VXP21/22/23

steel, Brass FKM/EPDM O-ring e O-ring e 10A to 25A 15A to 25A Stainless steel, Brass, NBR Stainless steel, Brass, NBR Disk assembly Disk assembly r r Stainless steel, Brass FKM/EPDM 32A to 50A 32A to 50A Valve spring Valve spring Stainless steel Stainless steel, Copper Stainless steel, NBR Stainless steel Class B molded Stainless steel Stainless steel, Silver FKM/EPDM, PTFE t t 10A

SY

(D Side Mount Type) SUP/EXH Block Assembly e Part Nos.

7.4

Applicable tube 2 VVQ0-50A-C2 Applicable tube 3.2 VVQ0-50A-C3 Applicable tube 4 VVQ0-50A-C4 Applicable tube 1/8" VVQ0-50A-N1 Applicable tube 5/32" VVQ0-50A-N3 8.5 mm pitch (One-touch fitting) PR plate Barb fitting 2 SS070-50A-20 Barb fitting 3.2 SS070-50A-32 Barb fitting 4 SS070-50A-40 * Part number is for one fitting assembly.

Process Valve

Screw-in type (6A to 50A) and the flange (32F to 50F) are standardized.

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

U E R P.C.D.

0.4

VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable tubing 1/4" Applicable

70pvvna

Threaded type from 6A to 50A is standardized.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Applicable tubing O.D. 1021-VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Applicable tubing O.D. 1021-VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable

Process Valve

Threaded type from 6A to 50A is standardized.

0.4

VQC1000 VQC2000 [SOL.A] () Applicable tubing 3.2 VVQ1000-50A-C3 COM (+) Applicable tubing 4 VVQ1000-51A-C4 VVQ1000-50A-C4 LED (Green) Coil LED Coil Applicable tubing 6 VVQ1000-51A-C6 VVQ1000-50A-C6 COM (+) [SOL.A] () Applicable tubing 8 VVQ1000-51A-C8 M5 VVQ1000-50A-M5 Coil LED (Orange) Applicable tubing 1/8" VVQ1000-50A-N1 [SOL.B] () Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-50A-N3

VQC

Refer to e.

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 VVQ1000-50A-C3 Applicable tube 3.2 VVQ1000-50A-C4 Applicable tube 4 VVQ1000-50A-C6 Applicable tube 6 The minimum order quantity is 10 pcs. Precautions 1) Protect O rings from scratches and dust to prevent air leakage. 2) The tightening torque for inserting fittings to the M5 thread ass'y should be 0.8 to 1.4 Nm.

Table of Contents

0 r o @2 e !

smcmaintenancepartslist

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Part No.

modular-press-e

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

Modular F.R.L. Pressure Control Equipment

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.