Size: 32, Stroke: 32mm (Basic), Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 3m, Controller: C61 [Parallel Input (PNP)], Mounting: DIN Rail, I/O Cable: I/O Cable, 3m

Size: 32, Stroke: 32mm (Basic), Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 10m, Controller: EtherNet/IPâ„¢, Mounting: Screw Mounting, I/O Cable: -

Size: 32, Stroke: 32mm (Basic), Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 5m, Controller: EtherNet/IPâ„¢, Mounting: Screw Mounting, I/O Cable: -

Size: 32, Stroke: 32mm (Basic), Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 1.5m, Controller: C51 [Parallel Input (NPN)], Mounting: DIN Rail, I/O Cable: I/O Cable, 1.5m

Fluoropolymer Piping Equipment

LQ1E3A-T-R8 LQ1E3A-T-R9 LQ1E4A-T-R1 LQ1E4A-T-R8 LQ1E4A-T-R9 LQ1E5A-T-R8 LQ1E6A-T-R1 3/8" x 1/4" 1/2" x 3/8" 1/4" x 5/32" 1/2" x 3/8" 3/4" x 5/8" 3/8" x 1/2" 3/4" x 5/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" Note 1) Products marked are produced upon receipt of order.

M-E05-1-LQ1

Applicable body size Nut Insert bushing LQ1E21-SS-R9 2 2-06 LQ1-2N06 LQ1-2B06 3 LQ1E21-SS-R10 2 2-06 LQ1-2N06 LQ1-2B06 4 LQ1E31-SS-R2 3 3-10 LQ1-3N10 LQ1-3B10 2 LQ1E31-SS-R8 3 3-10 LQ1-3N10 LQ1-3B10 4 LQ1E32-SS-R1 3 3-08 LQ1-3N08 LQ1-3B08 2 LQ1E32-SS-R8 3 3-08 LQ1-3N08 LQ1-3B08 3 LQ1E41-SS-R1 4 4-12 LQ1-4N12 LQ1-4B12 3 LQ1E41-SS-R3 4 4-12 LQ1-4N12 LQ1-4B12 2 LQ1E41-SS-R8 4 4-12 LQ1-4N12 LQ1

2

(C) Correction factor 1.25 1.11 1 0.90 0.63 2 to 25 30 32 35 40 2 to 25 30 32 35 40 45 2 to 25 30 32 35 40 2 to 25 30 32 35 40 2 to 25 30 32 35 40 Note) For the water-cooled type, the correction factor is determined to 1 in an ambient temperature range of 2 to 45C.

Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

Series VS

32 50 50 64 64 67.5 67.5 175 175 198 198 122 122 71 71 10 Series VS R8 Rubber Seal S ISO SIZE 1 SUB-BASE VS8-1-w 02/03/04w 2-1/4,3/8, 1/2 A,B PORTS L L 2-1/8 PILOT EXH PORTS 15 33.5 A A B B 29.5 29.5 5-1/4 PORTS M12 CONNECTOR (OPTIONAL) 2-7 MOUNTING HOLES 43.5 23 23 11.5 14 14 4 2 12 12 25 17 18 25 5 1 3 46.5 12 12 2-3/8 EA,EB PORTS 22.5 22.5 L = 1/4 23.5 15 30.5 45 3/8 27 EA EB P 1/2 30.5

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

" 1/8" x 0.086" 3/8" x 1/4" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8"

Table of Contents

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

CRB2/CRBU2/CRB1

Refer to pages 31 and 32 for detailed description of Made to Order.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

VS 8-2/VS 8-4

Class 1 turbine oil (with no additive), ISO VG32 Diana Fresia S32 Turbine Oil 32 Cosmo Turbine 32 Turbine 32 Turbine Oil 32 Fucoal Turbine 32 Winding direction Expose approx. 1 thread Pipe tape Please contact SMC regarding class 2 turbine oil (with additives), ISO VG32.

Direct Solenoid

a (sfo) valw & R9. to Manitold: NxT 3+17-2 (rnorudd in Kit) &32 x 3v. " IN$TALLANOX: loptional) Valv/Fg./Spsd Conlrol lo Manitoldr NXT 33317.3 (Ord6r sopa|aisly) &32 x 3 94 " Th inlrfca rgulalor is moo.led bstvn lhe meitold and vd$ unirs as show. in lh illuslrarth. xot,l{rnG SINGLEINTERFACEAEO. TIOT'BLE NTEBFACE AEG. G!ug.!: (For usswirh sPR0101only) optlon PslG Pan No. .fr[.-'l.

Rotary Actuator/Vane Style Series CRB1

1/4 95 90 3 13 16 5 70 88 48 94 63 7.5 9 110 23.5 53.5 19 15 16.9 17 30 CRB1BW 80-E CRB1BW 10029 30 35.5 32 24 M10 x 1.5 depth 13 0.007 0.020 0 0.052 0 0.062 R11 1/4 125 103 4 19 22 5 80 108 60 120 78 7.5 11 140 30 65 28 11.5 24.9 25 45 CRB1BW 100-E 38 38 For single vane: Above figures show actuators for 180 when B port is pressurized.

HRL

CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin, PP, PBT, POM, PU, PVC, PPS, AS, PS, EPDM, NBR, Ion replacement resin Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Earth leakage breaker Rated current [A] 30 40 50 Electrical system Sensitivity current [mA] 30 Rated operating current4 [A] 17 32

energy saving effect

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual.