Table of Contents

thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples

KJ

thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples

Title not found

(mm) Connection thread Model 8 R1/4 R3/8 KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S M5 4 R1/4 10 R1/8 R3/8 M5 R3/8 6 12 R1/8 R1/2 R1/4 Union Tee Union Tee R1/8 8 R1/4 Applicable tubing O.D.

Table of Contents

Port size 02 03 04 R1/4 R3/8 R1/2 Flow valve: Series ASQ Model Model Applicable tubing O.D.

Battery-less

4 Top side parallel motor type: LEYG16E Top side parallel motor type, With lock/motor cover $4 @4 @5 $1 @4 @3 $3 In-line motor type, With lock/motor cover In-line motor type @5 @4 @3 #7 #8 @5 $1 $2 @4 @3 #9$0 !

ASR

Port size 02 03 04 R1/4 R3/8 R1/2 Flow valve: Series ASQ Model Model Applicable tubing O.D.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

valve A 78 [mm] Model A PF2M705/710/725/750W-m(-L) 91.2 PF2M711/721W-m(-L) 93 29.9 28 38.5 3 Panel thickness 1 to 3.2 Panel Fitting Dimensions 94 or more1 24 +0.5 0 74 +0.5 0 34 or more 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm 1 This is the minimum value when the rear ported type is selected for the piping entry direction.

Refrigerated Air Dryers

V 6E V V V V V V V V V *4 V 8E V V V V V V V V V *4 V 11E V V V V V V V V V *4 V 15E1 V V V V V V V V V *4 V *1 When multiple options are combined, indicate symbols in alphabetical order.

For post-stoppage positioning and locking

cover mounting screw) 4 x 11 10.5 (Clamp block mounting hole) 4 x 13 through 18 4 x 26 counterbore depth 9 2 x 8H7 +0.015 0 118 14 (Mounting hole) 500.03 32 25 15 44 140 20 35 10 18 18 82 10.5 (Fully open) 46 204 211 19 118 480 2 W-R1/W-R3 Series Specific Product Precautions Be sure to read this before handling the products.

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Body Size: 10, Motor Size: Standard, Stroke: 4mm, Motor Cable Entry: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC: -

Body Size: 10, Motor Size: Standard, Stroke: 4mm

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

R3 SET POS. 6 6 4-R3 PB 6 6 4-R3 4-R3 191 (MAX.91) (MAX.91) 325 87 60 87 60 112 112 17-5-129 34 Series LQ 1 2 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Prevents Micro-Bubbles

R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

IDX-OM-M051

Air pressure gauge Switch with lamp (Symbol: W4) (Symbol: W4) (Accessory) Refer to R3/4 R3/4 20 50 165 475 9902 1030 950 Facility water outlet 1.3 Name and function of parts Terminal block for signal (Symbol: W5) (Symbol: W5) R3/4 R3/4 Refer to 6.3 Outer dimensions 6 5 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

LVQ

R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.