Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 750mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: S (Standard Cable), Cable Length:

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 750mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Standard Cable, Cable Length: 10m, Driver Type: LECSA2

Environment

3 e r t r Motor type* Nil Basic type H High precision type Symbol Type Output [W] Actuator size Compatible driver S2 AC servo motor (Incremental encoder) 100 25 LECSA-S1 w Size e Motor mounting position S3 AC servo motor (Incremental encoder) 200 32 LECSA-S3 Nil Top mounting D In-line 25 32 S6 AC servo motor (Absolute encoder) 100 25 LECSB-S5 LECSC-S5 LECSS-S5 S7 AC servo motor (Absolute

LEJ-OM004xx

LECSC-S5 LECSS-S5 40 AC servo motor (absolute encoder) S6 100 *3 (6) Vacuum port direction Left side Nil LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (absolute encoder) S7 Right side R 63 200 Both side D *1 Fo r mo tor type S 2 and S6, note that the com patible driv er part number suffix is S1, S5. *3When v acuum ov er 50L/m in( ANR), select D. *2 (4) S troke [mm] Standard Produced upon receipt

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 750mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: w/Connector

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 750mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector:

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

CP95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

C95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

CP95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

C95

25 25 5 5 5 5 5 5 11.5 12 14 14 16 16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3 4.3 4.3 6.3 41 48 54 60 75 85 6.6 6.6 9 9 11 11 10.5 11 15 15 18 18 32.5 38 46.5 56.5 72 89 10 10 10 12 16 16 142 160 170 190 210 230 32 40 50 63 80 100 22 25 27 32 36 41 5.5 5.5 6.5 6.5 10 10 CP95 C95 C92 CA1 Counter pivot ES Counter pivot E CS1 Bore (mm) Bore (mm) d2 CK S5

CA2

20 to 750 40 37 102 32 78 25 52 18 76 160 21 13 M12 x 1.75 10 119 13.5 130 102 MB1 up to 750 20 to 750 40 37 116 41 92 30 52 18 92 180 21 16 M12 x 1.75 10 133 13.5 150 116 CA2 If a hole is provided to accommodate the boot when the air cylinder is mounted, make the hole diameter larger than the outside diameter of the boot d.

CL

(mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL LH KA BX K B1 EA B BY BP C D GB GC H1 J LD FA F EB GA With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to1400 30 to 1400 30 to 1400 Without rod boot to 500 to 600 to 600 to 750 to 750 to 1400 to 1400 to 1400 1 4 1 4 1 4 1 4 1 4 1 2 1 2 3 4 / / / / / / / / 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 M10

Battery-less

to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range 701 to 800 20 to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 30 to 750 20 to 550 10 to 300 801 to 900 24 to 610 16 to 410 8 to 200 30 to 750 20 to 550 10 to 300 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 750 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to

CNA

Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 13.5 83 M12 x 1.75 13.5 98 M12 x 1.75 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Stroke range (mm) e Bore size (mm) 40 50 63 80 100 l f h LX LY MM N P Q H S T V W X Y ZZ (One side) (Both sides) 263 292 306 369 399 271 300 314 378 408 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81

CNA

Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 13.5 83 M12 x 1.75 13.5 98 M12 x 1.75 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Stroke range (mm) e Bore size (mm) 40 50 63 80 100 l f h LX LY MM N P Q H S T V W X Y ZZ (One side) (Both sides) 263 292 306 369 399 271 300 314 378 408 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot H ZZ e f h l ZZ 40 6 14 71 11 M14 x 1.5 27 1/4 42 11 20 45 153 51 215 43 11.2 59 1/4 stroke 223 50 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40 0 0 2 4 6 8 10 12 14 60 50 40 30 20 10 0 0 2 4 6 8 10 12 14 750 kPa 350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min]

CL

Up to 750 Up to 1000 Up to 1000 Up to 1200 With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 30 35 35 40 40 50 50 56 59 67 73 77 85 112.5 121 133 44 52 64 78 92 115 128 144 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 69 78 84 92 100 141.5 150 167 16 20 20 25 30 36 36 40 32 40 40

CV/MVGQ

Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.