Table of Contents

Caution 8-21-6 6 Guide Cylinder Series MGG Specifications JIS Symbol MX Standard Stroke Standard stroke (mm) Long stroke (mm) Model Bearing type Bore size (mm) MTS 20 250, 300, 350, 400 75, 100, 125, 150, 200 MY 25 350, 400, 450, 500 MGGM Slide bearing 32 350, 400, 450, 500, 600 CY 40 350, 400, 450, 500, 600, 700, 800 75, 100, 125, 150, 50 350, 400, 450, 500, 600, 700, 800, 900, 1000 MG Courtesy

V100

9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Station 1) (Station n) (Station 1) (Station n) (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=17 14.5 (Pitch) P=16 14.5 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 Station n L1 L2 L1 L2 Station 2 52 43 53 44 Station 20 340 331 359 350

IDX-OM-M051

/4 R3/4 20 50 165 475 9902 1030 950 Facility water outlet 1.3 Name and function of parts Terminal block for signal (Symbol: W5) (Symbol: W5) R3/4 R3/4 Refer to 6.3 Outer dimensions 6 5 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

) 87 83 Pg.7 Indicator light Applicable cord O.D. 3.5 to 7 61 Cover diameter 1.5 Cross sectional area 0.23mm2 90.5 R 3 1 P 83 R 3 1 P M type plug connector (M) 92 (Lead wire length) 80 300 77 Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 66 R 3 1 P Dimensions n: Stations (Max. 20 stations) Equation L1=16n+10 L2=16n+20 L n 2 42 52 75 85.5 18 298 308 337.5 348 19 314 324 350

Shock Absorbers and Rate Controls

9.5 9.7 I9.l tt6 350 ti/a f l{t?

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

37.5 42.5 : AC 2.10-9 VQZ100/200/300 Body Ported Dimensions: VQZ300 Valve single unit C6, C8, C10, 02 Grommet (G): VQZ3l2(R)-lGl-C6, C8, C10, 02 C6: One-touch fittings for 6 C8: One-touch fittings for 8 300 (Lead wire) 75.5 C10: One-touch fittings for 10 60.5 2-4.5 Mounting holes 02: Rc(PT)1/4 41.8 22 2-3.4 Mounting holes 28.5 20 A 4 13 18 SMC 38 Cover dia 1.6 Cross section 0.34mm2 2 46.5 R3

Title not found

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 350, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: CE1 (JXCE1, EtherCAT®, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Table Displacement (Reference Value) 0.05 W L LEKFS32 (L = 30 mm) 0.04 Displacement [mm] LEKFS40 (L = 37 mm) 0.03 LEKFS25 (L = 25 mm) 0.02 0.01 0.00 0 50 100 150 200 250 300 350 400 450 500 Load W [N] * This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. 9 10 Battery-less Absolute (Step Motor 24 VDC) Battery-less Absolute Encoder: Electric Actuator

PFxx-OMJ0005CN

304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350

3 Way,3 Port Solenoid Valve NVZ Series

N\rz3o4FoH 0.18(4.5)Dia L typ plug conneclorz/NVZ304-OL.Nvz384R-OL M type piug connector.,/Nvz3o4-OM Nvz3O4R-Oil Type 20 Manifold,z Top Ported inch (mm) Grommet(G),(H) L type plug connector (L) M type plug connector TApe 21R Manifold,/ Top Ported(External Pilot) inch(nn) Grommet (G), (H) L type dug connector(L) H type plug connector ( ) o = 6 o J 13.78 (350) r3.

NVZseies

N\rz3o4FoH 0.18(4.5)Dia L typ plug conneclorz/NVZ304-OL.Nvz384R-OL M type piug connector.,/Nvz3o4-OM Nvz3O4R-Oil Type 20 Manifold,z Top Ported inch (mm) Grommet(G),(H) L type plug connector (L) M type plug connector TApe 21R Manifold,/ Top Ported(External Pilot) inch(nn) Grommet (G), (H) L type dug connector(L) H type plug connector ( ) o = 6 o J 13.78 (350) r3.

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 350, Motor Option: w/o Option, Seal Band Stopper: N [Roller Type Seal Band Stopper [Grease Free]], Actuator Cable Type, Length: R3 (3), Controller: C61 (JXC61, Parallel I/O), Controller Mounting: 8 (DIN Rail

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 350, Motor Option: w/o Option, Seal Band Stopper: N [Roller Type Seal Band Stopper [Grease Free]], Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller

High-precision Type), Size: 25, Motor Mounting Position: L (Left Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 500mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R3

Series: LEFS, Accuracy: H (High-precision Type), Size: 25, Motor Mounting Position: L (Left Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 400mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 350mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable