468V-R CS1-J25-200 350 C1SC2G-1470V-R CS1-J25-530 530 320 Ambient temperature specifications

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.