Table of Contents

250 Internal grip 300 200 Pressure 0.6 MPa Gripping force (N) Gripping force (N) Pressure 0.6 MPa 250 0.5 MPa 0.5 MPa 150 200 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 150 100 0.2 MPa 0.2 MPa 100 50 50 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 60 60 70 70 Gripping point L (mm) Gripping point L (mm) MHSJ3-63D MHSJ3-63D 400 500 Pressure 0.6 MPa Pressure 0.6 MPa 400 Gripping force (N) Gripping

XM, XY

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature types (Models/XMH, XYH; Temperature specifications/H0) 1. When a valve is to be heated, only the body section should be heated, excluding the bonnet (handle) section.

Prevents Micro-Bubbles

SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Vacuum

&lfifitweBftl L x 36mm W x 59mm H, 4409 Houu incneasd by 250% tage nozzle design allows for suction tlow of to 250% higher than traditional single stage 3-stage nozzle design -in 0ne-Iomt Hffn$ ilt-in One,Touch fittings (O% SUP / O% VAC) for quick and easy process connection. filhn & txlau$ $ilemen f ilter and exhaust Silencer are an part of the vacuum ejector module. exhaust oDtion is also

Vacuum

&lfifitweBftl L x 36mm W x 59mm H, 4409 Houu incneasd by 250% tage nozzle design allows for suction tlow of to 250% higher than traditional single stage 3-stage nozzle design -in 0ne-Iomt Hffn$ ilt-in One,Touch fittings (O% SUP / O% VAC) for quick and easy process connection. filhn & txlau$ $ilemen f ilter and exhaust Silencer are an part of the vacuum ejector module. exhaust oDtion is also

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3

IDX-OM-M051

/4 R3/4 20 50 165 475 9902 1030 950 Facility water outlet 1.3 Name and function of parts Terminal block for signal (Symbol: W5) (Symbol: W5) R3/4 R3/4 Refer to 6.3 Outer dimensions 6 5 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

Table of Contents

, 175, 200 250, 300, 350, 400 78.5 1.5 62.5 12 10 6 42 11.5 9 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.6 9.5 5.5 1/8 37.5 13.5 28.5 26 WA WB Bore size (mm) Standard stroke (mm) R S T U VA VB X XA XB YY YL Z 100 to 175 st 200 to 250 st 300 to 400 st 100 to 175 st 200 to 250 st 300 to 400 st 75 st or less 75 st or less 25, 50, 75, 100, 125, 150, 175, 200, 250 16 20 25 200 24 54 25 3 62 3.5 46

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

V100

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Shock Absorbers and Rate Controls

8 150 5 In0tilI.5(B) .44 0.50 3-50 250 ?84.000 775 2.0 3.8 250 5 0tnt.0(8) .50 1.00 12.130 650 6n,000 t,000 3.0 6.0 300 l 0 tR0IIt .0(8) .50 1.00 3-50 650 6n.000 1.000 3.0 6.0 450 t0 0tltl.l5xl .63 1.00 l2-130 r,700 670,000 ?.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 66 300 (Lead wire length) Indicator light 300 61 Indicator light 49 55.5 Cover diameter 1.5 Cross sectional area 0.23mm2 P R 1 3 P R 1 3 Dimenisons n : Stations (Max. 20 stations) Equation L1=10.5n+9.5 L2=10.5n+22.5 L n 2 30.5 43.5 75 85.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 18 198.5 211.5 237.5 248 19 209 222 250

SMC Basic Pneumatics

The cost of producing a volume flow of .| r3"hin is then ffififW = 40 cents / hr. In our example: 0.336 m3ry'min 1mg/min . 40 cents / hr = 13.4 cents per hour.

%silltr

The cost of producing a volume flow of .| r3"hin is then ffififW = 40 cents / hr. In our example: 0.336 m3ry'min 1mg/min . 40 cents / hr = 13.4 cents per hour.

XLAQ/XLDQ

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. Bellows side Chamber Vacuum pump 476 XLAQ/XLDQ Series Specific Product Precautions 2 Be sure to read this before handling the products. Maintenance Caution 1.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

or less 4 x R3 or less 33 ZSE20(F)/ISE20 Series Function Details ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Display examples of the main and sub (set value) screens of each mode.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3

VBA-OM-P019

/8) VBA4 28~30Nm(R1/2) OUT O Rc1/4 O A B C D E F G H I J K L M O VBA20A VBA22A 481 444 394 Rc3/8 59 VBAT20A1 VBAT20A1 216 700 520 477 429.8 180 200 100 400 Rc1/2 305 236 Rc1/2 85 VBA42A VBA20A VBA22A 531 494 444 Rc3/8 59 IN OUT VBAT38A1 VBAT20A1 252 873 570 527 479.8 205 250 150 500 Rc3/4 355 250 Rc1/2 85 VBA42A IN IN OUT OUT VBA2,4 24NmM10 1 VBA4 4-14-1 , Sotokanda, Chiyoda-ku,