! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

ASP-X369 Series Compact With One-touch Fitting Wide size variations VQ1000 (2000)-FPGDouble check block DIN rail mountable With One-touch Fitting Best Pneumatics (1) VQ1000-FPG Refer to P.1053. VQ2000-FPG Refer to P.1059.

Vacuum

C Panel mounting Internalthrcad M N45 (10-32 nom.) female K21V 0-30inHg 1/8"NPT Dimensions: Height . 2.'1 " Thickness .-..,.,.,. 0,9' Width (diameter) . 1.5" Gauge with Panel Mounting As6'y (dimensions tor mtg. hole) R3 M5xO.8 x 5 Panel lhickness Max. 3 5 M5XO.8X 1 / 4 . 1 A 1 5 5 nccesories I SYJ .

Vacuum

C Panel mounting Internalthrcad M N45 (10-32 nom.) female K21V 0-30inHg 1/8"NPT Dimensions: Height . 2.'1 " Thickness .-..,.,.,. 0,9' Width (diameter) . 1.5" Gauge with Panel Mounting As6'y (dimensions tor mtg. hole) R3 M5xO.8 x 5 Panel lhickness Max. 3 5 M5XO.8X5 1 / 4 . 1 A 1 5 5 nccesories I SYJ .

V100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

HRX-OM-M090

Fig 9.4-4 Cooling capacity(HRS018--20) 9.4.5 HRS024--20-(BJMT) 3500 3500 Ambient Ambient 3000 3000 temperature temperature or or Cooling capacity[W] Cooling capacity[W] 2500 2500 facility water facility water temperature temperature 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[]

Table of Contents

D1 20 30 40 50 10 5 -X Transfer speed: (m/min) 20Data Bore Size 32 to 100/MGPM32 to 100 (Slide bearing) MGPM32 to 100 (Slide bearing) m m 2000 l 50 mm l 50 mm 100 1000 80 Weight of transferred object: m (kg) 63 500 400 50 300 40 200 When selecting a model with a longer l dimension, be sure to choose a bore size which is sufficiently large. 32 100 Caution Caution on handling Note 1)

KK/KK13

Printed in Japan. 1st printing May, 2000 D-SMC.L.A. P-80 (D)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

SMC Basic Pneumatics

The cost of producing a volume flow of .| r3"hin is then ffififW = 40 cents / hr. In our example: 0.336 m3ry'min 1mg/min . 40 cents / hr = 13.4 cents per hour.

%silltr

The cost of producing a volume flow of .| r3"hin is then ffififW = 40 cents / hr. In our example: 0.336 m3ry'min 1mg/min . 40 cents / hr = 13.4 cents per hour.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. The test was performed in both an axial direction and a perpendicular direction to the lead screw.

Series: LEFB (Belt Drive), Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 2000mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m)

Series: LEFB (Belt Drive), Size: 25, Motor: A [Servo Motor (24 VDC)], Lead: T, Stroke: 2000mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m)

Series: Belt Drive, Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 2000mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector

Series: Belt Drive, Size: 25, Motor: A [Servo Motor (24 VDC)], Lead: T, Stroke: 2000mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

KJ

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model