Industrial Filters

1580 1980 100 150 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 820 29 500 24 375 163 675 500 300 850 1120 1575 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 820 29 750 24 435 216 675 500 300 850 1380 1835 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 820 29 1000 24 495 269 675 500 300 850 1640 2095 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 870

XM, XY

part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3

IDX-OM-Z004

150 160 t K K K K K16K JIS 80A 10K 64 (17) 17) 40 (K16K) 1823) (18~23) JIS 80A 10K 479 127 1332 1432 1,3 -W4 (-W4) -W4 Y3/4 (-W4) Y 3/4 () () R3/4 R3/4 20 50 165 475 9902 1030 950 (-W5) -W5 1,3 (-W5) -W5 R3/4 R3/4 IDF100F150F-W 6 5 IDX-OM-Z004 6 6.4 IDF100/125F/150F-30-W R R GFCI PE TB1 THR MC1 CM OLR MC1 HM PRR SWL PLC TB2 Y0 1 MC1 COM0 2 Y3 3 COM3 4 MC1 Y1 X4

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3

IDX-OM-M051

/4 R3/4 20 50 165 475 9902 1030 950 Facility water outlet 1.3 Name and function of parts Terminal block for signal (Symbol: W5) (Symbol: W5) R3/4 R3/4 Refer to 6.3 Outer dimensions 6 5 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

Table of Contents

150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80 120 160 200 Gripping point R (mm) Gripping point

LVQ

SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

OMR0032

Caution Prepare 2 separate 24 VDC power supplies for the CN1 controller power supply and CN5 input / output signal power supply. 35 - (3) Pulse input internal circuit B7 R1 B8 Pulse input signal switch R2 B9 Main circuit R3 B10 R1 R2 R3 Pulse input signal Power supply voltage Input signal method Current limiting resistor R for pulse input signal

33

HRS HRS 090 HRS 100/150 HRSH 090 HRSH HRSE HRSE HRZ HRZD Lots of variations are available in response to the users requirements.

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Mounting Position: R (Right Side Parallel), Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Mounting Position: Right Side Parallel, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable,

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

K35-OMX0029

P port(Supply port)Supply pressure fitting (0.55 to 0.8 MPa) R1,R2,R3(*1) ports(Exhaust port)Silencer *1 A small amount of air in the cover tube is exhausted from R3 port. *2 Ports FA and FB are plugged before shipment.

Prevents Micro-Bubbles

SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

XLAQ/XLDQ

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Vacuum

C Panel mounting Internalthrcad M N45 (10-32 nom.) female K21V 0-30inHg 1/8"NPT Dimensions: Height . 2.'1 " Thickness .-..,.,.,. 0,9' Width (diameter) . 1.5" Gauge with Panel Mounting As6'y (dimensions tor mtg. hole) R3 M5xO.8 x 5 Panel lhickness Max. 3 5 M5XO.8X 1 / 4 . 1 A 1 5 5 nccesories I SYJ .

Vacuum

C Panel mounting Internalthrcad M N45 (10-32 nom.) female K21V 0-30inHg 1/8"NPT Dimensions: Height . 2.'1 " Thickness .-..,.,.,. 0,9' Width (diameter) . 1.5" Gauge with Panel Mounting As6'y (dimensions tor mtg. hole) R3 M5xO.8 x 5 Panel lhickness Max. 3 5 M5XO.8X5 1 / 4 . 1 A 1 5 5 nccesories I SYJ .

Table of Contents

150 st 150 st or less Over 150 st 150 st or less Over 150 st 150 st or less Over 150 st 80 80 80 45.5 40.5 24 38.5 0 146.5 193 30 46.5 25 160 193 13.5 46.5 100 100 100 49 43.5 26.5 41 166 203 36 0 37 30 180 203 14 37 8-19-48 Compact Guide Cylinder Heavy Duty Guide Rod Type Series MGPS 50, 80 How to Order MX MGP 50 50 S Y7BW MTS MY CY Number of auto switches 2 pcs. 1 pc.