Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Environment

Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.

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Note 4) L Note 2) CN1 CN1 Sequencer power supply .

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

SX

When ozone enters or is generated in the air supply. 2 4 2 4 2 4 Applicable solenoid valves: Series SX3 0, SX5 0, SX7 0 3 5 7 20 40 X90 SX Model no. Entry is the same as standard products.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Table of Contents

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 MRQ DSingle/Double type 2 Switch Block Unit Part No. Series CRB2 20Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 MRQ DSingle/Double type 2 Switch Block Unit Part No. Series CRB2 20Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 MRQ DSingle/Double type 2 Switch Block Unit Part No. Series CRB2 20Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.

CRB2/CRBU2/CRB1

P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P612010-4 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 Single/Double type 2 Switch block unit part no. Series CRB2 Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged.

Stability of suction position,

4 !3 !4 !0 !0 o i !1 o !1 i Component Parts r r No.

ITV

Cable connector (4-wire) Right angle type Cable connector (4-wire) Straight type 52 Mounting hole 4 x 7 40 (31) F.R.L.

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

Environment

position 2.6 LC3F2 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel Indicator light Slotted set screw (flat point) Indicator light Slotted set screw M2.5 x 4 L 8 2 8 3.2 4.6 2 4.6 2.6 SMC SMC 4 2.8 2.8 2.7 22 22 2.6 2.6 2.6 9.3 9.3 4 4 6 Most sensitive position 6 Most sensitive position 507 A

ITV

P4 is selected by the ON/OFF combination of S1 and S2.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

4 !5 !6 !7 !8 !

Table of Contents

4 !5 !7 !8 !9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Electric Actuators

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.