3 Port Solenoid Valve/

22.9) (With check valve) A 31.5 45 40 117.4 23.5 4 (M12 connector) (14) 202.4 (31.5) (Distance between ports) View A For M12 connector 3/8" [1(P), 3(R) port] e w 32 r Pin number q 30.7 Vent port (6.2) 103.4 54.9 VP542(R)-5 D YZ1-03 -S1 -X536 3/8" [2(A) port] Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) Safety limit switch 2 x

ZX

8 Manual override (Push and turn the locking type override.)

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

Electric Actuator/Slider Type

0 #3 @3 @6 @7 @9 @4 #8 o t @0 @2 !6 !5 w r e #7!3!4 !7 #1 !8 #0 @5 @1 @8 !9 #6 #5 #2 Motor details Component Parts No. Description Material Note No.

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit for 2 to 24 stations/Single wiring L0 kit Stations (1 to 8) L1 kit Stations (1 to 8) L2 kit Stations (1 to 8) F1 F2 F3 P1 P2 P3 L0 L1 L2 Replacement Parts No.

Series VQ Metal Seal/Rubber Seal Body Ported

Note 2) Number of terminals 1 2 8 terminals in 1 row 16 terminals in 2 rows 1 to 4 stations (double), 8 stations (single) 5 to 8 stations (double), 16 stations (single) Note) The number of terminal blocks can be chosen regard-less of station qty.

Environment

230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 LEC !

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

SX

Applicable up to 8 solenoids.

Stability of suction position,

ZP3EU-TF4JB10 [Weight: 429 g] ZP3EU-TF4JB30 [Weight: 458 g] ZP3EU-TF4JB50 [Weight: 481 g] Rc1/8 Width across flats 17 Width across flats 17 Rc1/8 Bushing Width across flats 30 Width across flats 30 Bushing 19 A B 50 8 8 19 8 8 50 B A Bushing Bushing M22 x 1.5 M22 x 1.5 32 32 4 4 11.11) 11.11) 30 30 (Rotating angle) Dimensions Dimensions (Rotating angle) 50 61 Part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) !

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 8 for changed part. Number corresponds with the parts number on the construction drawing.

CRB2/CRBU2/CRB1

P611060-8 P611010-8 P611010-9 P411020-8 P411020-9 P411040-8 P411040-9 CDRBU2W40 Series Vane type Unit part no.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Free mount type Series CRBU2 CDRBU2W20, 30 P611060-8 P611010-8 P611010-9 P411020-8 P411020-9 P411040-8 P411040-9 CDRBU2W40 Series Vane type Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 CDRB2BWU40 CDRBU2WU10 CDRBU2WU15 CDRBU2WU20 CDRBU2WU30 CDRBU2WU40 Unit part no.

Table of Contents

Free mount type Series CRBU2 CDRBU2W20, 30 P611060-8 P611010-8 P611010-9 P411020-8 P411020-9 P411040-8 P411040-9 CDRBU2W40 Series Vane type Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 CDRB2BWU40 CDRBU2WU10 CDRBU2WU15 CDRBU2WU20 CDRBU2WU30 CDRBU2WU40 Unit part no.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Free mount type Series CRBU2 CDRBU2W20, 30 P611060-8 P611010-8 P611010-9 P411020-8 P411020-9 P411040-8 P411040-9 CDRBU2W40 Series Vane type Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 CDRB2BWU40 CDRBU2WU10 CDRBU2WU15 CDRBU2WU20 CDRBU2WU30 CDRBU2WU40 Unit part no.

ITV

G PPA ITV203 0.005 to 0.5 MPa 14-8-14 1/4, 3/8 AL ITV205 0.005 to 0.9 MPa Series ITV3000 ITV301 0.005 to 0.1 MPa Controls air pressure steplessly in proportion to an electric signal. ITV303 1/4, 3/8, 1/2 0.005 to 0.5 MPa 14-8-14 ITV305 0.005 to 0.9 MPa Series ITV209 Controls vacuum pressure steplessly in proportion to an electric signal.