Rotary Table/

of bottom positioning pin hole Position of bottom positioning pin hole Symmetric type For 180 For 90 Positioning pin hole Positioning pin hole 3 Counter-clockwise 3 B port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s u 3 i ni w n k im C c ra l o Mi 6 3 8 n ax o 1 ti ta M ro e m g u m ni n Mi e ra 180 C s l i o

LEC-OM07605CN

(1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECSS2-T5 LECSS2-T7 LECSS2-T8 LECSS2-T9 () 5.9m/s2 XY49m/s2 (2) (FR-BIF) (UVW), A 5 (UVW)(UVW) U U U U V V M V M V W W W W DC DC 24 V DC 24 V DOCOM DOCOM RA RA U,V,WCN2 (3) (4) A 6 () (5) DC24V ALM()MBR( ) RA B U DC 24 V (6) 10 (7) A 7 () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3) (4) , [](:) EEP-ROM

1

[22] 29 (41) 42 48 44.5 47.5 43.5 44 [18] Data R 63 48 43.5 [17.5] 29.5 (41.5) 26.5 (38.5) 33.5 (45.5) 41 [15] 48 [22] 29 (41) 49 55 51.5 54.5 50.5 44 [18] Y + Stroke [ ]: Denotes the locations for CDG1R. ( ): Denotes the value of long strokes.

LEC-OM02904

A 5 (2) (FR-BIF-(H) ) (UVW) (UVW)(UVW) U U U U V V M V M V W W W W DC (EMG) DC24V DC24V DOCOM DOCOM DICOM DICOM RA RA A 6 (3) (4) () (5) (EMG) ON( RYn 0 ) O FF (ALM ) ( E MG ) (EMG) ON(Ryn0)OFF(ALM) (MBR ) EM G RA DC24V A 7 (6) 10 (7) () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3) (4) , A 8 20041, (FR-BAL FR-BEL-(H)(())) EEP-ROM EEP-ROM1010 EEP-ROM EEP-ROM EEP-ROM EEP-ROM EC 1EC

CQS

Bore (mm) 12 16 20 25 Stroke range (mm) W/o auto switch A 35.3 35.3 41.2 44.7 With auto switch A 40.3 40.3 51.2 54.7 Y X LZ LY LX L1 LT L LH LG LD LS 5 5 7.5 7.5 LS 10 10 17.5 17.5 B 17 17 19.5 22.5 B 22 22 29.5 32.5 4.5 5 5.8 5.8 8 8 9.2 10.7 44 48 62 66 29.5 33.5 42 46 34 38 48 52 2 2 3.2 3.2 13.5 13.5 14.5 15 17 19 24 26 2.8 2.8 4 4 4.5 4.5 6.6 6.6 24 25.5 28.5 32.5 5, 10 Front flange

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L1 With auto switch Without auto switch Standard stroke (mm) Bore (mm) L LD LG LH LT LX LY LZ X Y Inch Metric 24 25.5 28.5 32.5 LS 15 15 24 24 B 27 27 36 39 A 54 54 65 69 LS 10 10 14 14 B 22 22 26 29 A 49 49 55 59 12 16 20 25 21.5 21.5 22.5 24.5 13.5 13.5 14.5 15 5 to 30 5 to 30 5 to 50 5 to 50 4.5 4.5 6.6 6.6 2.8 2.8 4 4 17 19 24 26 2 2 3.2 3.2 34 38 48 52 29.5 33.5 42 46 44 48 62 66 8 8

MQQ

TC TH TV TW TX TY MI W S CJ-T010B 6, 10 4.5 29 40 22 32 12 CEP1 CJ-T016B 16 5.5 35 48 28 38 16 Note) For details, refer to page 10-5-24.

MQQ

8 10 5 M LY 22 3.2 48 42 62 9.2 16 5.8 LH 22.5 3.2 52 46 66 10.7 20 5.8 Y Y X X LG 4-LD LX LT 26 3.2 57 57 71 11.2 25 5.8 LS + Stroke 32.5 3.2 64 64 78 11.2 28 7 LZ A + Stroke Front flange type/MQQTF 10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 to 40 49.5 31.5 4.5 5.5 30 45 10 FX FT 10 to 60 54 34 6.6 8 39 48 16 FZ L B + Stroke 10 to 60 57.5 37.5 6.6 8 42 52 20

MQQ

TC TH TV TW TX TY MI W S CJ-T010B 6, 10 4.5 29 40 22 32 12 CEP1 CJ-T016B 16 5.5 35 48 28 38 16 Note) For details, refer to page 10-5-24.

Table of Contents

124 200 45 83 121 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 300 172 50 4 104 4.5 44 3 118 6 M8 x 1.25 86 16 106 22 72 48 124 200 46 84 122 300 174 66 5 130 6 60 4 146 8 M10 x 1.5 110 20 130 24 92 48 124 200 48 86 124 300 174 80 5 130 6 70 4 158 8 M10 x 1.5 124 20 142 24 110 52 128 200 50 88 124 MGPM (Slide bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 75 to

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

2 x 4-OB Depth of counterbore RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5

SMC Pneumatic Clean Series

With air cushion WA 2-M5 x 0.8 Relief port GB 2-P (Rc, NPT, G) GA GA RA MM H1 RA 10 10 Width across flats B1 MM H1 W W Width across flats B1 D D MAX.WH MAX.WH E-0.05 0 E-0.05 0 I AL H + Stroke K A AL C0.1 KA A K F F 8-J S + Stroke H ZZ + 2 Stroke NA (mm) MM NA P RA S WA WH 20 20 20 A AL Bore size B1 C D E F GA H H1 I M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 J K KA M14 x 1.5

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) D-F7/J79 D-F7W/J79W D-F7BA D-F79F/F7NT D-A7H/A80H Auto switch model D-F7V D-F7WV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W D-M9V D-A9V D-P3DW Bore size U 33 36.5 42 47 55.5 65.5 U 30 32 37.5 42.5 51 59 U 27.5 30 35 40.5 49 57 U 36.5 40 45 50.5 59 67 U 39.5 42.5 48 53.5 61.5 70 U 34 37.5 43 48 56.5 64.5 U 40.5 43.5 49 54.5 62.5 71 U 37.5 40.5 46 51.5 59.5 68 U

Series AP500

Surface finish Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) Code Pressure gauge unit 2) No code M V X Unit psig/bar MPa Code No code MPA 2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Compact Cylinder with Air Cushion

Standard type (through hole type) Double end tapped type: RQA, RDQA Double end tapped mm OA threads RA RA Bore size (mm) OA RA 63 80 100 M10 x 1.5 18 M12 x 1.75 22 M12 x 1.75 22 H thread effective depth C 4-N through 2 x 4-OB depth of counter bore RB Approx.

RQ

Basic style (Through-hole) Both ends tapped style: RQA/RDQA Both Ends Tapped Style OA threads RA RA Bore size (mm) OA RA 63 80 100 M10 x 1.5 18 M12 x 1.75 22 M12 x 1.75 22 H thread effective depth C 4-N through 2 x 4-OB depth of counter bore RB Approx.

2

Applicable air dryer Note) Refer to page 48 for dimensions.

39

(mm) PA PB PC PD R RB RC RD RR W XA XB XC RA 104.5 50 63 45 45 5 40 46 88 20 20 46 48 78.4 138.5 134 92 55 45 10 55 52 104 25 25 52 54 78 151 146.5 6 Series CKZ3N Power Clamp Cylinder Complies to NAAMS standard Dimensions Model Selection CKZ3N North American Type Made to Order European Type CKZ3T Without switch XA (mm) Bore size (mm) XA 50 63 100.5 107.5 Front mounting type NC NA0.05 K +

Compact Cylinder

Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Indicator light Load voltage Model Type Wiring (output) Applicable load Electrical entry DC AC D-A93V-588 24 V 12 V Yes Reed switch Solid state switch Grommet (Perpendicular) IC circuit D-A90V-588 48 V 24 V or less 48 V or less No 2-wire D-A93-588 Relay, PLC 12 V 24 V Yes Grommet (in-line) IC circuit D-A90-588 48 V 24 V or less 48 V or less

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port